KR100305952B1 - 플라스틱제기판표면상의박막침착방법 - Google Patents

플라스틱제기판표면상의박막침착방법 Download PDF

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Publication number
KR100305952B1
KR100305952B1 KR1019940027993A KR19940027993A KR100305952B1 KR 100305952 B1 KR100305952 B1 KR 100305952B1 KR 1019940027993 A KR1019940027993 A KR 1019940027993A KR 19940027993 A KR19940027993 A KR 19940027993A KR 100305952 B1 KR100305952 B1 KR 100305952B1
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South Korea
Prior art keywords
substrate
plasma
pretreatment
gas
power density
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Expired - Fee Related
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KR1019940027993A
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English (en)
Korean (ko)
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KR950012637A (ko
Inventor
프랑시스베르자로
디디에페리
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아토피나
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/16—Chemical modification with polymerisable compounds
    • C08J7/18—Chemical modification with polymerisable compounds using wave energy or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/142—Pretreatment
    • B05D3/144—Pretreatment of polymeric substrates
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C08J7/123—Treatment by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2323/00—Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers
    • C08J2323/02—Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers not modified by chemical after treatment
    • C08J2323/10—Homopolymers or copolymers of propene
    • C08J2323/12—Polypropene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2325/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Derivatives of such polymers
    • C08J2325/02—Homopolymers or copolymers of hydrocarbons
    • C08J2325/04—Homopolymers or copolymers of styrene
    • C08J2325/06—Polystyrene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2333/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers
    • C08J2333/04—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters
    • C08J2333/06—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters of esters containing only carbon, hydrogen, and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C08J2333/10—Homopolymers or copolymers of methacrylic acid esters
    • C08J2333/12—Homopolymers or copolymers of methyl methacrylate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Laminated Bodies (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chemically Coating (AREA)
KR1019940027993A 1993-10-29 1994-10-28 플라스틱제기판표면상의박막침착방법 Expired - Fee Related KR100305952B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9312946A FR2711556B1 (fr) 1993-10-29 1993-10-29 Procédé de dépôt d'une couche mince sur la surface d'un substrat en matière plastique.
FR9312946 1993-10-29

Publications (2)

Publication Number Publication Date
KR950012637A KR950012637A (ko) 1995-05-16
KR100305952B1 true KR100305952B1 (ko) 2001-12-01

Family

ID=9452365

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940027993A Expired - Fee Related KR100305952B1 (ko) 1993-10-29 1994-10-28 플라스틱제기판표면상의박막침착방법

Country Status (11)

