KR100363462B1 - 스핀밸브형 자기저항 효과소자와 그 제조방법 - Google Patents

스핀밸브형 자기저항 효과소자와 그 제조방법 Download PDF

Info

Publication number
KR100363462B1
KR100363462B1 KR1020000003976A KR20000003976A KR100363462B1 KR 100363462 B1 KR100363462 B1 KR 100363462B1 KR 1020000003976 A KR1020000003976 A KR 1020000003976A KR 20000003976 A KR20000003976 A KR 20000003976A KR 100363462 B1 KR100363462 B1 KR 100363462B1
Authority
KR
South Korea
Prior art keywords
layer
magnetic
magnetic layer
coercive force
magnetic field
Prior art date
Application number
KR1020000003976A
Other languages
English (en)
Korean (ko)
Other versions
KR20000053639A (ko
Inventor
하세가와나오야
Original Assignee
알프스 덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 알프스 덴키 가부시키가이샤 filed Critical 알프스 덴키 가부시키가이샤
Publication of KR20000053639A publication Critical patent/KR20000053639A/ko
Application granted granted Critical
Publication of KR100363462B1 publication Critical patent/KR100363462B1/ko

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3929Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
    • G11B5/3932Magnetic biasing films
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/093Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906Details related to the use of magnetic thin film layers or to their effects
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/398Specially shaped layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B2005/3996Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Hall/Mr Elements (AREA)
  • Magnetic Heads (AREA)
KR1020000003976A 1999-01-27 2000-01-27 스핀밸브형 자기저항 효과소자와 그 제조방법 KR100363462B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11019120A JP2000215422A (ja) 1999-01-27 1999-01-27 スピンバルブ型磁気抵抗効果素子およびその製造方法とその素子を備えた薄膜磁気ヘッド
JP99-019120 1999-01-27

Publications (2)

Publication Number Publication Date
KR20000053639A KR20000053639A (ko) 2000-08-25
KR100363462B1 true KR100363462B1 (ko) 2002-11-30

Family

ID=11990619

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000003976A KR100363462B1 (ko) 1999-01-27 2000-01-27 스핀밸브형 자기저항 효과소자와 그 제조방법

Country Status (3)

Country Link
JP (1) JP2000215422A (ja)
KR (1) KR100363462B1 (ja)
DE (1) DE10003471A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6538859B1 (en) * 2000-07-31 2003-03-25 International Business Machines Corporation Giant magnetoresistive sensor with an AP-coupled low Hk free layer
JP2002111095A (ja) 2000-09-26 2002-04-12 Alps Electric Co Ltd 磁気抵抗効果型素子
JP3576111B2 (ja) 2001-03-12 2004-10-13 株式会社東芝 磁気抵抗効果素子
KR20030073600A (ko) * 2002-03-12 2003-09-19 학교법인고려중앙학원 스핀밸브형 자기저항소자
JP2004296000A (ja) * 2003-03-27 2004-10-21 Hitachi Ltd 磁気抵抗効果型ヘッド、及びその製造方法
KR100733782B1 (ko) * 2005-01-19 2007-07-02 고려대학교 산학협력단 CoFeZr을 포함하는 거대 자기 저항 소자의 제조 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0687917A2 (en) * 1994-06-15 1995-12-20 International Business Machines Corporation Spin valve magnetoresistive sensor with self-pinned laminated layer and magnetic recording system using the sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0687917A2 (en) * 1994-06-15 1995-12-20 International Business Machines Corporation Spin valve magnetoresistive sensor with self-pinned laminated layer and magnetic recording system using the sensor

Also Published As

Publication number Publication date
KR20000053639A (ko) 2000-08-25
DE10003471A1 (de) 2000-08-03
JP2000215422A (ja) 2000-08-04

Similar Documents

Publication Publication Date Title
JP3291208B2 (ja) 磁気抵抗効果型センサおよびその製造方法とそのセンサを備えた磁気ヘッド
US7265948B2 (en) Magnetoresistive element with oxide magnetic layers and metal magnetic films deposited thereon
KR100261385B1 (ko) 반평행 구속층과 개선된 바이어스층을 갖는 스핀 밸브 자기저항 센서와 그 센서를 이용한 자기 기록 시스템
US7106561B2 (en) Current-perpendicular-to-plane magnetoresistive sensor with free layer stabilized by in-stack orthogonal magnetic coupling to an antiparallel pinned biasing layer
US6510031B1 (en) Magnetoresistive sensor with magnetostatic coupling to obtain opposite alignment of magnetic regions
US20050161752A1 (en) Current-in-plane magnetic sensor including a trilayer structure
JP2004260149A (ja) 固定層に半金属強磁性体ホイスラー合金を有する交換結合構造の磁気抵抗素子
JPH11296823A (ja) 磁気抵抗効果素子およびその製造方法、ならびに磁気抵抗効果センサ,磁気記録システム
US6331773B1 (en) Pinned synthetic anti-ferromagnet with oxidation protection layer
JPH09266334A (ja) 磁気抵抗効果素子
JP3657487B2 (ja) スピンバルブ型薄膜磁気素子およびその製造方法、およびこのスピンバルブ型薄膜磁気素子を備えた薄膜磁気ヘッド
JP2001143223A (ja) スピンバルブ型薄膜磁気素子及び薄膜磁気ヘッド
JP2002076472A (ja) スピンバルブ型薄膜磁気素子およびこのスピンバルブ型薄膜磁気素子を備えた薄膜磁気ヘッド
US7535683B2 (en) Magnetoresistive head with improved in-stack longitudinal biasing layers
JP3249052B2 (ja) 磁気抵抗効果素子およびその製造方法とその素子を備えた磁気ヘッド
JP2002151757A (ja) 薄膜磁気素子及びその製造方法
US20020081458A1 (en) Magnetic sensing element with improved sensitivity and method for making the same
JPH10188235A (ja) 磁気抵抗効果膜及びその製造方法
JP2000215421A (ja) スピンバルブ型薄膜磁気素子及び薄膜磁気ヘッド及びスピンバルブ型薄膜磁気素子の製造方法
KR100363462B1 (ko) 스핀밸브형 자기저항 효과소자와 그 제조방법
JP2001307308A (ja) 磁気抵抗効果型ヘッドおよび情報再生装置
JP2000348309A (ja) スピンバルブ型薄膜磁気素子及び薄膜磁気ヘッド及びスピンバルブ型薄膜磁気素子の製造方法
JP3602473B2 (ja) スピンバルブ型薄膜磁気素子およびそのスピンバルブ型薄膜磁気素子を備えた薄膜磁気ヘッド
JPH0992904A (ja) 巨大磁気抵抗効果材料膜およびその製造方法とそれを用いた磁気ヘッド
JP3561026B2 (ja) 磁気抵抗効果ヘッド

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20111028

Year of fee payment: 10

FPAY Annual fee payment

Payment date: 20121030

Year of fee payment: 11

LAPS Lapse due to unpaid annual fee