KR100262901B1 - 프로우브장치에 있어서의 침위치 고정방법 및 프로우브방법 - Google Patents

프로우브장치에 있어서의 침위치 고정방법 및 프로우브방법 Download PDF

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Publication number
KR100262901B1
KR100262901B1 KR1019940007944A KR19940007944A KR100262901B1 KR 100262901 B1 KR100262901 B1 KR 100262901B1 KR 1019940007944 A KR1019940007944 A KR 1019940007944A KR 19940007944 A KR19940007944 A KR 19940007944A KR 100262901 B1 KR100262901 B1 KR 100262901B1
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KR
South Korea
Prior art keywords
probe
needle
card
center
controller
Prior art date
Application number
KR1019940007944A
Other languages
English (en)
Korean (ko)
Inventor
마사오 야마구치
Original Assignee
히가시 데쓰로
동경엘렉트론주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 히가시 데쓰로, 동경엘렉트론주식회사 filed Critical 히가시 데쓰로
Application granted granted Critical
Publication of KR100262901B1 publication Critical patent/KR100262901B1/ko

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KR1019940007944A 1993-04-15 1994-04-15 프로우브장치에 있어서의 침위치 고정방법 및 프로우브방법 KR100262901B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP11223793 1993-04-15
JP93-112237 1993-04-15
JP5526094A JPH06349910A (ja) 1993-04-15 1994-02-28 プローブカードの針位置合わせ方法
JP94-55260 1994-02-28

Publications (1)

Publication Number Publication Date
KR100262901B1 true KR100262901B1 (ko) 2000-09-01

Family

ID=26396151

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940007944A KR100262901B1 (ko) 1993-04-15 1994-04-15 프로우브장치에 있어서의 침위치 고정방법 및 프로우브방법

Country Status (2)

Country Link
JP (1) JPH06349910A (ja)
KR (1) KR100262901B1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101438098B1 (ko) 2014-03-20 2014-09-12 피앤티솔루션 주식회사 연성 인쇄회로기판의 프로브카드 얼라인장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113805025A (zh) * 2020-06-01 2021-12-17 均豪精密工业股份有限公司 光电检测系统与检测晶粒方法
JP2022126085A (ja) 2021-02-18 2022-08-30 東京エレクトロン株式会社 検査装置のセットアップ方法及び検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101438098B1 (ko) 2014-03-20 2014-09-12 피앤티솔루션 주식회사 연성 인쇄회로기판의 프로브카드 얼라인장치

Also Published As

Publication number Publication date
JPH06349910A (ja) 1994-12-22

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