KR100200480B1 - 불량 분석 피드백에 의한 반도체 제조공정 제어방법 - Google Patents

불량 분석 피드백에 의한 반도체 제조공정 제어방법 Download PDF

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Publication number
KR100200480B1
KR100200480B1 KR1019950053372A KR19950053372A KR100200480B1 KR 100200480 B1 KR100200480 B1 KR 100200480B1 KR 1019950053372 A KR1019950053372 A KR 1019950053372A KR 19950053372 A KR19950053372 A KR 19950053372A KR 100200480 B1 KR100200480 B1 KR 100200480B1
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KR
South Korea
Prior art keywords
equipment
abnormal
yield
lot
process conditions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019950053372A
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English (en)
Korean (ko)
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KR970053238A (ko
Inventor
이민호
Original Assignee
윤종용
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 윤종용, 삼성전자주식회사 filed Critical 윤종용
Priority to KR1019950053372A priority Critical patent/KR100200480B1/ko
Priority to TW085109747A priority patent/TW314646B/zh
Priority to JP8228950A priority patent/JPH09180976A/ja
Priority to US08/759,424 priority patent/US5923553A/en
Publication of KR970053238A publication Critical patent/KR970053238A/ko
Application granted granted Critical
Publication of KR100200480B1 publication Critical patent/KR100200480B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31426—Real time database management for production control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32209—Stop production line
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32221—Correlation between defect and measured parameters to find origin of defect
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • General Factory Administration (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Control By Computers (AREA)
KR1019950053372A 1995-12-21 1995-12-21 불량 분석 피드백에 의한 반도체 제조공정 제어방법 Expired - Fee Related KR100200480B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019950053372A KR100200480B1 (ko) 1995-12-21 1995-12-21 불량 분석 피드백에 의한 반도체 제조공정 제어방법
TW085109747A TW314646B (enExample) 1995-12-21 1996-08-12
JP8228950A JPH09180976A (ja) 1995-12-21 1996-08-29 不良分析のフィードバックによる半導体製造工程の制御方法
US08/759,424 US5923553A (en) 1995-12-21 1996-10-05 Method for controlling a semiconductor manufacturing process by failure analysis feedback

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950053372A KR100200480B1 (ko) 1995-12-21 1995-12-21 불량 분석 피드백에 의한 반도체 제조공정 제어방법

Publications (2)

Publication Number Publication Date
KR970053238A KR970053238A (ko) 1997-07-31
KR100200480B1 true KR100200480B1 (ko) 1999-10-01

Family

ID=19442322

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950053372A Expired - Fee Related KR100200480B1 (ko) 1995-12-21 1995-12-21 불량 분석 피드백에 의한 반도체 제조공정 제어방법

Country Status (4)

Country Link
US (1) US5923553A (enExample)
JP (1) JPH09180976A (enExample)
KR (1) KR100200480B1 (enExample)
TW (1) TW314646B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100773350B1 (ko) 2006-08-29 2007-11-05 삼성전자주식회사 설비의 이상패턴 규명을 위한 기준정보형성방법 및 이를이용한 반도체 제조설비의 모니터링 방법
KR20190081663A (ko) * 2017-12-29 2019-07-09 비컴솔루션 주식회사 패턴인식에 의한 공정 이상 감지 시스템 및 그 방법

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US6154714A (en) * 1997-11-17 2000-11-28 Heuristic Physics Laboratories Method for using wafer navigation to reduce testing times of integrated circuit wafers
KR100319208B1 (ko) * 1998-01-14 2002-03-21 윤종용 반도체제조설비관리시스템의설비사전예방유지의주기관리방법
KR100278600B1 (ko) * 1998-01-14 2001-01-15 윤종용 반도체 제조설비 관리시스템의 설비유닛의 상태 관리방법
KR100269941B1 (ko) * 1998-01-14 2001-01-15 윤종용 반도체 제조설비 관리시스템에서 설비의 비상상태관리방법
KR100269942B1 (ko) * 1998-02-03 2000-10-16 윤종용 반도체제조설비관리방법
JP3739201B2 (ja) * 1998-03-06 2006-01-25 富士通株式会社 半導体チップの相関解析方法及び装置、半導体チップ歩留まり調整方法並びに記憶媒体
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KR100303321B1 (ko) 1999-05-20 2001-09-26 박종섭 반도체 라인 자동화 시스템에서의 오류발생 로트 제어 장치 및그 방법
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US6792386B2 (en) * 2001-12-28 2004-09-14 Texas Instruments Incorporated Method and system for statistical comparison of a plurality of testers
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US6778873B1 (en) * 2002-07-31 2004-08-17 Advanced Micro Devices, Inc. Identifying a cause of a fault based on a process controller output
KR20050026099A (ko) 2002-08-01 2005-03-14 어플라이드 머티어리얼즈 인코포레이티드 고급 처리 제어 시스템 내의 부정확한 계측 데이터의 취급방법, 시스템 및 매체
US7117057B1 (en) 2002-09-10 2006-10-03 Taiwan Semiconductor Manufacturing Co. Ltd. Yield patrolling system
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JP6860406B2 (ja) * 2017-04-05 2021-04-14 株式会社荏原製作所 半導体製造装置、半導体製造装置の故障予知方法、および半導体製造装置の故障予知プログラム
KR102006357B1 (ko) * 2017-05-10 2019-10-08 주식회사 유비덤 품질개선을 위한 스마트 바스켓 시스템 및 방법
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KR100773350B1 (ko) 2006-08-29 2007-11-05 삼성전자주식회사 설비의 이상패턴 규명을 위한 기준정보형성방법 및 이를이용한 반도체 제조설비의 모니터링 방법
US7707471B2 (en) 2006-08-29 2010-04-27 Samsung Electronics Co., Ltd. Method of defining fault pattern of equipment and method of monitoring equipment using the same
KR20190081663A (ko) * 2017-12-29 2019-07-09 비컴솔루션 주식회사 패턴인식에 의한 공정 이상 감지 시스템 및 그 방법
KR102489762B1 (ko) 2017-12-29 2023-01-18 비컴솔루션 주식회사 패턴인식에 의한 공정 이상 감지 시스템 및 그 방법

Also Published As

Publication number Publication date
KR970053238A (ko) 1997-07-31
JPH09180976A (ja) 1997-07-11
TW314646B (enExample) 1997-09-01
US5923553A (en) 1999-07-13

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