KR100599434B1 - 반도체 소자의 금속배선 형성방법 - Google Patents
반도체 소자의 금속배선 형성방법 Download PDFInfo
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- KR100599434B1 KR100599434B1 KR1020030073067A KR20030073067A KR100599434B1 KR 100599434 B1 KR100599434 B1 KR 100599434B1 KR 1020030073067 A KR1020030073067 A KR 1020030073067A KR 20030073067 A KR20030073067 A KR 20030073067A KR 100599434 B1 KR100599434 B1 KR 100599434B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76853—Barrier, adhesion or liner layers characterized by particular after-treatment steps
- H01L21/76855—After-treatment introducing at least one additional element into the layer
- H01L21/76856—After-treatment introducing at least one additional element into the layer by treatment in plasmas or gaseous environments, e.g. nitriding a refractory metal liner
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L21/76876—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for deposition from the gas phase, e.g. CVD
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
Abstract
Description
Claims (13)
- 반도체 기판 상에 기판의 일부를 노출시키는 콘택홀을 구비한 층간절연막을 형성하는 단계;콘택홀 저부 및 상부 표면에 장벽금속막을 형성하는 단계;상기 콘택홀을 포함하는 기판 표면에 비정질 시드층을 형성하는 단계;상기 콘택홀 상부의 시드층을 금속증착 방지막으로 변형시키는 단계;상기 시드층을 시드로 상기 시드층과의 환원반응을 이용한 선택적 증착을 통해 상기 금속증착 방지막이 형성되지 않는 상기 콘택홀 저부 및 측부에 밀착층을 형성하는 단계; 및상기 밀착층과 동일한 물질을 이용한 선택적 증착공정 을 통해 상기 콘택홀 내부에 금속 플러그를 형성하는 단계포함하는 반도체 소자의 금속배선 형성방법.
- 제 1 항에 있어서,상기 시드층은 SiHx막인 것을 특징으로 하는 반도체 소자의 금속배선 형성방법.
- 제 2 항에 있어서,상기 SiHx막은 SiH4 개스 처리에 의해 10㎚ 이하의 두께로 형성하는 것을 특징으로 하는 반도체 소자의 금속배선 형성방법.
- 제 1 항에 있어서,상기 금속증착 방지막은 NH3 또는 O2 플라즈마 처리에 의해 형성하는 것을 특징으로 하는 반도체 소자의 금속배선 형성방법.
- 제 1 항에 있어서,상기 플러그는 텅스텐막으로 이루어진 것을 특징으로 하는 반도체 소자의 금속배선 형성방법.
- 제 1 항에 있어서,상기 플러그는 알루미늄막으로 이루어진 것을 특징으로 하는 반도체 소자의 금속배선 형성방법.
- 제 6 항에 있어서,상기 밀착층을 형성한 후 상기 금속 플러그를 형성하기 전에,상기 밀착층을 리모트 NH3 또는 N2 플라즈마 처리하는 것을 특징으로 하는 반도체 소자의 금속배선 형성방법.
- 반도체 기판 상에 기판의 일부를 노출시키는 배선 형상의 콘택홀을 구비한 층간절연막을 형성하는 단계;콘택홀 저부 및 상부 표면에 제 1 장벽금속막을 형성하는 단계;상기 콘택홀을 포함하는 기판 표면에 비정질 시드층을 형성하는 단계;상기 콘택홀 상부의 시드층을 금속증착 방지막으로 변형시키는 단계;상기 시드층을 이용하여 상기 콘택홀 저부 및 측부에 제 2 장벽금속막을 형성하는 단계; 및상기 콘택홀 내부에 선택적 증착에 의해 배선을 형성하는 단계를 포함하는 반도체 소자의 금속배선 형성방법.
- 제 8 항에 있어서,상기 시드층은 SiHx막인 것을 특징으로 하는 반도체 소자의 금속배선 형성방 법.
- 제 9 항에 있어서,상기 SiHx막은 SiH4 개스 처리에 의해 10㎚ 이하의 두께로 형성하는 것을 특징으로 하는 반도체 소자의 금속배선 형성방법.
- 제 8 항에 있어서,상기 금속증착 방지막은 NH3 또는 O2 플라즈마 처리에 의해 형성하는 것을 특징으로 하는 반도체 소자의 금속배선 형성방법.
- 제 8 항에 있어서,상기 제 2 장벽금속막의 형성은 상기 시드층을 이용하여 상기 콘택홀 저부 및 측부에 금속막을 증착한 후 리모트 NH3 플라즈마 처리하는 것을 이루어진 것을 특징으로 하는 반도체 소자의 금속배선 형성방법.
- 제 8 항에 있어서,상기 배선은 구리 또는 알루미늄으로 이루어진 것을 특징으로 하는 반도체 소자의 금속배선 형성방법.
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KR1020030073067A KR100599434B1 (ko) | 2003-10-20 | 2003-10-20 | 반도체 소자의 금속배선 형성방법 |
US10/878,288 US7135403B2 (en) | 2003-10-20 | 2004-06-29 | Method for forming metal interconnection line in semiconductor device |
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KR1020030073067A KR100599434B1 (ko) | 2003-10-20 | 2003-10-20 | 반도체 소자의 금속배선 형성방법 |
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Cited By (1)
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KR20050037797A (ko) | 2005-04-25 |
US7135403B2 (en) | 2006-11-14 |
US20050085070A1 (en) | 2005-04-21 |
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