KR100366959B1 - 실리콘 결정화방법 - Google Patents
실리콘 결정화방법 Download PDFInfo
- Publication number
- KR100366959B1 KR100366959B1 KR10-2000-0051293A KR20000051293A KR100366959B1 KR 100366959 B1 KR100366959 B1 KR 100366959B1 KR 20000051293 A KR20000051293 A KR 20000051293A KR 100366959 B1 KR100366959 B1 KR 100366959B1
- Authority
- KR
- South Korea
- Prior art keywords
- silicon
- thin film
- amorphous
- microcrystalline
- crystallization
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
Abstract
Description
Claims (4)
- 기판을 구비하는 단계와;상기 기판 상에 결정질영역과 비정질영역이 혼재하는 미세결정질 실리콘박막을 증착하는 단계와;상기 미세결정질 실리콘박막 상에 비정질 실리콘을 증착하는 단계와;상기 비정질 실리콘을 결정화하는 단계와;상기 비정질 실리콘을 증착하기 전에 상기 미세결정질 실리콘박막의 내부에 다량 함유된 에너지적으로 불안정한 비정질 영역을 제거하고, 결정질 영역의 밀도를 줄이기 위해 상기 미세결정질 실리콘 박막의 일부를 식각하는 단계를 포함하는 실리콘 결정화방법.
- 청구항 1에 있어서,상기 미세결정질 실리콘 박막의 식각은 건식식각인 실리콘 결정화방법.
- 청구항 2에 있어서,상기 건식식각시 사용되는 식각 가스는 수소(H2)인 실리콘 결정화방법.
- 청구항 1 내지 청구항 3항 중 어느 한 항의 실리콘 결정화방법에 의해 결정화된 실리콘.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2000-0051293A KR100366959B1 (ko) | 2000-08-31 | 2000-08-31 | 실리콘 결정화방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2000-0051293A KR100366959B1 (ko) | 2000-08-31 | 2000-08-31 | 실리콘 결정화방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020017779A KR20020017779A (ko) | 2002-03-07 |
KR100366959B1 true KR100366959B1 (ko) | 2003-01-09 |
Family
ID=19686530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2000-0051293A KR100366959B1 (ko) | 2000-08-31 | 2000-08-31 | 실리콘 결정화방법 |
Country Status (1)
Country | Link |
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KR (1) | KR100366959B1 (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100726129B1 (ko) * | 2000-10-26 | 2007-06-12 | 엘지.필립스 엘시디 주식회사 | 다결정실리콘 박막트랜지스터 소자 및 그 제조방법 |
KR100525439B1 (ko) * | 2002-08-12 | 2005-11-02 | 엘지.필립스 엘시디 주식회사 | Sls 결정화마스크, 결정화장비 및 결정화방법 |
KR100652060B1 (ko) * | 2004-09-09 | 2006-12-01 | 엘지.필립스 엘시디 주식회사 | 폴리실리콘층 및 그 결정화 방법 그리고, 이를 이용한액정표시소자의 제조방법 |
-
2000
- 2000-08-31 KR KR10-2000-0051293A patent/KR100366959B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR20020017779A (ko) | 2002-03-07 |
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