KR100400780B1 - 반도체 소자의 제조 방법 - Google Patents
반도체 소자의 제조 방법 Download PDFInfo
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- KR100400780B1 KR100400780B1 KR10-2001-0085216A KR20010085216A KR100400780B1 KR 100400780 B1 KR100400780 B1 KR 100400780B1 KR 20010085216 A KR20010085216 A KR 20010085216A KR 100400780 B1 KR100400780 B1 KR 100400780B1
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- Prior art keywords
- gate
- forming
- gate electrodes
- insulating layer
- gate electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/823835—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes silicided or salicided gate conductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28035—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities
- H01L21/28044—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer
- H01L21/28052—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer the conductor comprising a silicide layer formed by the silicidation reaction of silicon with a metal layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System the conductive layers comprising silicides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823814—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
Abstract
Description
Claims (5)
- 반도체 기판상에 게이트 전극들을 형성하는 단계;상기 게이트 전극들의 양측 기판 표면내에 저농도 불순물 영역을 형성하고, 게이트 전극을 포함하는 전면에 제 1,2 절연층을 형성하고 게이트 전극들의 상부 표면 및 상단 측면 일부를 노출시키는 단계;선택적으로 게이트 전극들을 마스킹하고 노출된 게이트 전극들내에 게이트 이온 주입 공정을 진행하는 단계;상기 게이트 전극의 상단 측면에 측벽 마스크층을 형성하고 이를 마스크로 제 1,2 절연층을 제거하여 제 1,2 게이트 측벽을 형성한후 측벽 마스크층을 제거하는 단계;상기 게이트의 양측 기판 표면내에 소오스/드레인 영역을 형성하고 노출된 기판 표면 및 게이트 전극 상부 표면 및 상단 측면 일부에 살리사이드층을 형성하는 단계를 포함하는 것을 특징으로 하는 반도체 소자의 제조 방법.
- 제 1 항에 있어서, 제 1 절연층을 HLD 산화막 또는 TEOS를 100 ~ 400Å의 두께로 증착하여 형성하고, 제 2 절연층을 나이트라이드를 2800 ~ 3200Å의 두께로 증착하여 형성하는 것을 특징으로 하는 반도체 소자의 제조 방법.
- 제 1 항에 있어서, 제 2 절연층을 형성하고 게이트 전극들의 상부 표면을 노출시키는 공정을 CMP 공정으로 완전 평탄화하여 게이트 전극들의 표면을 노출시키거나, 게이트 전극의 상부에 200 ~ 800Å의 두께의 제 2 절연층을 남도록 언더 폴리싱한후 추가 식각 공정으로 제 2 절연층을 오버 에치하여 노출시키는 것을 특징으로 하는 반도체 소자의 제조 방법.
- 제 3 항에 있어서, 제 2 절연층의 오버 에치에 의해 남겨진 제 2 절연층은 게이트 전극의 표면보다 50 ~ 500Å 낮은 위치에 상부 표면이 위치하는 것을 특징으로 하는 반도체 소자의 제조 방법.
- 제 1 항에 있어서, 평탄화 및 식각 공정후 게이트 이온 주입을 하는 공정은 NMOS 게이트 지역뿐 아니라 PMOS 게이트 지역도 시행하여 NMOS뿐만 아니라 PMOS의 게이트와 소오스/드레인을 독립적으로 이온 주입하는 것을 특징으로 하는 반도체 소자의 제조 방법.
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KR10-2001-0085216A KR100400780B1 (ko) | 2001-12-26 | 2001-12-26 | 반도체 소자의 제조 방법 |
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KR10-2001-0085216A KR100400780B1 (ko) | 2001-12-26 | 2001-12-26 | 반도체 소자의 제조 방법 |
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KR20030054804A KR20030054804A (ko) | 2003-07-02 |
KR100400780B1 true KR100400780B1 (ko) | 2003-10-08 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5290720A (en) * | 1990-12-07 | 1994-03-01 | At&T Bell Laboratories | Transistor with inverse silicide T-gate structure |
JPH0974199A (ja) * | 1995-01-12 | 1997-03-18 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
KR20000000624A (ko) * | 1998-06-02 | 2000-01-15 | 김영환 | 반도체장치의 제조방법 |
KR20010054169A (ko) * | 1999-12-03 | 2001-07-02 | 박종섭 | 반도체 소자 제조방법 |
KR20030042154A (ko) * | 2001-11-21 | 2003-05-28 | 삼성전자주식회사 | 실리사이드 패턴을 포함하는 반도체 트랜지스터의 제조 방법 |
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2001
- 2001-12-26 KR KR10-2001-0085216A patent/KR100400780B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5290720A (en) * | 1990-12-07 | 1994-03-01 | At&T Bell Laboratories | Transistor with inverse silicide T-gate structure |
JPH0974199A (ja) * | 1995-01-12 | 1997-03-18 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
KR20000000624A (ko) * | 1998-06-02 | 2000-01-15 | 김영환 | 반도체장치의 제조방법 |
KR20010054169A (ko) * | 1999-12-03 | 2001-07-02 | 박종섭 | 반도체 소자 제조방법 |
KR20030042154A (ko) * | 2001-11-21 | 2003-05-28 | 삼성전자주식회사 | 실리사이드 패턴을 포함하는 반도체 트랜지스터의 제조 방법 |
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