KR20020028014A - 박막 트랜지스터 액정표시장치의 제조방법 - Google Patents
박막 트랜지스터 액정표시장치의 제조방법 Download PDFInfo
- Publication number
- KR20020028014A KR20020028014A KR1020000058885A KR20000058885A KR20020028014A KR 20020028014 A KR20020028014 A KR 20020028014A KR 1020000058885 A KR1020000058885 A KR 1020000058885A KR 20000058885 A KR20000058885 A KR 20000058885A KR 20020028014 A KR20020028014 A KR 20020028014A
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- South Korea
- Prior art keywords
- layer
- film
- gate
- mask process
- source
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 50
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 21
- 239000004065 semiconductor Substances 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000010409 thin film Substances 0.000 claims abstract description 11
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 7
- 239000010408 film Substances 0.000 claims description 81
- 239000002184 metal Substances 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 230000001681 protective effect Effects 0.000 claims description 11
- 238000000059 patterning Methods 0.000 claims description 7
- 238000002161 passivation Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims 4
- 239000000463 material Substances 0.000 abstract description 5
- 239000010410 layer Substances 0.000 abstract 16
- 239000011241 protective layer Substances 0.000 abstract 4
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000002834 transmittance Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000004380 ashing Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009125 cardiac resynchronization therapy Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
Abstract
Description
Claims (2)
- 투명성 절연기판 상에 화소전극용 투명 금속막과 게이트용 금속막을 차례로 증착하는 단계;상기 막들을 제1마스크 공정으로 패터닝하여 게이트 라인 및 화소전극을 형성하는 단계;상기 결과물 상에 SiNX막과 a-Si막 및 n+a-Si막을 차례로 증착하는 단계;상기 막들을 제2마스크 공정으로 패터닝하여 반도체층 및 액티브 라인과 게이트 절연막을 형성하고, 그리고, 화소전극 상에 잔류되어 있는 게이트용 금속막을 제거하는 단계;상기 결과물 상에 소오스/드레인용 금속막을 증착하는 단계;상기 막을 제3마스크 공정으로 패터닝하여 소오스/드레인 전극을 포함한 데이터 라인을 형성하고, 상기 소오스 전극과 드레인 전극 사이의 n+a-Si막 부분을 식각하여 오믹 콘택층을 형성하는 단계;상기 결과물 상에 보호막을 증착하는 단계; 및화소영역 상의 보호막 부분이 제거되도록, 상기 보호막을 제4마스크 공정으로 패터닝하는 단계를 포함하여 이루어지는 것을 특징으로 하는 박막 트랜지스터 액정표시장치의 제조방법.
- 제 1 항에 있어서, 상기 보호막에 대한 패터닝은데이트 라인들 사이에 배치된 게이트 라인 부분 상의 n+a-Si막 및 a-Si막의 일부분을 함께 제거하는 것을 특징으로 하는 박막 트랜지스터 액정표시장치의 제조방법.
Priority Applications (1)
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---|---|---|---|
KR1020000058885A KR100663288B1 (ko) | 2000-10-06 | 2000-10-06 | 박막 트랜지스터 액정표시장치의 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020000058885A KR100663288B1 (ko) | 2000-10-06 | 2000-10-06 | 박막 트랜지스터 액정표시장치의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020028014A true KR20020028014A (ko) | 2002-04-15 |
KR100663288B1 KR100663288B1 (ko) | 2007-01-02 |
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KR1020000058885A KR100663288B1 (ko) | 2000-10-06 | 2000-10-06 | 박막 트랜지스터 액정표시장치의 제조방법 |
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KR (1) | KR100663288B1 (ko) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015143746A1 (zh) * | 2014-03-28 | 2015-10-01 | 深圳市华星光电技术有限公司 | 一种tft阵列基板的制造方法 |
US9563099B2 (en) | 2002-06-10 | 2017-02-07 | E Ink Corporation | Components and methods for use in electro-optic displays |
US10811474B2 (en) | 2018-08-23 | 2020-10-20 | Samsung Display Co., Ltd. | Display apparatus and method of manufacturing the same |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102054000B1 (ko) | 2013-09-11 | 2019-12-10 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판, 액정 표시 장치 및 박막 트랜지스터 표시판의 제조방법 |
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- 2000-10-06 KR KR1020000058885A patent/KR100663288B1/ko active IP Right Grant
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9563099B2 (en) | 2002-06-10 | 2017-02-07 | E Ink Corporation | Components and methods for use in electro-optic displays |
US9733540B2 (en) | 2002-06-10 | 2017-08-15 | E Ink Corporation | Components and methods for use in electro-optic displays |
US9778536B2 (en) | 2002-06-10 | 2017-10-03 | E Ink Corporation | Components and methods for use in electro-optic displays |
US11294255B2 (en) | 2002-06-10 | 2022-04-05 | E Ink Corporation | Components and methods for use in electro-optic displays |
WO2015143746A1 (zh) * | 2014-03-28 | 2015-10-01 | 深圳市华星光电技术有限公司 | 一种tft阵列基板的制造方法 |
US10811474B2 (en) | 2018-08-23 | 2020-10-20 | Samsung Display Co., Ltd. | Display apparatus and method of manufacturing the same |
US11011589B2 (en) | 2018-08-23 | 2021-05-18 | Samsung Display Co., Ltd. | Display apparatus and method of manufacturing the same |
Also Published As
Publication number | Publication date |
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KR100663288B1 (ko) | 2007-01-02 |
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