Country Link
US (1) US5569497A (enExample)
EP (1) EP0650772B1 (enExample)
JP (1) JP3038123B2 (enExample)
KR (1) KR100305952B1 (enExample)
CN (1) CN1090539C (enExample)
AT (1) ATE209068T1 (enExample)
CA (1) CA2134290C (enExample)
DE (1) DE69429150T2 (enExample)
ES (1) ES2167350T3 (enExample)
FR (1) FR2711556B1 (enExample)
TW (1) TW277006B (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995022413A1 (en) 1994-02-16 1995-08-24 The Coca-Cola Company Hollow containers with inert or impermeable inner surface through plasma-assisted surface reaction or on-surface polymerization
US6149982A (en) * 1994-02-16 2000-11-21 The Coca-Cola Company Method of forming a coating on an inner surface
US5658374A (en) * 1995-02-28 1997-08-19 Buckman Laboratories International, Inc. Aqueous lecithin-based release aids and methods of using the same
EP0752483A1 (de) * 1995-06-28 1997-01-08 ANTEC Angewandte Neue Technologien GmbH Verfahren zur Beschichtung von Gegenständen aus Metall oder Kunststoff
US5885751A (en) * 1996-11-08 1999-03-23 Applied Materials, Inc. Method and apparatus for depositing deep UV photoresist films
JP3014334B2 (ja) * 1996-11-29 2000-02-28 キヤノン販売株式会社 半導体装置の製造方法
DE19703538A1 (de) * 1997-01-31 1998-08-06 Fraunhofer Ges Forschung Verfahren zur Modifizierung von Polymethylmethacrylat-Substratoberflächen
US6515355B1 (en) * 1998-09-02 2003-02-04 Micron Technology, Inc. Passivation layer for packaged integrated circuits
KR100713877B1 (ko) * 1998-12-18 2007-07-18 비오이 하이디스 테크놀로지 주식회사 박막 트랜지스터 액정표시장치
KR20010088089A (ko) * 2000-03-10 2001-09-26 구자홍 플라즈마 중합처리 시스템의 친수성 향상 방법
US20030185973A1 (en) * 2002-03-30 2003-10-02 Crawley Richard L. Water vapor plasma method of increasing the surface energy of a surface
EP1548149B1 (en) * 2002-09-30 2013-09-11 Toppan Printing Co., Ltd. Method for forming thin film, apparatus for forming thin film, and method for monitoring thin film forming process
CN1330433C (zh) * 2004-03-30 2007-08-08 刘岗 塑料件表面喷淋式前处理方法
US20050238816A1 (en) * 2004-04-23 2005-10-27 Li Hou Method and apparatus of depositing low temperature inorganic films on plastic substrates
EP1884959B1 (en) * 2006-07-31 2011-09-14 Agfa HealthCare NV Phosphor or scintillator screens or panels having a topcoat layer.
JP5019291B2 (ja) * 2007-10-25 2012-09-05 国立大学法人群馬大学 木質バイオマスへの金属担持方法、銀イオン水の製造方法、ナトリウムイオン水の製造方法
JP5235104B2 (ja) * 2008-06-20 2013-07-10 株式会社アルバック 成膜方法
US8206794B2 (en) * 2009-05-04 2012-06-26 The Boeing Company System and method for applying abrasion-resistant coatings
US8354138B2 (en) * 2009-12-14 2013-01-15 Chung-Shan Institute Of Science And Technology, Armaments Bureau, Ministry Of National Defense Preparing method for coating PMMA particles with silicon dioxide
CN101892452B (zh) * 2010-08-06 2012-12-26 凌嘉科技股份有限公司 在塑料工件上形成电磁干扰防护层的方法
CN102754969A (zh) * 2011-04-28 2012-10-31 苏州卫鹏机电科技有限公司 一种增强鞋材表面粘接性的处理方法
CN102754968A (zh) * 2011-04-28 2012-10-31 苏州卫鹏机电科技有限公司 一种对鞋材做粘接前预处理的方法
EP2747921B1 (en) * 2011-08-26 2017-11-01 Exatec, LLC. Organic resin laminate, methods of making and using the same, and articles comprising the same
JP6279222B2 (ja) * 2013-03-25 2018-02-14 スリーエム イノベイティブ プロパティズ カンパニー 摩擦係数の低い表面を有するポリマーを含む物品及びその製造方法
GB2516978B (en) * 2013-08-09 2016-06-08 Innovia Films Ltd Process for manufacturing a release liner
CA2968705C (en) * 2014-11-27 2022-11-22 Construction Research & Technology Gmbh Surface-modified polyolefin fibers
WO2022053532A1 (en) 2020-09-08 2022-03-17 The Provost, Fellows, Scholars And Other Members Of Board Of Trinity College Dublin Coating plastic material surfaces to prevent particle generation
CN119615073B (zh) * 2025-02-11 2025-08-19 浙江天牧光能科技有限公司 一种用于化合物薄膜制备的快速蒸发设备

Citations (1)

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Publication number Priority date Publication date Assignee Title
EP0110258A1 (en) * 1982-11-25 1984-06-13 Shin-Etsu Chemical Co., Ltd. A method for the preparation of a polyvinyl chloride resin shaped article with metallized surface

Family Cites Families (5)

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DE3413019A1 (de) * 1984-04-06 1985-10-17 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zum aufbringen einer duennen, transparenten schicht auf der oberflaeche optischer elemente
US4778721A (en) * 1986-07-09 1988-10-18 Battelle Memorial Institute Method of forming abrasion-resistant plasma coatings and resulting articles
DE3624467A1 (de) * 1986-07-19 1988-01-28 Leybold Heraeus Gmbh & Co Kg Verfahren zum herstellen transparenter schutzschichten aus siliziumverbindungen
CA1266591A (en) * 1987-10-07 1990-03-13 Michael R. Wertheimer Process for modifying large polymeric surfaces
DE4204082A1 (de) * 1992-02-12 1993-08-19 Leybold Ag Verfahren zur herstellung einer haftvermittelnden schicht auf werkstueckoberflaechen

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
EP0110258A1 (en) * 1982-11-25 1984-06-13 Shin-Etsu Chemical Co., Ltd. A method for the preparation of a polyvinyl chloride resin shaped article with metallized surface

Also Published As

Publication number Publication date
DE69429150D1 (de) 2002-01-03
FR2711556A1 (fr) 1995-05-05
CN1110632A (zh) 1995-10-25
ATE209068T1 (de) 2001-12-15
KR950012637A (ko) 1995-05-16
TW277006B (enExample) 1996-06-01
EP0650772A1 (fr) 1995-05-03
CA2134290C (fr) 2002-01-01
ES2167350T3 (es) 2002-05-16
DE69429150T2 (de) 2002-07-18
JPH0820658A (ja) 1996-01-23
CA2134290A1 (fr) 1995-04-30
JP3038123B2 (ja) 2000-05-08
CN1090539C (zh) 2002-09-11
FR2711556B1 (fr) 1995-12-15
EP0650772B1 (fr) 2001-11-21
US5569497A (en) 1996-10-29

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