TWI265850B - Driving connecting mechanism and vacuum robot having this driving connecting mechanism - Google Patents

Driving connecting mechanism and vacuum robot having this driving connecting mechanism

Info

Publication number
TWI265850B
TWI265850B TW093137004A TW93137004A TWI265850B TW I265850 B TWI265850 B TW I265850B TW 093137004 A TW093137004 A TW 093137004A TW 93137004 A TW93137004 A TW 93137004A TW I265850 B TWI265850 B TW I265850B
Authority
TW
Taiwan
Prior art keywords
end part
connecting mechanism
rotary shaft
driving connecting
driving
Prior art date
Application number
TW093137004A
Other languages
English (en)
Other versions
TW200531808A (en
Inventor
Takayuki Yazawa
Hiroto Nakajima
Yasunori Takeuchi
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of TW200531808A publication Critical patent/TW200531808A/zh
Application granted granted Critical
Publication of TWI265850B publication Critical patent/TWI265850B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Transmission Devices (AREA)
TW093137004A 2003-12-02 2004-12-01 Driving connecting mechanism and vacuum robot having this driving connecting mechanism TWI265850B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003403695A JP4431373B2 (ja) 2003-12-02 2003-12-02 駆動連結機構及びその駆動連結機構を備えた真空ロボット

Publications (2)

Publication Number Publication Date
TW200531808A TW200531808A (en) 2005-10-01
TWI265850B true TWI265850B (en) 2006-11-11

Family

ID=34726923

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093137004A TWI265850B (en) 2003-12-02 2004-12-01 Driving connecting mechanism and vacuum robot having this driving connecting mechanism

Country Status (4)

Country Link
JP (1) JP4431373B2 (zh)
KR (1) KR100625381B1 (zh)
CN (1) CN100368160C (zh)
TW (1) TWI265850B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100453276C (zh) * 2005-01-21 2009-01-21 日本电产三协株式会社 工业用机械手装置
WO2007032530A1 (ja) * 2005-09-16 2007-03-22 Ulvac, Inc. 搬送機構、搬送装置及び真空処理装置
WO2008140093A1 (ja) * 2007-05-15 2008-11-20 Ulvac, Inc. 搬送装置及びこれを用いた真空処理装置
WO2010125701A1 (ja) * 2009-04-27 2010-11-04 京セラ株式会社 移動ステージ、移動ステージを有する搬送装置および荷電粒子線装置
CN102092044B (zh) * 2009-12-10 2013-02-06 北京北方微电子基地设备工艺研究中心有限责任公司 一种基片处理系统及其机械手臂装置
JP2012152851A (ja) * 2011-01-26 2012-08-16 Sinfonia Technology Co Ltd 搬送アーム装置
CN103084913B (zh) * 2013-01-28 2014-11-26 南京航空航天大学 能在工件表面行走和调姿的自主移动机构
CN104425309B (zh) * 2013-08-23 2018-08-24 北京北方华创微电子装备有限公司 片盒装载装置、装载腔室、传输系统及半导体加工设备
CN116408776A (zh) * 2021-12-31 2023-07-11 美的集团(上海)有限公司 机器人及其传动机构

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6324934B1 (en) * 1999-03-01 2001-12-04 Creative Design Corporation Robot arm
JP4717252B2 (ja) * 2001-04-25 2011-07-06 株式会社小松製作所 プレスのスライド駆動装置
JP3881579B2 (ja) * 2002-03-29 2007-02-14 日本電産サンキョー株式会社 アーム駆動装置

Also Published As

Publication number Publication date
JP2005161467A (ja) 2005-06-23
KR100625381B1 (ko) 2006-09-18
KR20050053331A (ko) 2005-06-08
CN1623743A (zh) 2005-06-08
JP4431373B2 (ja) 2010-03-10
TW200531808A (en) 2005-10-01
CN100368160C (zh) 2008-02-13

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees