KR100610298B1 - 우수한 내마모성, 내열성 및 기판과의 부착성을 가지는적층 피막 및 그 제조 방법 - Google Patents
우수한 내마모성, 내열성 및 기판과의 부착성을 가지는적층 피막 및 그 제조 방법 Download PDFInfo
- Publication number
- KR100610298B1 KR100610298B1 KR1020040073713A KR20040073713A KR100610298B1 KR 100610298 B1 KR100610298 B1 KR 100610298B1 KR 1020040073713 A KR1020040073713 A KR 1020040073713A KR 20040073713 A KR20040073713 A KR 20040073713A KR 100610298 B1 KR100610298 B1 KR 100610298B1
- Authority
- KR
- South Korea
- Prior art keywords
- film
- substrate
- hard
- alumina
- intermediate layer
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C14/00—Alloys based on titanium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/80—After-treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/1266—O, S, or organic compound in metal component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/1266—O, S, or organic compound in metal component
- Y10T428/12667—Oxide of transition metal or Al
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12736—Al-base component
- Y10T428/12743—Next to refractory [Group IVB, VB, or VIB] metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
Claims (15)
- 기판 상에 제공되고 우수한 내마모성, 우수한 내열성 및 우수한 기판과의 부착성을 가지는 적층 피막이며,Al 및 Ti를 필수로 포함하는 금속 성분의 화합물을 포함하는 경질 피막과,경질 피막과 기판 사이에 형성되는 중간층과,산화물 함유층이 중간층으로부터 이격된 경질 피막의 표면 상에 배치되도록 경질 피막을 산화시킴으로써 형성되는 산화물 함유층과,경질 피막으로부터 이격된 산화물 함유층의 표면 상에 형성되는 알루미나 피막을 포함하고,상기 중간층은 금속, 합금 그리고 금속 또는 합금의 화합물을 포함하는 그룹으로부터 선택되는 하나 이상을 포함하고, 경질 피막의 온도 보다 낮은 산화 온도를 가지는 적층 피막.
- 제1항에 있어서, 경질 피막의 화합물은 금속 성분과 C, N, B, 및 O를 포함하는 그룹으로부터 선택된 하나 이상의 원소의 화합물인 적층 피막.
- 제1항에 있어서, 상기 경질 피막은 IVa(Ti 제외) 족, Va 족, 및 VIa 족 원소 및 Si를 포함하는 그룹으로부터 선택된 하나 이상의 금속 성분을 더 포함하는 적층 피막.
- 제1항에 있어서, 상기 경질 피막의 두께는 0.5 ㎛ 내지 20 ㎛인 적층 피막.
- 제1항에 있어서, 상기 중간층은 700 ℃ 미만의 온도에서 산화될 수 있는 적층 피막.
- 제1항에 있어서, 상기 중간층은 Ti 또는 Ti 합금을 포함하는 적층 피막.
- 제1항에 있어서, 상기 중간층은 Ti 성분과 C, N, B 및 O를 포함하는 그룹으로부터 선택되는 하나 이상의 원소의 화합물인 적층 피막.
- 제1항에 있어서, 상기 중간층의 두께는 0.1 ㎛ 내지 20 ㎛인 적층 피막.
- 제1항에 있어서, 상기 산화물 함유층의 최외측 표면은 알루미나를 포함하는 적층 피막.
- 제1항에 있어서, 상기 알루미나 피막은 α형 결정 구조를 가지는 적층 피막.
- 제1항에 있어서, 상기 알루미나 피막의 두께는 0.1 ㎛ 내지 20 ㎛인 적층 피막.
- 기판 상에 제공되고 우수한 내마모성, 우수한 내열성 및 우수한 기판과의 부착성을 가지는 적층 피막을 제조하는 방법이며,중간층을 기판의 표면 상에 형성하는 단계와,경질 피막을 중간층 상에 형성하는 단계와,경질 피막을 산화시켜 산화물 함유층을 형성하는 단계와,알루미나 피막을 산화물 함유층 상에 형성하는 단계를 포함하고,경질 피막을 산화시켜 산화물 함유층을 형성하는 단계 및 알루미나 피막을 산화물 함유층 상에 형성하는 단계 중 적어도 한 단계에 있어서, 기판은 산화성 분위기 속에서 700 ℃의 온도에 노출되는 적층 피막을 제조하는 방법.
- 제12항에 있어서, 경질 피막을 산화시켜 산화물 함유층을 형성하는 단계 및 알루미나 피막을 형성하는 단계가 동일한 장치에서 연속으로 수행되는 적층 피막을 제조하는 방법.
- 제12항에 있어서, 중간층을 기판 상에 형성하는 단계 및 경질 피막을 중간층 상에 형성하는 단계가 동일한 장치에서 연속으로 수행되는 적층 피막을 제조하는 방법.
- 제12항에 있어서, 중간층을 기판 상에 형성하는 단계, 경질 피막을 중간층 상에 형성하는 단계, 경질 피막을 산화시켜 산화물 함유층을 형성하는 단계 및 알루미나 피막을 형성하는 단계가 동일한 장치에서 연속으로 수행되는 적층 피막을 제조하는 방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2003-00323582 | 2003-09-16 | ||
JP2003323582A JP4205546B2 (ja) | 2003-09-16 | 2003-09-16 | 耐摩耗性、耐熱性および基材との密着性に優れた積層皮膜の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050027948A KR20050027948A (ko) | 2005-03-21 |
KR100610298B1 true KR100610298B1 (ko) | 2006-08-10 |
Family
ID=33308237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020040073713A KR100610298B1 (ko) | 2003-09-16 | 2004-09-15 | 우수한 내마모성, 내열성 및 기판과의 부착성을 가지는적층 피막 및 그 제조 방법 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7241492B2 (ko) |
JP (1) | JP4205546B2 (ko) |
KR (1) | KR100610298B1 (ko) |
SE (1) | SE528377C2 (ko) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE9903089D0 (sv) * | 1999-09-01 | 1999-09-01 | Sandvik Ab | Coated grooving or parting insert |
EP2848712B1 (en) * | 2002-08-08 | 2018-05-30 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Process for producing alumina coating composed mainly of alpha-type crystal structure, alumina coating composed mainly of alpha-type crystal structure, laminate coating including the alumina coating , member clad with the alumina coating or laminate coating, process for producing the member, and physical vapor deposition apparatus |
JP4173762B2 (ja) * | 2003-04-04 | 2008-10-29 | 株式会社神戸製鋼所 | α型結晶構造主体のアルミナ皮膜の製造方法および積層皮膜被覆部材の製造方法 |
JP4427271B2 (ja) * | 2003-04-30 | 2010-03-03 | 株式会社神戸製鋼所 | アルミナ保護膜およびその製造方法 |
JP4205546B2 (ja) | 2003-09-16 | 2009-01-07 | 株式会社神戸製鋼所 | 耐摩耗性、耐熱性および基材との密着性に優れた積層皮膜の製造方法 |
JP2006028600A (ja) * | 2004-07-16 | 2006-02-02 | Kobe Steel Ltd | 耐摩耗性と耐熱性に優れた積層皮膜 |
JP5443403B2 (ja) * | 2004-09-30 | 2014-03-19 | 株式会社神戸製鋼所 | 高温潤滑性と耐摩耗性に優れた硬質皮膜および該硬質皮膜形成用ターゲット |
JP4518260B2 (ja) * | 2005-01-21 | 2010-08-04 | 三菱マテリアル株式会社 | 硬質被覆層が高速断続切削加工ですぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具 |
US20070099027A1 (en) * | 2005-10-28 | 2007-05-03 | Anand Krishnamurthy | Wear resistant coatings |
JP4950499B2 (ja) * | 2006-02-03 | 2012-06-13 | 株式会社神戸製鋼所 | 硬質皮膜およびその成膜方法 |
MX2008012236A (es) * | 2006-03-28 | 2009-02-10 | Sumitomo Metal Ind | Herramienta cortante y método para producir la misma. |
US8080312B2 (en) * | 2006-06-22 | 2011-12-20 | Kennametal Inc. | CVD coating scheme including alumina and/or titanium-containing materials and method of making the same |
US8404366B2 (en) * | 2007-01-02 | 2013-03-26 | Taegutec, Ltd. | Surface treating method for cutting tools |
JP4975481B2 (ja) * | 2007-02-27 | 2012-07-11 | トーヨーエイテック株式会社 | プレス用金型 |
EP2042261A3 (en) * | 2007-09-26 | 2015-02-18 | Sandvik Intellectual Property AB | Method of making a coated cutting tool |
