KR100455949B1 - 정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법 - Google Patents
정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법 Download PDFInfo
- Publication number
- KR100455949B1 KR100455949B1 KR10-2002-0015990A KR20020015990A KR100455949B1 KR 100455949 B1 KR100455949 B1 KR 100455949B1 KR 20020015990 A KR20020015990 A KR 20020015990A KR 100455949 B1 KR100455949 B1 KR 100455949B1
- Authority
- KR
- South Korea
- Prior art keywords
- movable
- substrate
- contact
- fixed
- electrode
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001089900A JP3651404B2 (ja) | 2001-03-27 | 2001-03-27 | 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置 |
JPJP-P-2001-00089900 | 2001-03-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020076131A KR20020076131A (ko) | 2002-10-09 |
KR100455949B1 true KR100455949B1 (ko) | 2004-11-08 |
Family
ID=18944757
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2002-0015990A KR100455949B1 (ko) | 2001-03-27 | 2002-03-25 | 정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1246216B1 (zh) |
JP (1) | JP3651404B2 (zh) |
KR (1) | KR100455949B1 (zh) |
CN (1) | CN1234144C (zh) |
TW (1) | TW550616B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160002219A (ko) | 2014-06-30 | 2016-01-07 | 대한민국 (관리부서 : 환경부 국립환경과학원장) | 보안등의 가변식 차광기구 |
KR20160002218A (ko) | 2014-06-30 | 2016-01-07 | 대한민국 (관리부서 : 환경부 국립환경과학원장) | 보안등의 고정식 차광기구 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE322033T1 (de) * | 2002-11-19 | 2006-04-15 | Baolab Microsystems Sl | Elektrooptische miniatureinrichtung und entsprechendeverwendungen dafür |
DE102004010150B9 (de) * | 2004-02-27 | 2012-01-26 | Eads Deutschland Gmbh | Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung |
JP4540443B2 (ja) | 2004-10-21 | 2010-09-08 | 富士通コンポーネント株式会社 | 静電リレー |
JP2006147540A (ja) * | 2004-10-22 | 2006-06-08 | Matsushita Electric Ind Co Ltd | 電気機械スイッチ |
JP2014130767A (ja) * | 2012-12-28 | 2014-07-10 | Omron Corp | 静電マイクロリレーおよびその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2072199C (en) * | 1991-06-24 | 1997-11-11 | Fumihiro Kasano | Electrostatic relay |
US6054659A (en) * | 1998-03-09 | 2000-04-25 | General Motors Corporation | Integrated electrostatically-actuated micromachined all-metal micro-relays |
JP3852224B2 (ja) * | 1998-10-08 | 2006-11-29 | オムロン株式会社 | 静電マイクロリレー |
JP3796988B2 (ja) * | 1998-11-26 | 2006-07-12 | オムロン株式会社 | 静電マイクロリレー |
-
2001
- 2001-03-27 JP JP2001089900A patent/JP3651404B2/ja not_active Expired - Lifetime
-
2002
- 2002-03-19 TW TW091105215A patent/TW550616B/zh not_active IP Right Cessation
- 2002-03-25 KR KR10-2002-0015990A patent/KR100455949B1/ko active IP Right Grant
- 2002-03-26 EP EP02252164.5A patent/EP1246216B1/en not_active Expired - Lifetime
- 2002-03-27 CN CNB021082308A patent/CN1234144C/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160002219A (ko) | 2014-06-30 | 2016-01-07 | 대한민국 (관리부서 : 환경부 국립환경과학원장) | 보안등의 가변식 차광기구 |
KR20160002218A (ko) | 2014-06-30 | 2016-01-07 | 대한민국 (관리부서 : 환경부 국립환경과학원장) | 보안등의 고정식 차광기구 |
Also Published As
Publication number | Publication date |
---|---|
JP3651404B2 (ja) | 2005-05-25 |
JP2002289081A (ja) | 2002-10-04 |
KR20020076131A (ko) | 2002-10-09 |
TW550616B (en) | 2003-09-01 |
EP1246216A2 (en) | 2002-10-02 |
CN1234144C (zh) | 2005-12-28 |
EP1246216B1 (en) | 2014-06-04 |
EP1246216A3 (en) | 2004-07-21 |
CN1378225A (zh) | 2002-11-06 |
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