KR100420240B1 - 웨이퍼주변노광방법및장치 - Google Patents

웨이퍼주변노광방법및장치 Download PDF

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Publication number
KR100420240B1
KR100420240B1 KR1019960043446A KR19960043446A KR100420240B1 KR 100420240 B1 KR100420240 B1 KR 100420240B1 KR 1019960043446 A KR1019960043446 A KR 1019960043446A KR 19960043446 A KR19960043446 A KR 19960043446A KR 100420240 B1 KR100420240 B1 KR 100420240B1
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KR
South Korea
Prior art keywords
wafer
stage
pattern
predetermined
light
Prior art date
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Expired - Fee Related
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KR1019960043446A
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English (en)
Korean (ko)
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KR970023647A (ko
Inventor
요시키 미무라
타케시 미노베
신에츠 미우라
Original Assignee
우시오덴키 가부시키가이샤
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Publication of KR970023647A publication Critical patent/KR970023647A/ko
Application granted granted Critical
Publication of KR100420240B1 publication Critical patent/KR100420240B1/ko
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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2026—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction
    • G03F7/2028—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction of an edge bead on wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1019960043446A 1995-10-02 1996-10-01 웨이퍼주변노광방법및장치 Expired - Fee Related KR100420240B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27620795 1995-10-02
JP95-276207 1995-10-02

Publications (2)

Publication Number Publication Date
KR970023647A KR970023647A (ko) 1997-05-30
KR100420240B1 true KR100420240B1 (ko) 2004-07-22

Family

ID=17566185

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960043446A Expired - Fee Related KR100420240B1 (ko) 1995-10-02 1996-10-01 웨이퍼주변노광방법및장치

Country Status (5)

