KR100307070B1 - 고속원자빔공급원 - Google Patents

고속원자빔공급원 Download PDF

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Publication number
KR100307070B1
KR100307070B1 KR1019940020489A KR19940020489A KR100307070B1 KR 100307070 B1 KR100307070 B1 KR 100307070B1 KR 1019940020489 A KR1019940020489 A KR 1019940020489A KR 19940020489 A KR19940020489 A KR 19940020489A KR 100307070 B1 KR100307070 B1 KR 100307070B1
Authority
KR
South Korea
Prior art keywords
gas
cathode
high speed
atomic beam
speed atomic
Prior art date
Application number
KR1019940020489A
Other languages
English (en)
Korean (ko)
Other versions
KR950007207A (ko
Inventor
하따께야마마사히로
Original Assignee
마에다 시게루
가부시키 가이샤 에바라 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP22799393A external-priority patent/JP3213135B2/ja
Priority claimed from JP22799493A external-priority patent/JPH0755999A/ja
Application filed by 마에다 시게루, 가부시키 가이샤 에바라 세이사꾸쇼 filed Critical 마에다 시게루
Publication of KR950007207A publication Critical patent/KR950007207A/ko
Application granted granted Critical
Publication of KR100307070B1 publication Critical patent/KR100307070B1/ko

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic beam generation
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/04—Irradiation devices with beam-forming means

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
KR1019940020489A 1993-08-20 1994-08-19 고속원자빔공급원 KR100307070B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP93-227994 1993-08-20
JP22799393A JP3213135B2 (ja) 1993-08-20 1993-08-20 高速原子線源
JP22799493A JPH0755999A (ja) 1993-08-20 1993-08-20 高速原子線源
JP93-227993 1993-08-20

Publications (2)

Publication Number Publication Date
KR950007207A KR950007207A (ko) 1995-03-21
KR100307070B1 true KR100307070B1 (ko) 2001-12-01

Family

ID=26527992

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940020489A KR100307070B1 (ko) 1993-08-20 1994-08-19 고속원자빔공급원

Country Status (4)

Country Link
US (1) US5519213A (de)
EP (1) EP0639939B1 (de)
KR (1) KR100307070B1 (de)
DE (1) DE69417970T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989779A (en) * 1994-10-18 1999-11-23 Ebara Corporation Fabrication method employing and energy beam source
EP0731490A3 (de) * 1995-03-02 1998-03-11 Ebara Corporation Ultrafeines Mikroherstellungsverfahren unter Verwendung eines Energiebündel
JP3328498B2 (ja) * 1996-02-16 2002-09-24 株式会社荏原製作所 高速原子線源
US6671034B1 (en) * 1998-04-30 2003-12-30 Ebara Corporation Microfabrication of pattern imprinting
JP2003050300A (ja) * 2001-05-28 2003-02-21 Sei Matsuoka 価値的情報の送信装置および送信方法
KR100476903B1 (ko) * 2002-10-15 2005-03-17 주식회사 셈테크놀러지 중성입자 변환 효율이 향상된 중성입자 처리 장치
US6903511B2 (en) * 2003-05-06 2005-06-07 Zond, Inc. Generation of uniformly-distributed plasma
GB2437820B (en) * 2006-04-27 2011-06-22 Matsushita Electric Ind Co Ltd Fast atom bombardment source, fast atom beam emission method, and surface modification apparatus
DE102008058212B4 (de) 2008-11-19 2011-07-07 Astrium GmbH, 81667 Ionenantrieb für ein Raumfahrzeug
US8153958B2 (en) * 2009-07-10 2012-04-10 Sphere Renewable Energy Corp. Method and apparatus for producing hyperthermal beams
WO2015175934A1 (en) 2014-05-15 2015-11-19 Anthony John Mark Deposition and patterning using emitted electrons
CN104843198B (zh) * 2015-04-03 2017-04-12 湘潭大学 一种阿尔法粒子级联衰变的放射性材料及其制成的推进装置和莲子推进器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60115220A (ja) * 1983-11-26 1985-06-21 Anelva Corp 三極グロ−放電型表面処理装置
US4842707A (en) * 1986-06-23 1989-06-27 Oki Electric Industry Co., Ltd. Dry process apparatus
JPH0799720B2 (ja) * 1990-08-30 1995-10-25 株式会社荏原製作所 高速原子線源
US5055672A (en) * 1990-11-20 1991-10-08 Ebara Corporation Fast atom beam source
JPH0724240B2 (ja) * 1991-03-05 1995-03-15 株式会社荏原製作所 高速原子線源
JPH0715808B2 (ja) * 1991-04-23 1995-02-22 株式会社荏原製作所 イオン中和器
JP2509488B2 (ja) * 1991-09-12 1996-06-19 株式会社荏原製作所 高速原子線源

Also Published As

Publication number Publication date
EP0639939A1 (de) 1995-02-22
US5519213A (en) 1996-05-21
DE69417970T2 (de) 1999-12-02
DE69417970D1 (de) 1999-05-27
EP0639939B1 (de) 1999-04-21
KR950007207A (ko) 1995-03-21

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