KR100626741B1 - Method for forming titanium silicide ohmic contact layer of semiconductor device - Google Patents
Method for forming titanium silicide ohmic contact layer of semiconductor device Download PDFInfo
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Abstract
본 발명은 티타늄 실리사이드 오믹 콘택층 형성 과정에서 실리콘 기판의 과다 소모에 따른 접합영역 파괴를 방지하고, 티타늄 실리사이드 형성을 위한 열처리 과정에서 응집화가 촉진되는 것을 효과적으로 방지할 수 있는 반도체 소자의 티타늄 실리사이드 오믹 콘택층 형성 방법에 관한 것으로, 실리콘 기판과 접하는 Ti막 상에 상부 장벽층(capping barrier) 즉, 산소확산 방지막으로서 TiAlN막을 증착하고, Ti막과 TiAlN막 계면에 질소를 이온주입법으로 첨가함으로써, 티타늄 실리사이드 형성을 위한 열처리 공정시 산소의 침입에 의한 티타늄실리사이드의 응집화를 억제함과 동시에 질소에 의한 티타늄의 질화를 동시에 진행시켜 실리콘 기판의 손실에 의한 소오스 또는 드레인 접합영역의 손상을 감소시키는데 그 특징이 있다. 이에 따라, 콘택저항 및 누설전류를 안정화시킬 수 있다.
The present invention provides a titanium silicide ohmic contact of a semiconductor device capable of preventing the fracture of a junction region due to excessive consumption of a silicon substrate in the process of forming a titanium silicide ohmic contact layer, and effectively preventing agglomeration from being promoted during a heat treatment process for forming a titanium silicide. A method of forming a layer, comprising: depositing a TiAlN film as a capping barrier, that is, an oxygen diffusion prevention film, on a Ti film in contact with a silicon substrate, and adding nitrogen to the Ti film and the TiAlN film interface by an ion implantation method, thereby producing titanium silicide It suppresses the coagulation of titanium silicide by the invasion of oxygen during the heat treatment process for formation and simultaneously the nitriding of titanium by nitrogen to reduce the damage of the source or drain junction region due to the loss of silicon substrate. have. As a result, contact resistance and leakage current can be stabilized.
Ti, 티타늄 실리사이드, 산소확산 방지, 열처리, 질화, 오믹 콘택Ti, titanium silicide, oxygen diffusion prevention, heat treatment, nitriding, ohmic contact
Description
도 1a 및 도 1b는 종래 기술에 따른 오믹 콘택층 형성 공정 단면도,1a and 1b is a cross-sectional view of the ohmic contact layer forming process according to the prior art,
도2 a 내지 도 2d는 본 발명의 실시 예에 따른 반도체 소자의 금속배선 형성 공정 단면도.
2A to 2D are cross-sectional views of metal wire forming processes of a semiconductor device in accordance with an embodiment of the present invention.
*도면의 주요부분에 대한 도면 부호의 설명** Description of reference numerals for the main parts of the drawings *
23: Ti막 24: TiAl막23: Ti film 24: TiAl film
25: 질소이온주입층 26: 장벽금속층25: nitrogen ion implantation layer 26: barrier metal layer
27: 금속막 23A: 티타늄 실리사이드층
27:
본 발명은 반도체 소자 제조 분야에 관한 것으로, 특히 티타늄 실리사이드 오믹 콘택층 형성 방법에 관한 것이다. TECHNICAL FIELD The present invention relates to the field of semiconductor device manufacturing, and more particularly, to a method for forming a titanium silicide ohmic contact layer.
반도체 소자는 웨이퍼 상에 여러 소자를 구현하고 각 소자의 상호 연결을 위해 금속배선을 형성한다. 금속배선의 물질 재료로는 주로 Al, W 등이 이용되고 있다.Semiconductor devices implement several devices on a wafer and form metallization for interconnecting each device. Al, W, etc. are mainly used as a material material of metal wiring.
Al은 Si, SiO2 등에 대한 접착력이 우수하고, 강하게 도핑된 n+, p+ 실리콘과 오믹(ohmic) 저항 특성을 가지며, 전기 비저항 값이 타 금속들에 비해 비교적 낮다는 장점들로 인해 반도체 소자의 금속배선 재료로서 가장 널리 사용되어온 재료이다. 그리고 W은 Al에 비해 저항이 크기는 하지만 피복 특성이 양호하여 고집적 반도체 소자의 배선 재료로 각광받고 있다.Al has excellent adhesion to Si, SiO 2, etc., has a strong doped n + , p + silicon and ohmic resistance, and has a relatively low electrical resistivity compared to other metals. Is the most widely used material for metal wiring. W has a higher resistance than Al, but has a good coating property, and thus, W has been spotlighted as a wiring material for highly integrated semiconductor devices.
