KR0130962Y1 - Megazine transfer system - Google Patents

Megazine transfer system Download PDF

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Publication number
KR0130962Y1
KR0130962Y1 KR2019950015735U KR19950015735U KR0130962Y1 KR 0130962 Y1 KR0130962 Y1 KR 0130962Y1 KR 2019950015735 U KR2019950015735 U KR 2019950015735U KR 19950015735 U KR19950015735 U KR 19950015735U KR 0130962 Y1 KR0130962 Y1 KR 0130962Y1
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South Korea
Prior art keywords
mega
magazine
packing
push
block
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KR2019950015735U
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Korean (ko)
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KR970003269U (en
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장정상
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김주용
현대전자산업주식회사
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Priority to KR2019950015735U priority Critical patent/KR0130962Y1/en
Publication of KR970003269U publication Critical patent/KR970003269U/en
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Publication of KR0130962Y1 publication Critical patent/KR0130962Y1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

메가진을 진공패드로 상면에서 흡착하는 메가진 블록; 메가진 블록을 상승하강시키는 상하이동수단; 및 상하이동수단의 가동단에 고정되어 메가진 블록을 180도 회전시키는 회전실린더를 포함하여 구성되며; 상기 메가진 블록 전후면에는 흡착력 다운시 자체 기동하여 메가진을 크램핑하는 스토퍼수단이, 좌우측에는 메가진의 좌우이동을 제한하는 경사면이 부가된 것을 특징으로 하는 메가진 이송장치이며, 회전실린더를 이용하여 180도 회전을 가능케하고, 자체 진공 흡착력을 상실하여도 스토퍼수단으로 메가진의 크램핑은 지속시켜 장치의 신뢰도를 높였으며, 메가진 회전시 요동을 막을 수 있도록 메가진 블록에 경사면을 두어 요동없이 회전을 신속히 처리할 수 있다.A mega block for adsorbing megazine from the upper surface with a vacuum pad; Shanghai East means for raising and lowering the mega block; And a rotating cylinder fixed to the movable end of the shandong means to rotate the mega block 180 degrees; The front and rear surfaces of the mega block is a stopper means for clamping the magazine by self-starting when the suction force is down, and the inclined surface for limiting the left and right movement of the magazine is added to the left and right sides, the use of a rotating cylinder It is possible to rotate 180 degrees, and the clamping of the magazine is continued by the stopper means even if the self-adsorbing force is lost, thereby increasing the reliability of the device, and the slope is placed on the mega block to prevent the shaking when the magazine is rotated. The rotation can be processed quickly.

Description

메가진 이송장치Mega Feeding Device

제1도는 본 고안의 우측 종단면도.1 is a right longitudinal cross-sectional view of the present invention.

제2도는 본 고안의 정면 종단면도.2 is a front longitudinal cross-sectional view of the present invention.

제3도는 본 고안의 스토퍼수단 확대 단면도.Figure 3 is an enlarged cross-sectional view of the stopper means of the present invention.

제4도는 본 고안에서 메가진을 흡착한 상태를 보인 요부 정면도이다.4 is a front view of the main portion showing a state in which the mega adsorbed in the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 메가진 10 : 메가진블럭1: Megazine 10: Megablock

10-1 : 에어주입공 11 : 스토퍼수단10-1: air injection hole 11: stopper means

11-1 : 푸시패킹 11-2 : 크램프레버11-1: Push Packing 11-2: Cram Flavor

11-3 : 카바 11-4 : 스프링11-3: Caba 11-4: Spring

11-5 : 제1직경부 11-6 : 제2직경부11-5: 1st diameter part 11-6: 2nd diameter part

11-7 : 안내부 11-8 : 패킹부11-7: guide part 11-8: packing part

12 : 경사면 13 : 진공패드12: inclined surface 13: vacuum pad

20 : 상하이동수단 30 : 회전실린더20: Shanghai East means 30: rotating cylinder

본 고안은 메가진 이송 장치에 관한 것으로, 특히 메가진 블록에 전후의 스토퍼수단과, 양측의 경사면을 형성하고, 회전실린더에 의해 메가진블럭이 회전케하여 상하이송 및 회전을 가능케하는 메가진 이송장치에 관한 것이다.The present invention relates to a mega conveying device, and in particular, a mega conveying device which forms a stopper means before and after and a sloping surface on both sides of a mega block, and enables a mega block to rotate by a rotating cylinder to enable shanghai conveying and rotating. Relates to a device.

일반적으로 메가진 이송장치는 메가진에 수장된 제조공정상의 리드프레임등을 로딩 또는 언로딩하도록 이송시키는 것으로, 전후면은 개방되어 있고 양측면은 밀폐되어 있으며, 양측면이 상하로 상면보다 길게 노출되어 있다.In general, a mega conveying device is a conveying device for loading or unloading a lead frame in a manufacturing process stored in a magazine. The front and rear surfaces are open, both sides are sealed, and both sides are exposed longer than the upper and upper surfaces. .

이를 이송키 위하여는 메가진 상면을 수개의 진공패드로 흡착한 후 이송시키는바, 시작 위치와 이송될 위치 사이를 수평 이동시키는 구조로 되어 있어, 항상 로딩용과 언로딩용으로 구분하여 작업을 수행하여야 한다.In order to transfer this, the upper surface of the mega is absorbed by several vacuum pads and then transported, and it has a structure for horizontally moving between the starting position and the position to be transported. do.

또한 몰딩할 리드프레임을 적재한 메가진은 엘리베이터에서 몰딩을 위한 픽스쳐 일측에 리드프레임을 공급하고, 픽스쳐를 안착시킨 헤드를 180도 회전시켜 픽스쳐 타측에 리드프레임을 마져 공급하는 과정을 반복수행한다.In addition, Megazine, which loads the lead frame to be molded, supplies a lead frame to one side of the fixture for molding in an elevator, and repeatedly rotates the head on which the fixture is seated by 180 degrees to finish supplying the lead frame to the other side of the fixture.

이 경우 픽스쳐의 방향을 바꾸는 헤드는 픽스쳐의 중량이 많이 나가기에 헤드 회전 동력이 큰 것을 필요로 하고, 이에 따라 회전속도도 느려 작업효율이 저하되는 문제점이 있었다.In this case, the head for changing the direction of the fixture requires a large amount of head rotational power because the weight of the fixture is large, and accordingly, the rotational speed is slowed, resulting in a decrease in work efficiency.

본 고안은 이를 해결코자 하는 것으로, 헤드 대신 메가진을 180도 회전 가능케하는 방식을 이용하여 몰딩할 리드 프레임을 픽스쳐에 쉽게 제공할 수 있게 함을 특징으로 한다.The present invention is to solve this problem, it is characterized in that it is possible to easily provide the fixture to the lead frame to be molded by using a method that can rotate the mega 180 degrees instead of the head.

즉, 본 고안은 메가진을 진공패드로 상면에서 흡착하는 메가진블럭, 메가진블럭을 상승하강시키는 상하이동수단; 및 상하이동수단의 가동단에 고정되어 메가진블럭을 180도 회전시키는 회전실린더를 포함하여 구성되며;That is, the present invention is a mega block for absorbing the megazine from the upper surface with a vacuum pad, the shangdong means for raising and lowering the mega block; And a rotating cylinder fixed to the movable end of the shandong means to rotate the mega block 180 degrees;

상기 메가진블럭 전후면에는 흡착력 다운시 자체 기동하여 메가진을 크랭핌하는 스토퍼수단이, 좌우측에는 메가진의 좌우이동을 제한하는 경사면이 부가된 것이다.The front and rear surfaces of the mega block have a stopper means for cranking the magazine by starting itself when the suction force is down, and inclined surfaces for restricting the left and right movement of the magazine are added to the left and right sides.

이하 도면을 참조하여 상세히 설명한다. 제1도는 본 고안의 우측 종단면도, 제2도는 본 고안의 정면종단면도, 제3도는 본 고안의 스토퍼수단 확대도이고, 제4도는 메가진을 흡착한 평면 상태 도면으로, 메가진(1)을 진공패드(13)로 상면에서 흡착하는 메가진블럭(10); 메가진블럭(10)을 상승하강시키는 상하이동수단(20); 및 상하이동수단(20)의 가동단(21)에 고정되어 메가진블럭(10)을 180도 회전시키는 회전실린더(30)를 포함하여 구성되며;Hereinafter, with reference to the drawings will be described in detail. FIG. 1 is a right longitudinal cross-sectional view of the present invention, FIG. 2 is a front longitudinal cross-sectional view of the present invention, and FIG. 3 is an enlarged view of the stopper means of the present invention, and FIG. 4 is a plan state diagram in which mega is adsorbed. Mega block 10 for adsorbing on the upper surface with a vacuum pad (13); Shanghai east means 20 for raising and lowering the mega block 10; And a rotating cylinder 30 fixed to the movable end 21 of the shank means 20 to rotate the mega block 10 by 180 degrees;

상기 메가진블럭(10) 전후면에는 흡착력 다운시 자체기동하여 메가진(1)을 크램핑하는 스토퍼수단(11)이, 좌우측에는 메가진(1)의 좌우이동을 제한하는 경사면(12)이 부가된 것이다.Front and rear surfaces of the mega block 10 have a stopper means 11 for clamping the mega 1 by itself when the suction force is down, and an inclined surface 12 for restricting the left and right movement of the mega 1 on the left and right sides thereof. It is added.

상기 상하이동수단(20)은 업다운 실린더(22)를 고정하는 실린더블럭(23), 실린더(22)의 업다운 운동을 하는 가동단(21) 및 실린더(22) 구동을 제어하는 케이블 덕트(24)로 이루어진다.The shank moving means 20 is a cylinder block 23 for fixing the up-down cylinder 22, a movable end 21 for up-down movement of the cylinder 22, and a cable duct 24 for controlling the driving of the cylinder 22. Is made of.

제1,2 및 4도에 보인(10) 진공라인과 연결되는 진공홀(14), 제2도의 (15)는 실린더업센서,(16)은 실린더다운센서이다.The vacuum hole 14 connected to the vacuum line 10 shown in FIGS. 1, 2 and 4 is shown in FIG.

상기 스토퍼수단(11)은 제3도와 같이 에어주입공(10-1)과 관통되는 안내공(10-2)에서 에어에 의해 좌우이동하는 푸시패킹(11-1), 푸시패킹(11-1) 외단에 수직으로 고정되어 메가진(1)을 크랭핑 또는 해제토록 가능하는 크램프레버(11-2), 상기 푸시패킹(11-1)의 이탈을 방지토록 메가진블럭(10) 전후면에 고정된 카바(11-3), 및 상기 카바(11-3) 내주와 푸시패킹(11-1) 외주사이에서 에어주입이 중단될 때 크램프레버(11-2)가 메가진(1)을 크램프하도록 탄발력을 제공하는 스프링(11-4)으로 이루어진다.The stopper means 11 is push packing 11-1, push packing 11-1 which is moved left and right by air in the air injection hole 10-1 and the guide hole 10-2 penetrated as shown in FIG. Cram lever 11-2, which is fixed perpendicularly to the outer end to enable cranking or releasing the magazine 1, on the front and rear surfaces of the mega block 10 to prevent the push packing 11-1 from being separated. When the air injection is stopped between the fixed cover 11-3 and the inner cover of the cover 11-3 and the outer circumference of the push packing 11-1, the cramp lever 11-2 clamps the mega 1 And a spring 11-4 that provides a resilience force.

상기 카바(11-3)는 푸시패킹(11-1)이 끼워지는 제1직경부(11-5)와, 스프링(11-1)이 끼워지는 제2직경부(11-6)가 일체로 되며, 제2직경부(11-6)가 일체로 되며, 이탈을 막을 수 있는 길이로 구성한다.The cover 11-3 is integrally formed with a first diameter portion 11-5 into which the push packing 11-1 is fitted, and a second diameter portion 11-6 into which the spring 11-1 is fitted. And, the second diameter portion (11-6) is integral, and constitutes a length that can prevent the departure.

상기 푸시패킹(11-1)은 제1직경부(11-5)에 끼워지는 각진 안내부(11-7)와, 안내부(11-7)보다 큰 직경이며 스프링(11-4)이 당접하고 안내공(10-2)과 같은 직경의 패킹부(11-8)를 포함하여 이루어진다.The push packing 11-1 has an angled guide portion 11-7 fitted to the first diameter portion 11-5, a diameter larger than the guide portion 11-7, and the spring 11-4 has a diameter. It consists of a contact portion 11-8 of the same diameter as the guide hole (10-2).