DE102007000512B3 (de) * | 2007-10-16 | 2009-01-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hartstoffbeschichtete Körper und Verfahren zu deren Herstellung |
JP2009120912A (ja) * | 2007-11-15 | 2009-06-04 | Kobe Steel Ltd | 硬質皮膜を備えた耐摩耗性部材 |
JP5153439B2 (ja) * | 2008-04-25 | 2013-02-27 | 株式会社神戸製鋼所 | 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 |
EP2401419B1 (de) * | 2009-02-27 | 2018-01-03 | Oerlikon Surface Solutions AG, Pfäffikon | Schichtsystem sowie beschichtungsverfahren zur herstellung eines schichtsystems |
ES2385148B2 (es) * | 2010-12-23 | 2013-12-13 | Universidade De Santiago De Compostela | Superficie inmunosensora para la detección directa de benzoilecgonina mediante resonancia de plasmón superficial. |
WO2014153440A1 (en) | 2013-03-21 | 2014-09-25 | Kennametal Inc. | Coatings for cutting tools |
CN105102673B (zh) | 2013-03-21 | 2017-11-17 | 钴碳化钨硬质合金公司 | 用于切削工具的涂层 |
US9371580B2 (en) | 2013-03-21 | 2016-06-21 | Kennametal Inc. | Coated body wherein the coating scheme includes a coating layer of TiAl2O3 and method of making the same |
US9719175B2 (en) | 2014-09-30 | 2017-08-01 | Kennametal Inc. | Multilayer structured coatings for cutting tools |
US9650712B2 (en) | 2014-12-08 | 2017-05-16 | Kennametal Inc. | Inter-anchored multilayer refractory coatings |
US9650714B2 (en) | 2014-12-08 | 2017-05-16 | Kennametal Inc. | Nanocomposite refractory coatings and applications thereof |
CN106835014A (zh) * | 2016-12-29 | 2017-06-13 | 西安交通大学青岛研究院 | 一种多元复合硬质涂层制备方法 |
CN106995913A (zh) * | 2016-12-29 | 2017-08-01 | 西安交通大学青岛研究院 | 一种CrTiAlSiN基多元复合硬质涂层 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000069901A (ko) * | 1997-11-06 | 2000-11-25 | 스미토모 덴키 고교 가부시키가이샤 | 피복 초경 합금 공구 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19518781C1 (de) * | 1995-05-22 | 1996-09-05 | Fraunhofer Ges Forschung | Vakuumbeschichteter Verbundkörper und Verfahren zu seiner Herstellung |
US5879823A (en) * | 1995-12-12 | 1999-03-09 | Kennametal Inc. | Coated cutting tool |
JP3418066B2 (ja) * | 1996-07-03 | 2003-06-16 | 日立金属株式会社 | アルミナ被覆工具とその製造方法 |
US6086953A (en) * | 1997-07-01 | 2000-07-11 | Raghavan; Srimathy | Ceramic-coated metal guide pin |
SE520802C2 (sv) * | 1997-11-06 | 2003-08-26 | Sandvik Ab | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
JP3031907B2 (ja) * | 1998-03-16 | 2000-04-10 | 日立ツール株式会社 | 多層膜被覆部材 |
JP4502475B2 (ja) | 2000-08-04 | 2010-07-14 | 株式会社神戸製鋼所 | 硬質皮膜および耐摩耗部材並びにその製造方法 |
EP2848712B1 (en) * | 2002-08-08 | 2018-05-30 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Process for producing alumina coating composed mainly of alpha-type crystal structure, alumina coating composed mainly of alpha-type crystal structure, laminate coating including the alumina coating , member clad with the alumina coating or laminate coating, process for producing the member, and physical vapor deposition apparatus |