이러한, Al은 저융점(670 ℃) 금속이라는 특징으로 인해 공정중에 EM(electromigration), SM(stress-migration), 접합파괴(junction spiking) 등의 현상을 유발하여 소자의 신뢰성에 악영향을 미칠 수 있다. EM 현상이란 전자가 Al 배선을 통해 이동할 때 Al 이온과 충돌하여 전자의 운동량(momentum)이 Al 이온에 전달됨으로써 전자의 흐름 방향으로 Al의 질량 유동(mass flux)이 생기는 현상을 말한다. 이러한 Al의 이동은 상온 부근의 온도에서 주로 결정립계를 통해 이동하는데 결정립계의 불균일성으로 인해 Al 유동의 차이(divergence)가 생기면, 배선에 공공(void)을 발생시켜 배선의 단선 불량을 유발하게 된다. 한편, SM 현상이란 Al 배선 주위의 절연막에 의한 응력에 의해 Al 배선에 변형이 발생하여 배선의 단선 불량을 유발하는 현상을 일컫는다. 이러한, EM, SM 현상은 소자가 고집적화됨에 따라 금속배선의 단면적이 감소하고, 전류밀도가 증가되므로 소자의 신뢰성에 악영향 을 미치게 된다. 따라서 이러한 현상들을 억제하기 위하여 반도체의 금속배선으로 Al을 사용할 경우에는 수 %의 Cu를 Al 타겟에 첨가하여 Al 합금을 증착하는 것이 일반적이다.Since Al is a low melting point (670 ° C.) metal, it may adversely affect the reliability of devices by causing phenomena such as EM (electromigration), stress-migration (SM), and junction spiking during the process. . EM phenomenon refers to a phenomenon in which the mass flux of Al occurs in the flow direction of electrons because electrons collide with Al ions and the momentum of the electrons is transferred to Al ions when the electrons move through the Al wiring. The movement of Al mainly moves through the grain boundary at a temperature near room temperature. If divergence of Al flow occurs due to the nonuniformity of the grain boundary, voids are generated in the wiring to cause disconnection of the wiring. On the other hand, the SM phenomenon refers to a phenomenon in which deformation occurs in the Al wiring due to stress caused by an insulating film around the Al wiring, causing a disconnection failure of the wiring. The EM and SM phenomena adversely affect the reliability of the device because the cross-sectional area of the metal wiring is reduced and the current density is increased as the device is highly integrated. Therefore, in order to suppress these phenomena, when Al is used as a metal wiring of a semiconductor, it is common to add Al% of Cu to the Al target to deposit an Al alloy.
접합파괴 현상이란 Si와 Al이 상호 확산됨으로 인하여 접합이 파괴되는 현상으로서 이를 방지하기 위하여 Al에 수 %의 Si를 첨가하여 Al막으로 Si가 확산되는 것을 억제하거나 Si과 Al 사이에 확산방지 역할을 하는 장벽금속층(barrier layer)를 형성하는 것이 일반적이다.Bond breakage is a phenomenon in which bonding is broken due to mutual diffusion of Si and Al. In order to prevent this, several percent of Si is added to Al to prevent diffusion of Si into the Al film or to prevent diffusion between Si and Al. It is common to form a barrier metal layer.
장벽금속층으로서는 Ti막이 주로 이용되는데, Ti막과 실리콘 기판을 오믹 콘택(ohmic contact)시키기 위하여 티타늄 실리사이드 오믹 콘택층을 형성한다.
As the barrier metal layer, a Ti film is mainly used. A titanium silicide ohmic contact layer is formed to ohmic contact the Ti film and the silicon substrate.
이하, 첨부된 도면 도 1a 및 도 1b를 참조하여 종래 기술에 따른 티타늄 실리사이드 오믹 콘택층 형성 방법을 설명한다.Hereinafter, a method of forming a titanium silicide ohmic contact layer according to the related art will be described with reference to FIGS. 1A and 1B.
도 1a는 트랜지스터 등의 하부구조 형성이 완료된 실리콘 기판(10)을 덮는 층간절연막(12)을 선택적으로 식각하여 실리콘 기판(10) 내의 소오스 또는 드레인 접합영역(11)을 노출시키는 콘택홀을 형성하고, 전체 구조 상에 Ti막(13)을 형성한 상태를 보이고 있다.FIG. 1A shows a contact hole exposing the source or
도 1b는 RTP(rapid thermal process) 등과 같은 열처리 공정으로 실리콘 기판(10)과 Ti막(13)을 상호확산시켜 소오스 또는 드레인 접합영역(11) 상에 TiSi2층(13A)을 형성한 것으로 보이고 있다.
