ATE209068T1 - Verfahren zum aufbringen einer dünnen schicht auf der oberfläche eines kunststoffsubstrat - Google Patents
Verfahren zum aufbringen einer dünnen schicht auf der oberfläche eines kunststoffsubstratInfo
- Publication number
- ATE209068T1 ATE209068T1 AT94402111T AT94402111T ATE209068T1 AT E209068 T1 ATE209068 T1 AT E209068T1 AT 94402111 T AT94402111 T AT 94402111T AT 94402111 T AT94402111 T AT 94402111T AT E209068 T1 ATE209068 T1 AT E209068T1
- Authority
- AT
- Austria
- Prior art keywords
- substrate
- plastic substrate
- oxygen
- plasma
- pretreatment
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 6
- 238000000034 method Methods 0.000 title abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 3
- 238000000151 deposition Methods 0.000 abstract 3
- 239000001301 oxygen Substances 0.000 abstract 3
- 229910052760 oxygen Inorganic materials 0.000 abstract 3
- 230000008021 deposition Effects 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 230000004941 influx Effects 0.000 abstract 2
- 230000003213 activating effect Effects 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 239000002210 silicon-based material Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/12—Chemical modification
- C08J7/16—Chemical modification with polymerisable compounds
- C08J7/18—Chemical modification with polymerisable compounds using wave energy or particle radiation
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/12—Chemical modification
- C08J7/123—Treatment by wave energy or particle radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
- B05D3/141—Plasma treatment
- B05D3/142—Pretreatment
- B05D3/144—Pretreatment of polymeric substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2323/00—Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers
- C08J2323/02—Characterised by the use of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Derivatives of such polymers not modified by chemical after treatment
- C08J2323/10—Homopolymers or copolymers of propene
- C08J2323/12—Polypropene
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2325/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Derivatives of such polymers
- C08J2325/02—Homopolymers or copolymers of hydrocarbons
- C08J2325/04—Homopolymers or copolymers of styrene
- C08J2325/06—Polystyrene
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2333/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers
- C08J2333/04—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters
- C08J2333/06—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters of esters containing only carbon, hydrogen, and oxygen, the oxygen atom being present only as part of the carboxyl radical
- C08J2333/10—Homopolymers or copolymers of methacrylic acid esters
- C08J2333/12—Homopolymers or copolymers of methyl methacrylate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Inorganic Chemistry (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Laminated Bodies (AREA)
- Chemical Vapour Deposition (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9312946A FR2711556B1 (fr) | 1993-10-29 | 1993-10-29 | Procédé de dépôt d'une couche mince sur la surface d'un substrat en matière plastique. |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE209068T1 true ATE209068T1 (de) | 2001-12-15 |
Family
ID=9452365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT94402111T ATE209068T1 (de) | 1993-10-29 | 1994-09-22 | Verfahren zum aufbringen einer dünnen schicht auf der oberfläche eines kunststoffsubstrat |
Country Status (11)
Country | Link |
---|---|
US (1) | US5569497A (de) |
EP (1) | EP0650772B1 (de) |
JP (1) | JP3038123B2 (de) |
KR (1) | KR100305952B1 (de) |
CN (1) | CN1090539C (de) |
AT (1) | ATE209068T1 (de) |
CA (1) | CA2134290C (de) |
DE (1) | DE69429150T2 (de) |
ES (1) | ES2167350T3 (de) |
FR (1) | FR2711556B1 (de) |
TW (1) | TW277006B (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DK0693975T4 (da) * | 1994-02-16 | 2003-08-18 | Coca Cola Co | Hule beholdere med indifferent eller uigennemtrængelig indre overflade gennem plasmaunderstøttet overfladereaktion eller polymerisation på overfladen |
US6149982A (en) * | 1994-02-16 | 2000-11-21 | The Coca-Cola Company | Method of forming a coating on an inner surface |
US5658374A (en) * | 1995-02-28 | 1997-08-19 | Buckman Laboratories International, Inc. | Aqueous lecithin-based release aids and methods of using the same |
EP0752483A1 (de) * | 1995-06-28 | 1997-01-08 | ANTEC Angewandte Neue Technologien GmbH | Verfahren zur Beschichtung von Gegenständen aus Metall oder Kunststoff |
US5885751A (en) * | 1996-11-08 | 1999-03-23 | Applied Materials, Inc. | Method and apparatus for depositing deep UV photoresist films |
JP3014334B2 (ja) * | 1996-11-29 | 2000-02-28 | キヤノン販売株式会社 | 半導体装置の製造方法 |
DE19703538A1 (de) * | 1997-01-31 | 1998-08-06 | Fraunhofer Ges Forschung | Verfahren zur Modifizierung von Polymethylmethacrylat-Substratoberflächen |
