KR100476047B1 - 에프.에프.에스 모드의 액정표시장치의 제조방법 - Google Patents
에프.에프.에스 모드의 액정표시장치의 제조방법 Download PDFInfo
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- KR100476047B1 KR100476047B1 KR10-2001-0030135A KR20010030135A KR100476047B1 KR 100476047 B1 KR100476047 B1 KR 100476047B1 KR 20010030135 A KR20010030135 A KR 20010030135A KR 100476047 B1 KR100476047 B1 KR 100476047B1
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- Prior art keywords
- forming
- pad
- mask process
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- gate
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- 238000000034 method Methods 0.000 title claims abstract description 55
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 26
- 239000002184 metal Substances 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000010409 thin film Substances 0.000 claims abstract description 19
- 238000002161 passivation Methods 0.000 claims abstract description 16
- 239000010408 film Substances 0.000 claims abstract description 14
- 238000005530 etching Methods 0.000 claims abstract description 7
- 238000000151 deposition Methods 0.000 claims abstract description 3
- 239000004065 semiconductor Substances 0.000 claims description 17
- 229920002120 photoresistant polymer Polymers 0.000 claims description 10
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 4
- 239000012780 transparent material Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 58
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134372—Electrodes characterised by their geometrical arrangement for fringe field switching [FFS] where the common electrode is not patterned
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (4)
- FFS 모드 액정표시장치의 제조방법에 있어서,투명 절연 기판상의 박막트랜지스터 영역, 패드영역 그리고 화소영역을 정의한 후, 제 1 마스크 공정을 이용하여 화소영역에 카운터 전극을 형성하는 단계와;상기 박막트랜지스터 영역 및 패드영역에 제 2 마스크 공정을 이용하여 게이트 라인 및 게이트 패드를 형성하는 단계와;상기 기판 전면에 게이트 절연막을 형성한 후, 상기 게이트 라인상에 제 3 마스크 공정을 이용하여 도전층과 금속층 패턴을 형성함과 동시에 게이트 패드상에 도전층과 데이터 패드를 형성하는 단계와;상기 결과물을 포함한 기판 전면에 제 1 보호막을 형성하고, 제 4 마스크 공정을 이용하여 상기 금속층 패턴 및 게이트 패드 그리고 데이터 패드가 노출되도록 콘택홀을 형성하는 단계와;상기 콘택홀을 포함한 전면에 투명물질을 증착하고, 제 5 마스크 공정을 이용하여 상기 금속층 패턴이 노출되도록 보호막을 식각하여 화소전극을 형성하는 단계와;상기 제 1 보호막을 마스크로 이용하여 상기 금속층 패턴과 도전층을 식각하여 소오스/드레인 전극과 백-채널을 형성하는 단계를 포함하는 것을 특징으로 하는 FFS 모드 액정표시장치의 제조방법.
- 제 1 항에 있어서,상기 도전층은 비정질 실리콘 재질의 반도체층과 n+ 반도체층으로 이루어진 것을 특징으로 하는 FFS 모드 액정표시장치의 제조방법.
- 제 1 항에 있어서,상기 백-채널 형성후, 상기 도전층상에 산화막을 형성하는 단계를 더 포함하는 것을 특징으로 하는 FFS 모드 액정표시장치의 제조방법.
- 제 1 항에 있어서,상기 백-채널 형성후, 상기 백-패널을 포함한 전면에 제 2 보호막을 증착하고, 제 5 마스크 공정시 이용되는 포토레지스트 리프트-오프 방식을 이용하여 상기 화소전극이 노출되도록 제 2 보호막을 제거하는 단계를 더 포함하는 것을 특징으로 하는 FFS 모드 액정표시장치의 제조방법.
Priority Applications (1)
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KR10-2001-0030135A KR100476047B1 (ko) | 2001-05-30 | 2001-05-30 | 에프.에프.에스 모드의 액정표시장치의 제조방법 |
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KR10-2001-0030135A KR100476047B1 (ko) | 2001-05-30 | 2001-05-30 | 에프.에프.에스 모드의 액정표시장치의 제조방법 |
Publications (2)
Publication Number | Publication Date |
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KR20020091458A KR20020091458A (ko) | 2002-12-06 |
KR100476047B1 true KR100476047B1 (ko) | 2005-03-10 |
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KR10-2001-0030135A KR100476047B1 (ko) | 2001-05-30 | 2001-05-30 | 에프.에프.에스 모드의 액정표시장치의 제조방법 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9287298B2 (en) | 2014-01-13 | 2016-03-15 | Samsung Display Co., Ltd. | Liquid crystal display and manufacturing method thereof |
US9696602B2 (en) | 2014-03-05 | 2017-07-04 | Samsung Electronics Co., Ltd. | Manufacturing method of liquid crystal display |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101369257B1 (ko) * | 2005-12-30 | 2014-03-05 | 엘지디스플레이 주식회사 | 하프-톤 마스크를 이용한 박막 트랜지스터 액정표시장치의제조방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08328041A (ja) * | 1995-05-30 | 1996-12-13 | Xerox Corp | 活性マトリックス液晶装置を製造する方法 |
KR970048849A (ko) * | 1995-12-30 | 1997-07-29 | 김광호 | 액정 표시 장치의 제조 방법 |
KR970054490A (ko) * | 1995-12-28 | 1997-07-31 | 김광호 | 박막 트랜지스터 액정 표시 장치의 제조 방법 |
KR20010038387A (ko) * | 1999-10-25 | 2001-05-15 | 구본준 | 박막트랜지스터형 액정표시장치의 어레이기판과 그 제조방법 |
-
2001
- 2001-05-30 KR KR10-2001-0030135A patent/KR100476047B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08328041A (ja) * | 1995-05-30 | 1996-12-13 | Xerox Corp | 活性マトリックス液晶装置を製造する方法 |
KR970054490A (ko) * | 1995-12-28 | 1997-07-31 | 김광호 | 박막 트랜지스터 액정 표시 장치의 제조 방법 |
KR970048849A (ko) * | 1995-12-30 | 1997-07-29 | 김광호 | 액정 표시 장치의 제조 방법 |
KR20010038387A (ko) * | 1999-10-25 | 2001-05-15 | 구본준 | 박막트랜지스터형 액정표시장치의 어레이기판과 그 제조방법 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9287298B2 (en) | 2014-01-13 | 2016-03-15 | Samsung Display Co., Ltd. | Liquid crystal display and manufacturing method thereof |
US9696602B2 (en) | 2014-03-05 | 2017-07-04 | Samsung Electronics Co., Ltd. | Manufacturing method of liquid crystal display |
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KR20020091458A (ko) | 2002-12-06 |
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