FIG. 1B shows that the TiSi 2 layer 13A is formed on the source or
전술한 바와 같이 상호확산에 의해 TiSi2층(13A)을 형성하는 과정에서 실리콘 기판(10)의 소모량이 심하여 그에 따라 접합영역(11)이 파괴될 수도 있다. 또한 열처리 공정시 산소가 TiSi2층(13A)으로 침입하여 산화시키므로 TiSi2층(13A) 형성과정에서 응집화를 촉진시켜 콘택저항이 불안정해지고 누설전류가 증가하여 반도체 소자의 특성을 열화시키는 문제점이 있다.
As described above, in the process of forming the TiSi 2 layer 13A by interdiffusion, the consumption of the
상기와 같은 문제점을 해결하기 위한 본 발명은 티타늄 실리사이드 오믹 콘택층 형성 과정에서 실리콘 기판의 과다 소모에 따른 접합영역 파괴를 방지하고, 티타늄 실리사이드 형성을 위한 열처리 과정에서 응집화가 촉진되는 것을 효과적으로 방지할 수 있는 반도체 소자의 티타늄 실리사이드 오믹 콘택층 형성 방법을 제공하는데 그 목적이 있다.
The present invention for solving the above problems can be prevented from destroying the junction region due to excessive consumption of the silicon substrate in the process of forming the titanium silicide ohmic contact layer, and effectively prevent the coagulation in the heat treatment process for forming the titanium silicide. It is an object of the present invention to provide a method for forming a titanium silicide ohmic contact layer of a semiconductor device.
삭제delete
상기와 같은 목적을 달성하기 위한 본 발명은, 소오스 또는 드레인 접합을 구비한 트랜지스터 형성이 완료된 실리콘 기판 상부에 층간절연막을 형성하는 단계; 상기 층간절연막을 선택적으로 식각하여 상기 소오스 또는 드레인 접합을 노출시키는 콘택홀을 형성하는 단계; 상기 콘택홀을 포함한 전체 구조 상에 티타늄(Ti)막을 형성하는 단계; 상기 티타늄막 상에 산소확산방지막으로서 TiAlN막을 형성하되, 상기 티타늄막 형성후 공기노출없이 상기 TiAlN막을 형성하는 단계; 상기 티타늄막과 상기 TiAlN막의 계면에 질소를 이온주입하는 단계; 및 열처리 공정을 실시하여 상기 소오스 또는 드레인 접합 상에 상기 티타늄막과 상기 소오스 또는 드레인 접합의 실리콘의 반응에 의한 티타늄 실리사이드를 형성함과 동시에 상기 티타늄막을 질화시키는 단계를 포함하는 반도체 소자 제조 방법을 제공한다.The present invention for achieving the above object, the step of forming an interlayer insulating film on the silicon substrate is completed transistor formation with a source or drain junction; Selectively etching the interlayer insulating layer to form a contact hole exposing the source or drain junction; Forming a titanium (Ti) film on the entire structure including the contact hole; Forming a TiAlN film as an oxygen diffusion preventing film on the titanium film, and forming the TiAlN film without air exposure after the titanium film is formed; Ion implanting nitrogen at an interface between the titanium film and the TiAlN film; And performing a heat treatment process to form titanium silicide by reaction of the titanium film and silicon of the source or drain junction on the source or drain junction, and simultaneously to nitride the titanium film. do.
본 발명은 실리콘 기판과 접하는 Ti막 상에 상부 장벽층(capping barrier) 즉, 산소확산 방지막으로서 TiAlN막을 증착하고, Ti막과 TiAlN막 계면에 질소를 이온주입법으로 첨가함으로써, 티타늄 실리사이드 형성을 위한 열처리 공정시 산소의 침입에 의한 티타늄실리사이드의 응집화를 억제함과 동시에 질소에 의한 티타늄의 질화를 동시에 진행시켜 실리콘 기판의 손실에 의한 소오스 또는 드레인 접합영역의 손상을 감소시키는데 그 특징이 있다. 이에 따라, 콘택저항 및 누설전류를 안정화시킬 수 있다.
According to the present invention, a titanium silicide is formed by depositing a TiAlN film as a top barrier layer, that is, an oxygen diffusion prevention film, on a Ti film in contact with a silicon substrate, and adding nitrogen to the Ti film and the TiAlN film interface by ion implantation. It suppresses the coagulation of titanium silicide by the invasion of oxygen during the heat treatment process for formation and simultaneously the nitriding of titanium by nitrogen to reduce the damage of the source or drain junction region due to the loss of silicon substrate. have. As a result, contact resistance and leakage current can be stabilized.
이하, 첨부된 도면 도2 a 내지 도 2d를 참조하여 본 발명의 실시 예에 따른 반도체 소자의 오믹 콘택층 형성 방법을 설명한다.Hereinafter, a method of forming an ohmic contact layer of a semiconductor device according to an exemplary embodiment of the present invention will be described with reference to the accompanying drawings of FIGS. 2A to 2D.
먼저 도 2a에 도시한 바와 같이 트랜지스터 등의 하부구조 형성이 완료된 실 리콘 기판(20)을 덮는 층간절연막(22)을 선택적으로 식각하여 실리콘 기판(20) 내의 소오스 또는 드레인 접합영역(21)을 노출시키는 콘택홀을 형성하고, 세정(cleaning) 공정을 실시한 다음 전체 구조 상에 Ti막(23) 및 TiAlN막(24)을 형성한다. 이때, Ti막(23)은 상온 내지 500 ℃ 온도, 1 mtorr 내지 30 mtorr 압력 조건에서 10 sccm 내지 200 sccm의 Ar을 주입하고 1000 W 내지 4000 W의 DC 전력, 1000 W 내지 3000 W의 RF 전력을 인가하여 이온메탈플라즈마(ion metal plasma, IMP) 스퍼터링 방법으로 증착하며, 콘택홀 하부에서의 Ti막(23) 증착 두께가 30 Å 내지 200 Å이 되도록 한다. 산소확산방지막으로서 역할하는 TiAlN막(24)은 Ti막 증착 후 공기 노출없이 연속하여 TiAl 합금 타겟(target)을 이용한 스퍼터링 방법이나 화학기상증착방법으로 증착하며 콘택홀 하부에서의 TiAlN막(24) 증착두께는 10 Å 내지 200 Å이 되도록 한다.First, as illustrated in FIG. 2A, the
이어서 Ti막(23)과 TiAlN막(24) 계면에 질소를 이온주입하여, 도 2b에 도시한 바와 같이 5 Å 내지 30 Å 두께의 질소이온주입층(25)을 형성한다.Subsequently, nitrogen is ion-implanted at the interface of the
다음으로, RTP 등과 같은 급속열처리 공정을 N2 분위기, 650 ℃ 내지 900 ℃ 온도 조건에서 10 초 내지 100 초 동안 실시하여 도 2c에 도시한 바와 같이 소오스 또는 드레인 접합영역(21) 상에 티타늄 실리사이드층(23A)을 형성함과 동시에 티타늄을 질화시킨다. 즉, Ti막(23)과 소오스 또는 드레인 접합(21)의 실리콘의 반응에 의해 티타늄실리사이드층(23A)이 형성된다. Next, a rapid heat treatment process such as RTP is performed for 10 seconds to 100 seconds under an N 2 atmosphere and a temperature of 650 ° C. to 900 ° C., and a titanium silicide layer is formed on the source or drain
계속하여 전체 구조 상에 TiN 등의 장벽금속층(26)과 W 또는 Al 등의 금속막(27)을 증착한다. 이후 금속막(27) 및 장벽금속층(26)을 패터닝하여 금속배선을 형성한다.
Subsequently, a
이상에서 설명한 본 발명은 전술한 실시예 및 첨부된 도면에 의해 한정되는 것이 아니고, 본 발명의 기술적 사상을 벗어나지 않는 범위 내에서 여러 가지 치환, 변형 및 변경이 가능하다는 것이 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 있어 명백할 것이다.
The present invention described above is not limited to the above-described embodiments and the accompanying drawings, and various substitutions, modifications, and changes are possible in the art without departing from the technical spirit of the present invention. It will be clear to those of ordinary knowledge.
상기와 같이 이루어지는 본 발명은 반도체 소자의 금속배선 형성 공정 중 티타늄막 상에 산소확산방지막을 적층하고 이들의 경계에 질소를 첨가함으로써, 실리사이드 형성을 위한 열처리 공정시 산소 침입에 의한 티타늄 실리사이드의 응집화를 억제함과 동시에 질소에 의한 티타늄의 질화가 진행시킨다. 이에 따라 금속배선 형성시 소오스 또는 드레인 접합영역의 손상되는 것을 방지하여 콘택저항 및 누설전류를 감소시키고, 소자의 신뢰성 향상 등 소자 특성의 안정화에 크게 기여할 것으로 기대된다.According to the present invention as described above, the oxygen diffusion prevention film is deposited on the titanium film during the metallization process of the semiconductor device, and nitrogen is added to the boundary thereof, thereby agglomeration of titanium silicide by oxygen intrusion during the heat treatment process for silicide formation. At the same time, nitriding of titanium by nitrogen proceeds. As a result, it is expected that the formation of the metal wiring will prevent damage to the source or drain junction region, thereby reducing contact resistance and leakage current, and greatly contributing to stabilization of device characteristics such as improved device reliability.
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JPH02130920A (en) * | 1988-11-11 | 1990-05-18 | Fujitsu Ltd | Manufacture of semiconductor device |
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KR20000000924A (en) * | 1998-06-05 | 2000-01-15 | 김영환 | Method for forming metal wires of semiconductor devices |
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