KR0164614B1 - 박막형성방법 - Google Patents
박막형성방법 Download PDFInfo
- Publication number
- KR0164614B1 KR0164614B1 KR1019930007194A KR930007194A KR0164614B1 KR 0164614 B1 KR0164614 B1 KR 0164614B1 KR 1019930007194 A KR1019930007194 A KR 1019930007194A KR 930007194 A KR930007194 A KR 930007194A KR 0164614 B1 KR0164614 B1 KR 0164614B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- aluminum
- hydrogen
- thin film
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/047—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
-
- H10P14/432—
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Health & Medical Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Toxicology (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Semiconductor Memories (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP92-136042 | 1992-04-28 | ||
| JP4136042A JP3048749B2 (ja) | 1992-04-28 | 1992-04-28 | 薄膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR930022602A KR930022602A (ko) | 1993-11-24 |
| KR0164614B1 true KR0164614B1 (ko) | 1999-02-01 |
Family
ID=15165822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019930007194A Expired - Lifetime KR0164614B1 (ko) | 1992-04-28 | 1993-04-28 | 박막형성방법 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5604153A (cg-RX-API-DMAC10.html) |
| EP (1) | EP0567985B1 (cg-RX-API-DMAC10.html) |
| JP (1) | JP3048749B2 (cg-RX-API-DMAC10.html) |
| KR (1) | KR0164614B1 (cg-RX-API-DMAC10.html) |
| AT (1) | ATE207241T1 (cg-RX-API-DMAC10.html) |
| DE (1) | DE69330921T2 (cg-RX-API-DMAC10.html) |
| MY (1) | MY112082A (cg-RX-API-DMAC10.html) |
| TW (1) | TW228603B (cg-RX-API-DMAC10.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170104936A (ko) * | 2016-03-08 | 2017-09-18 | 에이에스엠 아이피 홀딩 비.브이. | 금속 규화물들의 선택적 형성 |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5780362A (en) * | 1996-06-04 | 1998-07-14 | Wang; Qingfeng | CoSi2 salicide method |
| JP3917698B2 (ja) * | 1996-12-12 | 2007-05-23 | 株式会社半導体エネルギー研究所 | レーザーアニール方法およびレーザーアニール装置 |
| FR2757881B1 (fr) * | 1996-12-31 | 1999-04-09 | Univ Paris Curie | Procede de traitement d'une surface d'un semi-conducteur, dispositif correspondant et semi-conducteur associe |
| JP3399814B2 (ja) | 1997-11-27 | 2003-04-21 | 科学技術振興事業団 | 微細突起構造体の製造方法 |
| US6273099B1 (en) * | 1998-07-01 | 2001-08-14 | Taiwan Semiconductor Manufacturing Company | Simplified method for cleaning silicon wafers after application of laser marks |
| AU8159501A (en) * | 2000-08-30 | 2002-03-13 | Unisearch Ltd | Single molecule array on silicon substrate for quantum computer |
| AUPQ975900A0 (en) | 2000-08-30 | 2000-09-21 | Unisearch Limited | A process for the fabrication of a quantum computer |
| KR100396891B1 (ko) * | 2001-03-21 | 2003-09-03 | 삼성전자주식회사 | 반도체 소자의 금속 배선 형성 방법 |
| US6855584B2 (en) * | 2001-03-29 | 2005-02-15 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
| US7253032B2 (en) | 2001-04-20 | 2007-08-07 | Semiconductor Energy Laboratory Co., Ltd. | Method of flattening a crystallized semiconductor film surface by using a plate |
| JP4854866B2 (ja) * | 2001-04-27 | 2012-01-18 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US6787460B2 (en) * | 2002-01-14 | 2004-09-07 | Samsung Electronics Co., Ltd. | Methods of forming metal layers in integrated circuit devices using selective deposition on edges of recesses and conductive contacts so formed |
| KR100455382B1 (ko) * | 2002-03-12 | 2004-11-06 | 삼성전자주식회사 | 듀얼 다마신 구조를 가지는 반도체 소자의 금속 배선 형성방법 |
| US20070117287A1 (en) * | 2005-11-23 | 2007-05-24 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus |
| US9112003B2 (en) | 2011-12-09 | 2015-08-18 | Asm International N.V. | Selective formation of metallic films on metallic surfaces |
| TWI686499B (zh) | 2014-02-04 | 2020-03-01 | 荷蘭商Ａｓｍ Ｉｐ控股公司 | 金屬、金屬氧化物與介電質的選擇性沉積 |
| US10047435B2 (en) | 2014-04-16 | 2018-08-14 | Asm Ip Holding B.V. | Dual selective deposition |
| US9490145B2 (en) | 2015-02-23 | 2016-11-08 | Asm Ip Holding B.V. | Removal of surface passivation |
| US10428421B2 (en) | 2015-08-03 | 2019-10-01 | Asm Ip Holding B.V. | Selective deposition on metal or metallic surfaces relative to dielectric surfaces |
| US10566185B2 (en) | 2015-08-05 | 2020-02-18 | Asm Ip Holding B.V. | Selective deposition of aluminum and nitrogen containing material |
| US10121699B2 (en) | 2015-08-05 | 2018-11-06 | Asm Ip Holding B.V. | Selective deposition of aluminum and nitrogen containing material |
| US10814349B2 (en) | 2015-10-09 | 2020-10-27 | Asm Ip Holding B.V. | Vapor phase deposition of organic films |
| US10695794B2 (en) | 2015-10-09 | 2020-06-30 | Asm Ip Holding B.V. | Vapor phase deposition of organic films |
| US11081342B2 (en) | 2016-05-05 | 2021-08-03 | Asm Ip Holding B.V. | Selective deposition using hydrophobic precursors |
| US10453701B2 (en) | 2016-06-01 | 2019-10-22 | Asm Ip Holding B.V. | Deposition of organic films |
| US10373820B2 (en) | 2016-06-01 | 2019-08-06 | Asm Ip Holding B.V. | Deposition of organic films |
| US9803277B1 (en) | 2016-06-08 | 2017-10-31 | Asm Ip Holding B.V. | Reaction chamber passivation and selective deposition of metallic films |
| US11430656B2 (en) | 2016-11-29 | 2022-08-30 | Asm Ip Holding B.V. | Deposition of oxide thin films |
| US11094535B2 (en) | 2017-02-14 | 2021-08-17 | Asm Ip Holding B.V. | Selective passivation and selective deposition |
| US11501965B2 (en) | 2017-05-05 | 2022-11-15 | Asm Ip Holding B.V. | Plasma enhanced deposition processes for controlled formation of metal oxide thin films |
| US11170993B2 (en) | 2017-05-16 | 2021-11-09 | Asm Ip Holding B.V. | Selective PEALD of oxide on dielectric |
| US10900120B2 (en) | 2017-07-14 | 2021-01-26 | Asm Ip Holding B.V. | Passivation against vapor deposition |
| JP7146690B2 (ja) | 2018-05-02 | 2022-10-04 | エーエスエム アイピー ホールディング ビー．ブイ． | 堆積および除去を使用した選択的層形成 |
| US12482648B2 (en) | 2018-10-02 | 2025-11-25 | Asm Ip Holding B.V. | Selective passivation and selective deposition |
| JP2020056104A (ja) | 2018-10-02 | 2020-04-09 | エーエスエム アイピー ホールディング ビー．ブイ． | 選択的パッシベーションおよび選択的堆積 |
| US11965238B2 (en) | 2019-04-12 | 2024-04-23 | Asm Ip Holding B.V. | Selective deposition of metal oxides on metal surfaces |
| US11139163B2 (en) | 2019-10-31 | 2021-10-05 | Asm Ip Holding B.V. | Selective deposition of SiOC thin films |
| TWI865747B (zh) | 2020-03-30 | 2024-12-11 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | 在兩不同表面上同時選擇性沉積兩不同材料 |
| TWI862807B (zh) | 2020-03-30 | 2024-11-21 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | 相對於金屬表面在介電表面上之氧化矽的選擇性沉積 |
| TW202140832A (zh) | 2020-03-30 | 2021-11-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | 氧化矽在金屬表面上之選擇性沉積 |
| US11613807B2 (en) | 2020-07-29 | 2023-03-28 | The Curators Of The University Of Missouri | Area selective nanoscale-thin layer deposition via precise functional group lithography |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1595659A (en) * | 1978-05-25 | 1981-08-12 | Standard Telephones Cables Ltd | Providing conductive tracks on semiconductor devices |
| JPH0712015B2 (ja) * | 1988-11-18 | 1995-02-08 | 新技術事業団 | シリコン固体表面へのパターン形成法 |
| US5196372A (en) * | 1989-09-09 | 1993-03-23 | Canon Kabushiki Kaisha | Process for forming metal deposited film containing aluminum as main component by use of alkyl hydride |
| PT95232B (pt) * | 1989-09-09 | 1998-06-30 | Canon Kk | Processo de producao de uma pelicula de aluminio depositada |
| JP2721023B2 (ja) * | 1989-09-26 | 1998-03-04 | キヤノン株式会社 | 堆積膜形成法 |
| JP2726118B2 (ja) * | 1989-09-26 | 1998-03-11 | キヤノン株式会社 | 堆積膜形成法 |
| US5217756A (en) * | 1990-06-08 | 1993-06-08 | Nec Corporation | Selective chemical vapor deposition of aluminum, aluminum CVD materials and process for preparing the same |
| ATE174450T1 (de) * | 1990-07-06 | 1998-12-15 | Tsubochi Kazuo | Verfahren zur herstellung einer metallschicht |
-
1992
- 1992-04-28 JP JP4136042A patent/JP3048749B2/ja not_active Expired - Fee Related
-
1993
- 1993-04-22 TW TW082103084A patent/TW228603B/zh not_active IP Right Cessation
- 1993-04-27 AT AT93106784T patent/ATE207241T1/de not_active IP Right Cessation
- 1993-04-27 EP EP93106784A patent/EP0567985B1/en not_active Expired - Lifetime
- 1993-04-27 DE DE69330921T patent/DE69330921T2/de not_active Expired - Lifetime
- 1993-04-28 MY MYPI93000789A patent/MY112082A/en unknown
- 1993-04-28 KR KR1019930007194A patent/KR0164614B1/ko not_active Expired - Lifetime
-
1995
- 1995-06-07 US US08/487,580 patent/US5604153A/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170104936A (ko) * | 2016-03-08 | 2017-09-18 | 에이에스엠 아이피 홀딩 비.브이. | 금속 규화물들의 선택적 형성 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE69330921D1 (de) | 2001-11-22 |
| JPH0629220A (ja) | 1994-02-04 |
| EP0567985A2 (en) | 1993-11-03 |
| KR930022602A (ko) | 1993-11-24 |
| US5604153A (en) | 1997-02-18 |
| EP0567985A3 (en) | 1994-05-18 |
| JP3048749B2 (ja) | 2000-06-05 |
| MY112082A (en) | 2001-04-30 |
| ATE207241T1 (de) | 2001-11-15 |
| TW228603B (cg-RX-API-DMAC10.html) | 1994-08-21 |
| EP0567985B1 (en) | 2001-10-17 |
| DE69330921T2 (de) | 2002-04-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19930428 |
|
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 19930428 Comment text: Request for Examination of Application |
|
| PG1501 | Laying open of application | ||
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 19970220 Patent event code: PE09021S01D |
|
| E601 | Decision to refuse application | ||
| PE0601 | Decision on rejection of patent |
Patent event date: 19971029 Comment text: Decision to Refuse Application Patent event code: PE06012S01D Patent event date: 19970220 Comment text: Notification of reason for refusal Patent event code: PE06011S01I |
|
| J2X1 | Appeal (before the patent court) |
Free format text: APPEAL AGAINST DECISION TO DECLINE REFUSAL |
|
| PJ2001 | Appeal |
Appeal kind category: Appeal against decision to decline refusal Decision date: 19980709 Appeal identifier: 1998201000221 Request date: 19980131 |
|
| PB0901 | Examination by re-examination before a trial |
Comment text: Request for Trial against Decision on Refusal Patent event date: 19980131 Patent event code: PB09011R01I |
|
| B701 | Decision to grant | ||
| PB0701 | Decision of registration after re-examination before a trial |
Patent event date: 19980709 Comment text: Decision to Grant Registration Patent event code: PB07012S01D Patent event date: 19980706 Comment text: Transfer of Trial File for Re-examination before a Trial Patent event code: PB07011S01I |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 19980914 Patent event code: PR07011E01D |
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| PR1002 | Payment of registration fee |
Payment date: 19980914 End annual number: 3 Start annual number: 1 |
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