US6515355B1 (en) * | 1998-09-02 | 2003-02-04 | Micron Technology, Inc. | Passivation layer for packaged integrated circuits |
KR100713877B1 (ko) * | 1998-12-18 | 2007-07-18 | 비오이 하이디스 테크놀로지 주식회사 | 박막 트랜지스터 액정표시장치 |
KR20010088089A (ko) * | 2000-03-10 | 2001-09-26 | 구자홍 | 플라즈마 중합처리 시스템의 친수성 향상 방법 |
US20030185973A1 (en) * | 2002-03-30 | 2003-10-02 | Crawley Richard L. | Water vapor plasma method of increasing the surface energy of a surface |
WO2004031440A1 (ja) * | 2002-09-30 | 2004-04-15 | Toppan Printing Co., Ltd. | 薄膜成膜方法、薄膜成膜装置および薄膜成膜プロセスの監視方法 |
CN1330433C (zh) * | 2004-03-30 | 2007-08-08 | 刘岗 | 塑料件表面喷淋式前处理方法 |
US20050238816A1 (en) * | 2004-04-23 | 2005-10-27 | Li Hou | Method and apparatus of depositing low temperature inorganic films on plastic substrates |
EP1884959B1 (de) * | 2006-07-31 | 2011-09-14 | Agfa HealthCare NV | Leucht- oder Szintillatorschirme bzw. -tafeln mit einer Deckschicht |
JP5019291B2 (ja) * | 2007-10-25 | 2012-09-05 | 国立大学法人群馬大学 | 木質バイオマスへの金属担持方法、銀イオン水の製造方法、ナトリウムイオン水の製造方法 |
JP5235104B2 (ja) * | 2008-06-20 | 2013-07-10 | 株式会社アルバック | 成膜方法 |
US8206794B2 (en) * | 2009-05-04 | 2012-06-26 | The Boeing Company | System and method for applying abrasion-resistant coatings |
US8354138B2 (en) * | 2009-12-14 | 2013-01-15 | Chung-Shan Institute Of Science And Technology, Armaments Bureau, Ministry Of National Defense | Preparing method for coating PMMA particles with silicon dioxide |
CN101892452B (zh) * | 2010-08-06 | 2012-12-26 | 凌嘉科技股份有限公司 | 在塑料工件上形成电磁干扰防护层的方法 |
CN102754969A (zh) * | 2011-04-28 | 2012-10-31 | 苏州卫鹏机电科技有限公司 | 一种增强鞋材表面粘接性的处理方法 |
CN102754968A (zh) * | 2011-04-28 | 2012-10-31 | 苏州卫鹏机电科技有限公司 | 一种对鞋材做粘接前预处理的方法 |
WO2013032421A1 (en) * | 2011-08-26 | 2013-03-07 | Exatec Llc | Organic resin laminate, methods of making and using the same, and articles comprising the same |
JP6279222B2 (ja) * | 2013-03-25 | 2018-02-14 | スリーエム イノベイティブ プロパティズ カンパニー | 摩擦係数の低い表面を有するポリマーを含む物品及びその製造方法 |
GB2516978B (en) * | 2013-08-09 | 2016-06-08 | Innovia Films Ltd | Process for manufacturing a release liner |
BR112017011062B1 (pt) * | 2014-11-27 | 2021-11-16 | Construction Research & Technology Gmbh | Fibras de poliolefina de superfície modificada |
WO2022053532A1 (en) | 2020-09-08 | 2022-03-17 | The Provost, Fellows, Scholars And Other Members Of Board Of Trinity College Dublin | Coating plastic material surfaces to prevent particle generation |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5996137A (ja) * | 1982-11-25 | 1984-06-02 | Shin Etsu Chem Co Ltd | 塩化ビニル系樹脂複合製品の製造方法 |
DE3413019A1 (de) * | 1984-04-06 | 1985-10-17 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren zum aufbringen einer duennen, transparenten schicht auf der oberflaeche optischer elemente |
US4778721A (en) * | 1986-07-09 | 1988-10-18 | Battelle Memorial Institute | Method of forming abrasion-resistant plasma coatings and resulting articles |
DE3624467A1 (de) * | 1986-07-19 | 1988-01-28 | Leybold Heraeus Gmbh & Co Kg | Verfahren zum herstellen transparenter schutzschichten aus siliziumverbindungen |
CA1266591A (en) * | 1987-10-07 | 1990-03-13 | Michael R. Wertheimer | Process for modifying large polymeric surfaces |
DE4204082A1 (de) * | 1992-02-12 | 1993-08-19 | Leybold Ag | Verfahren zur herstellung einer haftvermittelnden schicht auf werkstueckoberflaechen |
-
1993
- 1993-10-29 FR FR9312946A patent/FR2711556B1/fr not_active Expired - Fee Related
-
1994
- 1994-09-22 AT AT94402111T patent/ATE209068T1/de not_active IP Right Cessation
- 1994-09-22 EP EP94402111A patent/EP0650772B1/de not_active Expired - Lifetime
- 1994-09-22 DE DE69429150T patent/DE69429150T2/de not_active Expired - Fee Related
- 1994-09-22 ES ES94402111T patent/ES2167350T3/es not_active Expired - Lifetime
- 1994-09-27 TW TW083108956A patent/TW277006B/zh active
- 1994-10-25 CA CA002134290A patent/CA2134290C/fr not_active Expired - Fee Related
- 1994-10-28 KR KR1019940027993A patent/KR100305952B1/ko not_active IP Right Cessation
- 1994-10-28 JP JP6265533A patent/JP3038123B2/ja not_active Expired - Fee Related
- 1994-10-28 CN CN94113776A patent/CN1090539C/zh not_active Expired - Fee Related
- 1994-10-31 US US08/332,113 patent/US5569497A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CA2134290C (fr) | 2002-01-01 |
DE69429150D1 (de) | 2002-01-03 |
ES2167350T3 (es) | 2002-05-16 |
EP0650772A1 (de) | 1995-05-03 |
US5569497A (en) | 1996-10-29 |
FR2711556B1 (fr) | 1995-12-15 |
CN1090539C (zh) | 2002-09-11 |
DE69429150T2 (de) | 2002-07-18 |
JP3038123B2 (ja) | 2000-05-08 |
JPH0820658A (ja) | 1996-01-23 |
FR2711556A1 (fr) | 1995-05-05 |
TW277006B (de) | 1996-06-01 |
KR950012637A (ko) | 1995-05-16 |
CN1110632A (zh) | 1995-10-25 |
KR100305952B1 (ko) | 2001-12-01 |
EP0650772B1 (de) | 2001-11-21 |
CA2134290A1 (fr) | 1995-04-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |