KR100221765B1 - 필드 갱신용 변형가능한 미러 디바이스 및 필드 어드레싱 방법 - Google Patents

필드 갱신용 변형가능한 미러 디바이스 및 필드 어드레싱 방법 Download PDF

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KR100221765B1
KR100221765B1 KR1019910010932A KR910010932A KR100221765B1 KR 100221765 B1 KR100221765 B1 KR 100221765B1 KR 1019910010932 A KR1019910010932 A KR 1019910010932A KR 910010932 A KR910010932 A KR 910010932A KR 100221765 B1 KR100221765 B1 KR 100221765B1
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래리제이.혼벡
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윌리엄 비. 켐플러
텍사스 인스트루먼츠 인코포레이티드
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    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/346—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on modulation of the reflection angle, e.g. micromirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00—Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/10—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical
    • H04N3/12—Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical by switched stationary formation of lamps, photocells or light relays
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2310/00—Command of the display device
    • G09G2310/06—Details of flat display driving waveforms
    • G09G2310/061—Details of flat display driving waveforms for resetting or blanking
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/2007—Display of intermediate tones
    • G09G3/2014—Display of intermediate tones by modulation of the duration of a single pulse during which the logic level remains constant
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/2007—Display of intermediate tones
    • G09G3/2018—Display of intermediate tones by time modulation using two or more time intervals
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/2007—Display of intermediate tones
    • G09G3/2018—Display of intermediate tones by time modulation using two or more time intervals
    • G09G3/2022—Display of intermediate tones by time modulation using two or more time intervals using sub-frames

Abstract

고선명 텔레비젼(HDTV; 82)의 응용에 사용된 쌍안정 변형가능한 미러 디바이스 회로(DMD; 83)은 펄스 폭 변조를 이용하여 최소한 128개의 그레이 레벨을 지원할 수 있다. DMD가 라인-갱신되면, 각 라인마다 한번씩 공진 리셋을 실행하는데 필요한 시간때문에 128개의 그레이 레벨을 지원하기 위한 최소 필드 타임이 달성될 수 없다. 본 명세서는 필요한 필드 타임을 최소로 하기 위해 어떻게 DMD가 필드 갱신될 수 있는지를 제시한다.