JP4205546B2 (ja) | 2003-09-16 | 2009-01-07 | 株式会社神戸製鋼所 | 耐摩耗性、耐熱性および基材との密着性に優れた積層皮膜の製造方法 |
-
2003
- 2003-09-16 JP JP2003323582A patent/JP4205546B2/ja not_active Expired - Fee Related
-
2004
- 2004-09-03 US US10/933,374 patent/US7241492B2/en active Active
- 2004-09-09 SE SE0402162A patent/SE528377C2/sv not_active IP Right Cessation
- 2004-09-15 KR KR1020040073713A patent/KR100610298B1/ko active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000069901A (ko) * | 1997-11-06 | 2000-11-25 | 스미토모 덴키 고교 가부시키가이샤 | 피복 초경 합금 공구 |
Non-Patent Citations (1)
Title |
---|
1020000069901 * |
Also Published As
Publication number | Publication date |
---|---|
SE0402162D0 (sv) | 2004-09-09 |
US20050058850A1 (en) | 2005-03-17 |
JP2005089806A (ja) | 2005-04-07 |
KR20050027948A (ko) | 2005-03-21 |
SE0402162L (sv) | 2005-03-17 |
SE528377C2 (sv) | 2006-10-31 |
US7241492B2 (en) | 2007-07-10 |
JP4205546B2 (ja) | 2009-01-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100610298B1 (ko) | 우수한 내마모성, 내열성 및 기판과의 부착성을 가지는적층 피막 및 그 제조 방법 | |
JP6000233B2 (ja) | 少なくとも1つの複酸化物混合結晶皮膜を有する皮膜システム | |
JP4502475B2 (ja) | 硬質皮膜および耐摩耗部材並びにその製造方法 | |
JP4427271B2 (ja) | アルミナ保護膜およびその製造方法 | |
US7169485B2 (en) | Multilayer coating excellent in wear resistance and heat resistance | |
KR101122497B1 (ko) | 경질 다층 코팅 및 이를 포함하는 경질 다층 코팅된 공구 | |
JP3452726B2 (ja) | 多層被覆硬質工具 | |
WO2004015170A1 (ja) | α型結晶構造主体のアルミナ皮膜の製造方法、α型結晶構造主体のアルミナ皮膜と該アルミナ皮膜を含む積層皮膜、該アルミナ皮膜または該積層皮膜で被覆された部材とその製造方法、および物理的蒸着装置 | |
KR20130079336A (ko) | 경질 탄소 피막 및 그의 형성 방법 | |
JPH10330914A (ja) | 結晶配向性硬質膜を含む積層被膜部材 | |
WO2019239654A1 (ja) | 表面被覆切削工具、及びその製造方法 | |
JP4398224B2 (ja) | 耐摩耗性部材 | |
JP2000129445A (ja) | 耐摩耗性被膜およびその製造方法ならびに耐摩耗部材 | |
JP3962300B2 (ja) | 酸化アルミニウム被覆工具 | |
KR20040010234A (ko) | Pvd 피복 절삭 공구 | |
JP3971293B2 (ja) | 耐摩耗性および耐熱性に優れた積層皮膜およびその製造方法、並びに耐摩耗性および耐熱性に優れた積層皮膜被覆工具 | |
CN116162899B (zh) | 一种钛合金切削涂层刀具及其制备方法 | |
EP4041931A1 (en) | A coated cutting tool | |
JP3971337B2 (ja) | α型結晶構造主体のアルミナ皮膜の製造方法、α型結晶構造主体のアルミナ皮膜で被覆された部材およびその製造方法 | |
JPH10317123A (ja) | 結晶配向性硬質被覆部材 | |
JPH08318406A (ja) | 被覆切削工具 | |
JP2000309864A (ja) | 多層膜被覆部材 | |
JP2001105205A (ja) | 硬質皮膜被覆工具 | |
JP3971339B2 (ja) | α型結晶構造主体のアルミナ皮膜の製造方法、α型結晶構造主体のアルミナ皮膜で被覆された部材およびその製造方法 | |
KR20050056952A (ko) | α형 결정 구조 주체의 알루미나 피막의 제조 방법, α형결정 구조 주체의 알루미나 피막과 그 알루미나 피막을포함하는 적층 피막, 그 알루미나 피막 또는 그 적층피막으로 피복된 부재와 그 제조 방법, 및 물리적 증착 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20120629 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20130701 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20140722 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20160704 Year of fee payment: 11 |
|
FPAY | Annual fee payment |
Payment date: 20170704 Year of fee payment: 12 |
|
FPAY | Annual fee payment |
Payment date: 20180628 Year of fee payment: 13 |