KR100262901B1 - 프로우브장치에 있어서의 침위치 고정방법 및 프로우브방법 - Google Patents
프로우브장치에 있어서의 침위치 고정방법 및 프로우브방법 Download PDFInfo
- Publication number
- KR100262901B1 KR100262901B1 KR1019940007944A KR19940007944A KR100262901B1 KR 100262901 B1 KR100262901 B1 KR 100262901B1 KR 1019940007944 A KR1019940007944 A KR 1019940007944A KR 19940007944 A KR19940007944 A KR 19940007944A KR 100262901 B1 KR100262901 B1 KR 100262901B1
- Authority
- KR
- South Korea
- Prior art keywords
- probe
- needle
- card
- center
- controller
- Prior art date
Links
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11223793 | 1993-04-15 | ||
JP93-112237 | 1993-04-15 | ||
JP5526094A JPH06349910A (ja) | 1993-04-15 | 1994-02-28 | プローブカードの針位置合わせ方法 |
JP94-55260 | 1994-02-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100262901B1 true KR100262901B1 (ko) | 2000-09-01 |
Family
ID=26396151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940007944A KR100262901B1 (ko) | 1993-04-15 | 1994-04-15 | 프로우브장치에 있어서의 침위치 고정방법 및 프로우브방법 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH06349910A (ja) |
KR (1) | KR100262901B1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101438098B1 (ko) | 2014-03-20 | 2014-09-12 | 피앤티솔루션 주식회사 | 연성 인쇄회로기판의 프로브카드 얼라인장치 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113805025A (zh) * | 2020-06-01 | 2021-12-17 | 均豪精密工业股份有限公司 | 光电检测系统与检测晶粒方法 |
JP2022126085A (ja) | 2021-02-18 | 2022-08-30 | 東京エレクトロン株式会社 | 検査装置のセットアップ方法及び検査装置 |
-
1994
- 1994-02-28 JP JP5526094A patent/JPH06349910A/ja active Pending
- 1994-04-15 KR KR1019940007944A patent/KR100262901B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101438098B1 (ko) | 2014-03-20 | 2014-09-12 | 피앤티솔루션 주식회사 | 연성 인쇄회로기판의 프로브카드 얼라인장치 |
Also Published As
Publication number | Publication date |
---|---|
JPH06349910A (ja) | 1994-12-22 |
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