Description

필드 갱신용 변형가능한 미러 디바이스 및 필드 어드레싱 방법
제1a도 및 제1b도는 128개의 그레이 레벨을 달성하기 위해 프레임-타임을 필드로 분할하는 두가지 기술을 도시한 도면.
제2도는 라인-갱신을 위한 쌍안정 DMD의 타이밍도.
제3도는 리셋 펄스 부근에서 제2도의 타임 확장 부분의 타이밍도.
제4도 및 제5도는 여러가지 바이어스와 어드레스 전압에 관한 에너지도.
제6도는 필드-갱신을 위한 쌍안정 DMD의 타이밍도.
제7도는 두가지 상태의 스캔 동작을 도시한 도면.
제8도는 본 발명의 개념을 사용하는 HDTV 시스템을 도시한 도면.
* 도면의 주요부분에 대한 부호의 설명
80 : 수신 신호 81 : HDTV
82 : 투사 스크린 83 : 송신기/안테나
200 : 비임
본 발명은 변형가능한 미러 디바이스에 관한 것으로, 특히 DMD 어레이를 필드 갱신하기 위한 장치에 관한 것이다.
다음의 특허 출원 모두는 서로 교차 참조되어 있으며, 텍사스 인스트루먼츠 인코포레이트드사에 모두 양도되었다. 이 특허 출원들은 동시에 출원되었으며 본 특허 출원에 참고로 인용되어 있다.
출원인 사건 번호
T1-14568 다중-레벨 변형가능한 미러 디바이스
T1-14643 개량된 쌍안정 DMD 어드레싱 회로 및 방법
T1-14649 제어 회로 기판과 DMD를 통합하기 위한 개량된 구조 및 방법
T1-14715 필드 갱신용 변형가능한 미러 디바이스
또한 본 명세서에 참고로 인용된 특허출원 및 특허는 다음과 같다.
T1-13173A "공간 광 변조기", 1989년 5월 15일 미합중국 특허출원 제355,049호;
T1-14481 "공간 광 변조기 및 방법", 1989년 9월 14일 미합중국 특허 출원 제408,355호;
미합중국 특허 제4,662,746호 "공간 광 변조기 및 방법', 1987년 5월 5일자 허여;
미합중국 특허 제4,566,935호 "공간 광 변조기 및 방법', 1986년 1월 28일자 허여 및
미합중국 특허 제4,615,595호 "프레임 어드레스 공간 광 변조기", 1986년 10월 7일자 허여.
쌍안정 변형가능한 미러 디바이스(DMD)는 "공간 광 변조기"라는 명칭으로 출원된 상기한 미합중국 특허 출원(T1-13173A)에 기재되어 있다. 예를 들어, 고선명 텔레비젼(HDTV)의 투광 밸브와 같은 디바이스에는 다수의 용도가 있다. 이특허 출원서에 기재된 디바이스는 최소한 128개의 그레이 레벨을 지원할 수 있어야 한다. 쌍안정 DMD가 2진 디바이스이기 때문에, 그레이 레벨은 펄스 폭 변조에 의해 달성된다.
펄스 폭 변조에는 두가지 방법이 있다. 제1의 방법은 비디오 프레임 기간 f를 128개의 동일한 시간 간격 또는 필드로 분할하는 것이다. 각 필드 동안, 어레이 내의 모든 픽셀들은 두가지 상태, 즉 포지티브 랜딩 각(landing angle; on) 또는 네가티브 랜딩 각(off)들 중 한가지로 어드레스된다.
제2의 방법은 각각 선행 시간 간격의 2배수로 되는 7개의 시간 간격의 조합으로서 128개의 동일한 시간 간격을 나타내는 것이다. 7개의 시간 간격은 f/128은 260㎲이다. 이 260㎲의 기간 동안, DMD의 1050개 라인들은 한번에 1라인씩 갱신되어야 한다. 하부의 525개 라인들이 상부의 525개 라인들과 병행하여 어드레스되면, 각 라인을 갱신하는데 필요한 시간은 260㎲/525=0.5㎲로 된다.
0.5㎲ 만큼 짧은 기간 내에 DMD를 라인-갱신하는 것은 현재로는 불가능한데, 그 이유는 공진 리셋이 각 라인을 갱신하기 이전에 변형가능한 비임에 인가되어야 하기 때문이다. 이 공진 리셋은 차동 바이어스가 재인가되기 전인 12㎲( 2 1
따라서, 교번의 갱신 방법이 TV 프레임 속도로 실행되고 128개의 그레이 레벨을 지원하는 DMD에 사용되어야만 한다.
필드 갱신 기술의 응용이 비디오 필드 당 단일 공진 리셋만을 필요로 하게 할 수 있도록 쌍안정 DMD의 전기 기계적 래칭 특성을 사용함으로써 상기 문제점을 해결할 수 있다. 이 기술을 사용하면, 128개의 그레이 레벨이 용이하게 지원될 수 있다.
라인 갱신시에, 소정의 열 내에 있는 모든 어드레스 전극 상의 전압은 트랜지스터 게이트 펄스의 인가와 동시에 변한다. 게이트 펄스의 인가 바로 전에 공진 리셋이 DMD 어레이 내의 모든 픽셀 상에서 실행된다. 리셋 후에, 소정 라인의 외부의 모든 픽셀은 원래의 랜딩 각으로 복귀된다. 소정 라인 내의 픽셀들은 그 라인에 대해 갱신된 랜딩 각으로 회전한다. 공진 리셋이 각 라인-갱신 이전에 실행되지 않으면, 소정의 픽셀들이 고정될 것이며 새로운 랜딩 각으로는 자유롭게 회전하지 못할 것이다.
각 라인마다의 공진 리셋을 방지하기 위해 필드 갱신 기술이 사용되는데, 이 기술에 있어서 DMD는 비임이 이전의 랜딩 각으로 전자적으로 래치되어 인가되는 새로운 어드레스 전압에 응답하지 않는 모드로 작동딘다. 이러한 배치를 사용하면, 어드레스 전극들은 여전히 한번에 한 라인씩 갱신되지만, 비임의 랜딩 상태는 각 필드마다 한번씩 갱신된다.
이하, 첨부 도면을 참조하여 본 발명의 장점 및 실시예에 대해 더욱 상세하게 설명하겠다.
펄스 폭 변조에는 두가지 방법이 있다. 제1a도에 도시된 제1의 방법은 비디오 프레임 기간 f를 128개의 동일한 시간 간격 또는 필드로 분할하는 것이다. 각 필드동안, 어레이내의 모든 필셀들은 두가지 상태, 즉 포지티브 랜딩 각(on) 또는 네가티브 랜드 각(off)들 중 한가지로 어드레스된다.
제1b도에 있어서, 제2의 방법은 7개의 시간 간격의 조합으로서 128개의 동일한 기간으로 표현되는데, 각 기간은 이전 기간의 2배수이다. 7개의 시간 간격은 f/128의 배수들, 즉 1, 2, 4, 8, 16, 32 및 64일 것이다. 이 방법은 필요한 오프-칩 프레임 버퍼 메모리의 양을 최소화한다.
펄스 폭 변조를 달성하기 위한 라인 갱신 타이밍 시퀀스가 제2도에 도시되어 있다. DMD 어레이의 n번째 열 내의 모든 어드레스 전극 상의 전압은 트랜지스터 게이트 펄스 g(n)의 인가와 동시에 변한다. 게이트 펄스의 인가 바로 전에 공진리셋 펄스 r이 DMD 어레이 내의 모든 회전가능한 비임에 인가된다. 공진 리셋펄스는 제3도에 상세하게 도시되어 있는데, 여기에서 Vb는 차동 바이어스 레벨이고 Vr은 리셋 레벨이다. 리셋 펄스의 목적은 제7도의 랜딩 패드(405)와 접촉하는 랜딩 지점으로부터 비임(200)(제7도)를 단절시키기 위한 것이다. 리셋 펄스 트레인의 주파수는 원래의 기계적 공진 주파수가 되도록 선택된다. 리셋 후에, 소정 라인의 외부의 모든 픽셀들은 원래의 랜딩 각으로 복원된다. 소정 라인 내의 픽셀들은 그 라인에 대해 갱신된 랜딩 각으로 회전한다. 공진 리셋이 각 라인 갱신 이전에 실행되지 않으면, 소정의 픽셀들이 고정될 것이며, 새로운 랜딩 각으로 자유롭게 회전하지 못할 것이다.
각 라인마다의 공진 리셋을 방지하기 위해, DMD는 비임이 이전 랜딩 각으로 전자적으로 래치되어 인가되는 새로운 어드레스 전압에 응답하지 않는 모드로 작동된다. 이러한 배치를 사용하면, 어드레스 전극들은 여전히 한번에 한 라인씩 갱신되지만, 비임의 랜딩 상태는 각 필드마다 한번씩 갱신된다.
제4도에 도시된 바와 같이, 비임의 전기 기계적 래칭은 삼안정(tristable)임계 레벨 이상인 차동 바이어스 Vb를 인가함으로써 달성된다. 삼안정 임계 레벨 이상의 차동 바이어스 레벨의 경우, 극미한 포텐셜 에너지는 2개의 랜딩 각 θ=±θL로서 발생된다. 비임이 랜딩 각 중의 한 랜딩 각으로 어드레스될 때, 차동 바이어스가 제거될 때까지(전기 기계적으로 래치된) 랜딩 각으로 포텐셜 에너지 웰내에서 트랩된다.
전기 기계적 래칭은 제5도에 도시되어 있다. 여기에서, 포텐셜 에너지는 쌍안점 임계 레벨 이상인 차동 바이어스 레벨 Vb로 도시되어 있다. 네가티브 랜딩 각으로 어드레스된 비임의 경우, 비임은 포지티브 어드레스 전극 상에 어드레스 전압 a가 존재하더라도 네가티브 랜등 각으로 포텐셜 에너지 웰에서 트랩핑된 상태로 유지된다.
필드 갱신을 위한 타이밍 시퀀스가 제6도에 도시되어 있다. 비임(200)(제7도)에 인가된 차동 바이어스 레벨은 전기 기계적 래칭을 확실히 할 만큼 충분히 크다. 각 비디오 필드의 개시시에 공진 리셋이 어레이 내에 있는 모든 비임 상에서 실행된다. 그 다음, 차동 바이어스가 인가되며, 비임이 어드레스 전극 전압에 응답하고 랜딩 각으로 회전하여 그곳에서 래칭된다. 그 다음, 어드레스 전극 전압은 라인 당 0.5㎲의 요구된 라인 속도로 한번에 한 라인씩 갱신된다. 이 시간동안, 비임은 이전 필드의 랜딩 각으로 래칭된 상태로 유지된다. 어레이 내에 있는 모든 어드레스 전극 라인들이 갱신되었을 때 새로운 랜딩 각으로 비임을 래칭하기 위해 공진 리셋이 실행되고 차동 바이어스가 재인가된다.
필드 갱신은 두가지 장점을 갖는다. 첫째, 더 짧은 필드 타임이 달성되어 더 많은 그레이 쉐이드 레벨들이 디스플레이될 수 있다. 둘째, 랜딩 횟수가 어레이(525) 내의 라인수의 1/2과 동일한 인수만큼 감소되어 더 긴 작동 수명을 보장한다.
제8도는 HDTV(81)에 의해 수신된 신호(80)을 송신하는 송신기/안테나(83)을 갖춘 HDTV 시스템을 도시한 것이다. 픽셀 어레이는 투사 스크린(82) 상에 영상을 형성하는데 사용된다.
지금까지, 상기 특정 실시에에 관련하여 설명하였지만, 본 발명의 범위를 제한하고자 하는 것은 아니다. 본 분야에 숙련된 기술자들이면 상술하 설명에 관련하여 본 발명의 실시예 및 선택적인 실시에를 여러가지로 변형시킬 수 있다. 그러므로, 이러한 변형은 첨부된 특허 청구의 범위 내에서만 제한된다.

