KR100625381B1 - 구동 연결기구 및 그 구동 연결기구를 구비한 진공 로보트 - Google Patents

구동 연결기구 및 그 구동 연결기구를 구비한 진공 로보트 Download PDF

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Publication number
KR100625381B1
KR100625381B1 KR1020040099790A KR20040099790A KR100625381B1 KR 100625381 B1 KR100625381 B1 KR 100625381B1 KR 1020040099790 A KR1020040099790 A KR 1020040099790A KR 20040099790 A KR20040099790 A KR 20040099790A KR 100625381 B1 KR100625381 B1 KR 100625381B1
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KR
South Korea
Prior art keywords
shaft
arm
drive
rings
ring
Prior art date
Application number
KR1020040099790A
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English (en)
Korean (ko)
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KR20050053331A (ko
Inventor
야자와타카유키
나카지마히로토
타케우치야스노리
Original Assignee
니혼 덴산 산쿄 가부시키가이샤
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Application filed by 니혼 덴산 산쿄 가부시키가이샤 filed Critical 니혼 덴산 산쿄 가부시키가이샤
Publication of KR20050053331A publication Critical patent/KR20050053331A/ko
Application granted granted Critical
Publication of KR100625381B1 publication Critical patent/KR100625381B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Transmission Devices (AREA)
KR1020040099790A 2003-12-02 2004-12-01 구동 연결기구 및 그 구동 연결기구를 구비한 진공 로보트 KR100625381B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00403695 2003-12-02
JP2003403695A JP4431373B2 (ja) 2003-12-02 2003-12-02 駆動連結機構及びその駆動連結機構を備えた真空ロボット

Publications (2)

Publication Number Publication Date
KR20050053331A KR20050053331A (ko) 2005-06-08
KR100625381B1 true KR100625381B1 (ko) 2006-09-18

Family

ID=34726923

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040099790A KR100625381B1 (ko) 2003-12-02 2004-12-01 구동 연결기구 및 그 구동 연결기구를 구비한 진공 로보트

Country Status (4)

Country Link
JP (1) JP4431373B2 (ja)
KR (1) KR100625381B1 (ja)
CN (1) CN100368160C (ja)
TW (1) TWI265850B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100453276C (zh) * 2005-01-21 2009-01-21 日本电产三协株式会社 工业用机械手装置
CN101262985B (zh) * 2005-09-16 2011-12-14 株式会社爱发科 输送机构、输送装置及真空处理装置
JPWO2008140093A1 (ja) * 2007-05-15 2010-08-05 株式会社アルバック 搬送装置及びこれを用いた真空処理装置
KR20120022818A (ko) * 2009-04-27 2012-03-12 쿄세라 코포레이션 이동 스테이지, 이동 스테이지를 갖는 반송 장치 및 하전 입자선 장치
CN102092044B (zh) * 2009-12-10 2013-02-06 北京北方微电子基地设备工艺研究中心有限责任公司 一种基片处理系统及其机械手臂装置
JP2012152851A (ja) * 2011-01-26 2012-08-16 Sinfonia Technology Co Ltd 搬送アーム装置
CN103084913B (zh) * 2013-01-28 2014-11-26 南京航空航天大学 能在工件表面行走和调姿的自主移动机构
CN104425309B (zh) * 2013-08-23 2018-08-24 北京北方华创微电子装备有限公司 片盒装载装置、装载腔室、传输系统及半导体加工设备
CN116408776A (zh) * 2021-12-31 2023-07-11 美的集团(上海)有限公司 机器人及其传动机构

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6324934B1 (en) * 1999-03-01 2001-12-04 Creative Design Corporation Robot arm
JP4717252B2 (ja) * 2001-04-25 2011-07-06 株式会社小松製作所 プレスのスライド駆動装置
JP3881579B2 (ja) * 2002-03-29 2007-02-14 日本電産サンキョー株式会社 アーム駆動装置

Also Published As

Publication number Publication date
TWI265850B (en) 2006-11-11
CN100368160C (zh) 2008-02-13
TW200531808A (en) 2005-10-01
JP2005161467A (ja) 2005-06-23
KR20050053331A (ko) 2005-06-08
CN1623743A (zh) 2005-06-08
JP4431373B2 (ja) 2010-03-10

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