KR100516950B1 - 포토다이오드 - Google Patents
포토다이오드 Download PDFInfo
- Publication number
- KR100516950B1 KR100516950B1 KR10-1998-0009586A KR19980009586A KR100516950B1 KR 100516950 B1 KR100516950 B1 KR 100516950B1 KR 19980009586 A KR19980009586 A KR 19980009586A KR 100516950 B1 KR100516950 B1 KR 100516950B1
- Authority
- KR
- South Korea
- Prior art keywords
- type layer
- photodiode
- type
- electrode
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000010410 layer Substances 0.000 abstract description 92
- 230000001681 protective effect Effects 0.000 abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 3
- 239000011241 protective layer Substances 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract 1
- 230000000903 blocking effect Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
Landscapes
- Light Receiving Elements (AREA)
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9077480A JPH10270742A (ja) | 1997-03-28 | 1997-03-28 | フォトダイオード |
| JP77480 | 1997-03-28 | ||
| JP97-77480 | 1997-03-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19980080485A KR19980080485A (ko) | 1998-11-25 |
| KR100516950B1 true KR100516950B1 (ko) | 2005-11-08 |
Family
ID=13635154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-1998-0009586A Expired - Lifetime KR100516950B1 (ko) | 1997-03-28 | 1998-03-20 | 포토다이오드 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6118165A (enExample) |
| JP (1) | JPH10270742A (enExample) |
| KR (1) | KR100516950B1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7187048B2 (en) * | 2000-03-22 | 2007-03-06 | Kabushiki Kaisha Toshiba | Semiconductor light-receiving device |
| DE10024473B4 (de) * | 2000-05-18 | 2007-04-19 | Vishay Semiconductor Gmbh | Optischer Empfänger |
| KR100702909B1 (ko) * | 2000-11-02 | 2007-04-03 | 가부시키가이샤 야스카와덴키 | 웨이퍼 프리얼라인먼트 장치와 그 웨이퍼 유무 판정방법,웨이퍼 에지 위치 검출방법과 그 방법을 실행시키는프로그램을 기록한 컴퓨터 판독 가능한 기록매체, 웨이퍼의에지 위치 검출장치 및 프리얼라인먼트 센서 |
| JP3807954B2 (ja) * | 2001-06-25 | 2006-08-09 | シャープ株式会社 | フォトダイオード |
| DE102014211829A1 (de) * | 2014-06-20 | 2015-12-24 | Robert Bosch Gmbh | Thermodiodenelement für einen Fotosensor zur Infrarot-Strahlungsmessung, Fotosensor und Verfahren zum Herstellen eines Thermodiodenelements |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4241358A (en) * | 1979-03-26 | 1980-12-23 | Trw Inc. | Radiation sensitive device with lateral current |
| US5130531A (en) * | 1989-06-09 | 1992-07-14 | Omron Corporation | Reflective photosensor and semiconductor light emitting apparatus each using micro Fresnel lens |
| JPH0394478A (ja) * | 1989-09-06 | 1991-04-19 | Matsushita Electron Corp | 半導体装置 |
| US5128729A (en) * | 1990-11-13 | 1992-07-07 | Motorola, Inc. | Complex opto-isolator with improved stand-off voltage stability |
| US5291038A (en) * | 1990-12-19 | 1994-03-01 | Sharp Kabushiki Kaisha | Reflective type photointerrupter |
| JPH04280674A (ja) * | 1991-03-08 | 1992-10-06 | Sharp Corp | 回路内蔵受光素子 |
| JPH04280685A (ja) * | 1991-03-08 | 1992-10-06 | Sony Corp | 受光装置 |
| US5592124A (en) * | 1995-06-26 | 1997-01-07 | Burr-Brown Corporation | Integrated photodiode/transimpedance amplifier |
| US5903021A (en) * | 1997-01-17 | 1999-05-11 | Eastman Kodak Company | Partially pinned photodiode for solid state image sensors |
-
1997
- 1997-03-28 JP JP9077480A patent/JPH10270742A/ja active Pending
-
1998
- 1998-03-20 KR KR10-1998-0009586A patent/KR100516950B1/ko not_active Expired - Lifetime
- 1998-03-26 US US09/048,109 patent/US6118165A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR19980080485A (ko) | 1998-11-25 |
| JPH10270742A (ja) | 1998-10-09 |
| US6118165A (en) | 2000-09-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19980320 |
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| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20021202 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 19980320 Comment text: Patent Application |
|
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