Claims (7)

  1. 인가된 바이어스 전압 및 선택적인 어드레스 전압을 갖는 전기 기계적 픽셀의 어레이를 필드 어드레싱하는 방법에 있어서, 선택적인 어드레스 전압을 상기 어레이내의 상기 모든 픽셀에 순차적으로 인가시키는 단계, 상기 픽셀들을 이전에 어드레싱된 상태로부터 전기 기계적으로 비래칭시키기 위해 상기 어레이의 상기 모든 픽셀로부터 상기 바이어스 전압을 제거하는 단계, 상기 모든 픽셀들이 새로이 인가된 어드레스 전압에 따라 기계적 위치들을 취할 수 있도록 리셋 전압을 상기 어레이의 상기 모든 픽셀들에 인가시키는 단계, 및 상기 픽셀들을 전기 기계적으로 래칭시키기 위해 상기 바이어스 전압을 상기 모든 픽셀에 재인가시키는 단계를 포함하는 것을 특징으로 하는 필드 어드레싱 방법.
  2. 제1항에 있어서, 상기 리셋 전압이 기계적인 공진 펄스 트레인인 것을 특징으로 하는 필드 어드레싱 방법.
  3. 제2항에 있어서, 상기 공진 펄스를 상기 픽셀의 공진 전기 기계적 주파수로 선택하는 단계를 더 포함하는 것을 특징으로 하는 필드 어드레싱 방법.
  4. 새로운 어드레스 정보에 따라 픽셀의 모든 상태를 동시에 변경시키고 상기 픽셀에 바이어스 전압 및 선택적인 어드레스 전압이 인가되는 전기 기계적 픽셀의 전체 어레이를 어드레스하기 위한 시스템에 있어서, 선택적인 어드레스 전압을 상기 어레이 내의 상기 모든 픽셀에 순차적으로 인가시키기 위한 회로, 상기 픽셀들을 이전에 어드레스된 상태로부터 전기 기계적으로 비래칭시키기 위해 상기 어레이의 상기 모든 픽셀들로부터 상기 바이어스 전압을 제거하기 위한 회로, 상기 모든 픽셀들이 새로이 인가된 어드레스 전압에 따라 기계적 위치를 취할 수 있도록 리셋 전압을 상기 어레이의 상기 모든 픽셀들에 인가시키기 위한 회로, 및 상기 픽셀들을 전기 기게적으로 래칭시키기 위해 상기 바이어스 전압을 상기 모든 픽셀에 재인가시키기 위한 회로를 포함하는 것을 특징으로 하는 시스템.
  5. 제4항에 있어서, 상기 리셋 전압이 기계적 공진 펄스 트레인인 것을 특징으로 하는 시스템.
  6. 제4항에 있어서, 상기 픽셀들이 DMD 디바이스인 것을 특징으로 하는 시스템.
  7. 제4항에 있어서, HDTV 시스템을 더 포함하고, 상기 픽셀의 어레이가 상기 HDTV 시스템의 그래픽인 것을 특징으로 하는 시스템.
KR1019910010932A 1990-06-29 1991-06-28 필드 갱신용 변형가능한 미러 디바이스 및 필드 어드레싱 방법 KR100221765B1 (ko)

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US5280277A (en) 1994-01-18
EP0467048A3 (en) 1992-12-09
JP2866755B2 (ja) 1999-03-08
JPH05158426A (ja) 1993-06-25
EP0467048A2 (en) 1992-01-22
DE69113150D1 (de) 1995-10-26
EP0467048B1 (en) 1995-09-20
DE69113150T2 (de) 1996-04-04

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