KR100236272B1 - 클린룸용 보관고 - Google Patents

클린룸용 보관고 Download PDF

Info

Publication number
KR100236272B1
KR100236272B1 KR1019930000636A KR930000636A KR100236272B1 KR 100236272 B1 KR100236272 B1 KR 100236272B1 KR 1019930000636 A KR1019930000636 A KR 1019930000636A KR 930000636 A KR930000636 A KR 930000636A KR 100236272 B1 KR100236272 B1 KR 100236272B1
Authority
KR
South Korea
Prior art keywords
storage
container
lid
wafer
unit
Prior art date
Application number
KR1019930000636A
Other languages
English (en)
Korean (ko)
Other versions
KR930016325A (ko
Inventor
히또시 가와노
앗쯔시 오꾸노
마사노리 쯔다
미쯔히로 하야시
뎃베이 야마시따
마사나오 무라다
쯔요시 다나까
데루야 모리따
아끼오 나까무라
Original Assignee
이노마다 시게오
신코덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이노마다 시게오, 신코덴키 가부시키가이샤 filed Critical 이노마다 시게오
Publication of KR930016325A publication Critical patent/KR930016325A/ko
Application granted granted Critical
Publication of KR100236272B1 publication Critical patent/KR100236272B1/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1019930000636A 1992-01-21 1993-01-20 클린룸용 보관고 KR100236272B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP92-8663 1992-01-21
JP4008663A JP2982461B2 (ja) 1992-01-21 1992-01-21 クリーンルーム用保管庫

Publications (2)

Publication Number Publication Date
KR930016325A KR930016325A (ko) 1993-08-26
KR100236272B1 true KR100236272B1 (ko) 1999-12-15

Family

ID=11699175

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930000636A KR100236272B1 (ko) 1992-01-21 1993-01-20 클린룸용 보관고

Country Status (3)

Country Link
JP (1) JP2982461B2 (cs)
KR (1) KR100236272B1 (cs)
TW (1) TW227546B (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474572B1 (ko) * 2006-06-19 2014-12-18 엔테그리스, 아이엔씨. 레티클 스토리지 정화시스템

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3519212B2 (ja) * 1995-06-13 2004-04-12 高砂熱学工業株式会社 清浄な資材用保管庫
JP5236518B2 (ja) * 2009-02-03 2013-07-17 株式会社ダン・タクマ 保管システムおよび保管方法
JP5440871B2 (ja) 2010-08-20 2014-03-12 株式会社ダイフク 容器保管設備
JP5716968B2 (ja) * 2012-01-04 2015-05-13 株式会社ダイフク 物品保管設備
JP6106501B2 (ja) * 2013-04-12 2017-04-05 東京エレクトロン株式会社 収納容器内の雰囲気管理方法
CN111365957B (zh) * 2020-04-16 2023-05-09 重庆电力高等专科学校 镀铬管清洗烘干生产线
CN115649719B (zh) * 2022-12-13 2023-03-10 中科摩通(常州)智能制造股份有限公司 一种智能仓储巷道机器人及其智能仓储系统
EP4443236A1 (en) * 2023-04-05 2024-10-09 Brooks Automation (Germany) GmbH Stocker compartment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036205A (ja) * 1983-08-08 1985-02-25 Hitachi Ltd 収納装置
JPS63262310A (ja) * 1986-12-27 1988-10-28 Shinkawa Ltd キユア用ワーク収納箱

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6036205A (ja) * 1983-08-08 1985-02-25 Hitachi Ltd 収納装置
JPS63262310A (ja) * 1986-12-27 1988-10-28 Shinkawa Ltd キユア用ワーク収納箱

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474572B1 (ko) * 2006-06-19 2014-12-18 엔테그리스, 아이엔씨. 레티클 스토리지 정화시스템

Also Published As

Publication number Publication date
JP2982461B2 (ja) 1999-11-22
TW227546B (cs) 1994-08-01
KR930016325A (ko) 1993-08-26
JPH06156622A (ja) 1994-06-03

Similar Documents

Publication Publication Date Title
US5363867A (en) Article storage house in a clean room
KR100221983B1 (ko) 처리장치
US6231290B1 (en) Processing method and processing unit for substrate
US5697750A (en) Controlled environment enclosure and mechanical interface
EP2717306B1 (en) Load port apparatus, carrier system, and container conveyance method
KR100932961B1 (ko) 기판 처리 장치 및 반도체 장치의 제조 방법
KR100406337B1 (ko) 기판이송및처리시스템
US5746008A (en) Electronic substrate processing system using portable closed containers
US5621982A (en) Electronic substrate processing system using portable closed containers and its equipments
EP0497281B1 (en) Wafer airtight keeping unit
US5433574A (en) Gas purge unit for a portable container
JPH05286567A (ja) クリーンルーム用密閉式コンテナ
KR20080012116A (ko) 클린 스토커와 물품의 보관방법
KR100236272B1 (ko) 클린룸용 보관고
KR100236273B1 (ko) 클린룸용 보관고
JPH07297257A (ja) 処理装置
KR100396468B1 (ko) 공기 샘플링 캐리어와 공기 분석장치 및 방법
JP7457741B2 (ja) レチクル保管ポッド及びレチクル保持方法
EP1088338A1 (en) ARRANGEMENT FOR STORING OBJECTS, PARTICULARLY FOR STORING DISKLIKE OBJECTS SUCH AS WAFERS, FLAT PANELS OR CDs
JP3769425B2 (ja) 電子部品の製造装置および電子部品の製造方法
KR20090118632A (ko) 멀티 챔버 방식의 기판 처리 장치 및 방법
EP0818806A2 (en) Method and apparatus for transporting and using a semiconductor substrate carrier
US11195735B2 (en) Load lock for a substrate container and device having such a load lock
JP3666636B2 (ja) 基板の処理装置
CN111573091A (zh) 物品保管设备

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20110823

Year of fee payment: 13

LAPS Lapse due to unpaid annual fee