Country Link
US (1) US5880816A (enExample)
EP (1) EP0767409B1 (enExample)
KR (1) KR100420240B1 (enExample)
DE (1) DE69614215T2 (enExample)
TW (1) TW316322B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3356047B2 (ja) * 1997-11-26 2002-12-09 ウシオ電機株式会社 ウエハ周辺露光装置
US6471464B1 (en) * 1999-10-08 2002-10-29 Applied Materials, Inc. Wafer positioning device
JP2001144197A (ja) 1999-11-11 2001-05-25 Fujitsu Ltd 半導体装置、半導体装置の製造方法及び試験方法
JP4342663B2 (ja) * 1999-12-20 2009-10-14 株式会社オーク製作所 周辺露光装置
US6509577B1 (en) * 2000-11-10 2003-01-21 Asml Us, Inc. Systems and methods for exposing substrate periphery
JP3678144B2 (ja) * 2000-12-22 2005-08-03 ウシオ電機株式会社 フィルム回路基板の周辺露光装置
JP2002217084A (ja) * 2001-01-15 2002-08-02 Semiconductor Leading Edge Technologies Inc ウェハ周辺露光装置およびウェハ周辺露光方法
US6495312B1 (en) * 2001-02-01 2002-12-17 Lsi Logic Corporation Method and apparatus for removing photoresist edge beads from thin film substrates
KR100512006B1 (ko) 2001-03-06 2005-09-02 삼성전자주식회사 웨이퍼 주연 부위의 노광 방법 및 이를 수행하기 위한 장치
JP4019651B2 (ja) * 2001-05-21 2007-12-12 ウシオ電機株式会社 周辺露光装置
JP3820946B2 (ja) * 2001-09-17 2006-09-13 ウシオ電機株式会社 周辺露光装置
JP2004056086A (ja) * 2002-05-31 2004-02-19 Ushio Inc ランプ点灯制御装置および光照射装置
JP4258828B2 (ja) * 2002-06-06 2009-04-30 株式会社安川電機 ウエハプリアライメント装置および方法
RU2403262C2 (ru) * 2003-06-11 2010-11-10 Уайт Выделенный полипептид ib альфа гликопротеина тромбоцитов человека, слитый белок, молекула днк (варианты), экспрессирующий вектор (варианты), клетка (варианты), способ экспрессии полипептида, способ экспрессии слитого белка, фармацевтическая композиция (варианты), способ ингибирования прикрепления клетки крови к биологической ткани в биологической системе, способ ингибирования прикрепления белка к биологической ткани в биологической системе и способ лечения нарушения
US20050248754A1 (en) * 2004-05-05 2005-11-10 Chun-Sheng Wang Wafer aligner with WEE (water edge exposure) function
US7799166B2 (en) * 2004-09-20 2010-09-21 Lsi Corporation Wafer edge expose alignment method
CN103034062B (zh) * 2011-09-29 2014-11-26 中芯国际集成电路制造(北京)有限公司 用于晶片边缘曝光的方法、光学模块和自动聚焦系统
JP6322840B2 (ja) * 2014-12-10 2018-05-16 東京エレクトロン株式会社 レジスト膜除去方法、レジスト膜除去装置及び記憶媒体
JP6308958B2 (ja) * 2015-02-25 2018-04-11 東京エレクトロン株式会社 基板処理装置、基板処理方法、プログラム及びコンピュータ記憶媒体
CN107561864B (zh) * 2016-06-30 2019-10-25 上海微电子装备（集团）股份有限公司 边缘曝光装置和方法
US11378888B1 (en) 2021-01-07 2022-07-05 Taiwan Semiconductor Manufacturing Company, Ltd. Lens adjustment for an edge exposure tool
US12374519B2 (en) * 2021-06-24 2025-07-29 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer positioning method and apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05129183A (ja) * 1991-06-20 1993-05-25 Hitachi Ltd パターン露光装置
JPH05283312A (ja) * 1992-03-31 1993-10-29 Nikon Corp 位置合わせ装置
JPH0799399A (ja) * 1993-09-27 1995-04-11 Hitachi Electron Eng Co Ltd 位置合わせ装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5168304A (en) * 1988-08-22 1992-12-01 Nikon Corporation Exposure apparatus
US5028955A (en) * 1989-02-16 1991-07-02 Tokyo Electron Limited Exposure apparatus
US5289263A (en) * 1989-04-28 1994-02-22 Dainippon Screen Mfg. Co., Ltd. Apparatus for exposing periphery of an object
US5168021A (en) * 1989-09-21 1992-12-01 Ushio Denki Method for exposing predetermined area of peripheral part of wafer
JP2534567B2 (ja) * 1990-02-21 1996-09-18 ウシオ電機株式会社 ウエハ周辺露光方法及びウエハ周辺露光装置
JP2874280B2 (ja) * 1990-05-16 1999-03-24 株式会社ニコン 周縁露光装置及び周縁露光方法
JPH0775220B2 (ja) * 1991-03-20 1995-08-09 ウシオ電機株式会社 ウエハ上の不要レジスト露光方法
US5329354A (en) * 1991-04-24 1994-07-12 Matsushita Electric Industrial Co., Ltd. Alignment apparatus for use in exposure system for optically transferring pattern onto object
JPH053153A (ja) * 1991-06-24 1993-01-08 Ushio Inc ウエハ上の不要レジスト露光装置
US5420663A (en) * 1993-03-19 1995-05-30 Nikon Corporation Apparatus for exposing peripheral portion of substrate
JPH0775220A (ja) * 1993-09-07 1995-03-17 Fuji Electric Co Ltd 配電盤の扉開閉機構

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05129183A (ja) * 1991-06-20 1993-05-25 Hitachi Ltd パターン露光装置
JPH05283312A (ja) * 1992-03-31 1993-10-29 Nikon Corp 位置合わせ装置
JPH0799399A (ja) * 1993-09-27 1995-04-11 Hitachi Electron Eng Co Ltd 位置合わせ装置

Also Published As

Publication number Publication date
US5880816A (en) 1999-03-09
KR970023647A (ko) 1997-05-30
EP0767409A3 (en) 1997-07-30
DE69614215D1 (de) 2001-09-06
DE69614215T2 (de) 2002-05-08
EP0767409B1 (en) 2001-08-01
EP0767409A2 (en) 1997-04-09
TW316322B (enExample) 1997-09-21

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