이와 같이 구성되는 본 고안은 실린더(20)의 가동단(21)이 하강하면 진공홀(14)에 진공이 가하여 진공패드(13)에도 진공력이 인가됨으로서 메가진(1)을 흡착케 한다.According to the present invention configured as described above, when the movable end 21 of the cylinder 20 descends, a vacuum is applied to the vacuum hole 14, so that a vacuum force is applied to the vacuum pad 13, thereby adsorbing the megagen 1.

이때 제2도 및 4도와 같이 메가진블럭(10) 하단 양측은 경사면(12)을 이루고 있어 메가진(1) 좌, 우측 상단내면과 당접함으로써 좌, 우 요동을 막아준다.In this case, as shown in FIGS. 2 and 4, both sides of the bottom of the mega block 10 form an inclined surface 12, thereby preventing left and right swings by contacting the left and right upper surfaces of the mega 1.

한편 제3도와 같이 에어주입공(10-1)을 통하여 압축공기가 제공되어 패킹부(11-8)을 좌측으로 밀면(스프링(11-4)의 압축력보다 세게 밀면) 제3도 상태를 이루어 메가진(1)의 크램핑 작동에는 이상이 없다. 그러나 전원이 오프되거나 진공패드(13)로 인가되는 진공력이 차단되면 스프링(11-4)의 탄성력에 의해 패킹부(11-8)를 우측으로 밀고, 이에 따라 크램프레버(11-2)도 우측으로 이동하면서 메가진(1)의 상면에 크램프레버(11-2)의 하단 절곡부가 끼워지게 된다.Meanwhile, as shown in FIG. 3, compressed air is provided through the air injection hole 10-1 to push the packing part 11-8 to the left side (when pushing harder than the compression force of the spring 11-4) to form a third degree state. There is no abnormality in the clamping operation of the mega 1. However, when the power is turned off or the vacuum force applied to the vacuum pad 13 is cut off, the packing part 11-8 is pushed to the right by the elastic force of the spring 11-4, and thus the cramp lever 11-2 is also pushed. While moving to the right side, the lower bent portion of the cramp lever 11-2 is fitted to the upper surface of the magazine 1.

즉, 진공력이 만일의 경우 차단되어도 스토퍼수단(11)이 자체 복귀력이 있어 메가진(1)의 자유낙하는 방지할 수 있게 된다.In other words, even if the vacuum force is interrupted in case, the stopper means 11 has its own return force, thereby preventing free fall of the magazine 1.

본 고안에서 스토퍼수단(11)과 좌우이동방지용 경사면(11-2)을 부가한 것은 메가진(1) 이송의 안정성과, 본 고안에서 작동시키려고 하는 180도 회전을 위함이다.The addition of the stopper means 11 and the inclined surface 11-2 for preventing left and right movement in the present invention is for the stability of the conveying of the mega 1 and the rotation of 180 degrees to be operated in the present invention.

즉, 이는 메가진(1)의 180도 정회전 역회전을 반복가능케하고, 회전시의 요동이 없어야 메가진(1)을 재빨리 원위치시켜 작업성을 향상시킬 수 있게 때문이다.In other words, this is because it is possible to repeat the reverse rotation of the forward rotation of the mega (1) 180 degrees, and there should be no fluctuation during rotation to quickly return the mega (1) to the original position to improve the workability.

따라서, 본 고안은 몰딩할 리드프레임을 메가진(1)에 적재한 경우 픽스쳐의 일측에는 메가진(1) 적재위치에서 리드프레임(예를 들어 A방향)을 공급하고, 타측은 메가진(1)을 흡착하고 회전실린더(30)로 180도 회전시킨 다음 리드프레임(예를 들어 B방향)을 바로 공급할 수 있게 작업시간을 단축시킬 수 있다.Therefore, in the present invention, when the lead frame to be molded is loaded in the magazine 1, one side of the fixture is supplied with the lead frame (for example, A direction) at the loading position of the magazine 1, and the other side is the magazine 1 ) And rotated 180 degrees to the rotary cylinder 30, and then the working time can be shortened so that the lead frame (for example B direction) can be directly supplied.

또한 회전시 정전 등이 되어도 스토퍼수단(11)이 즉각 메가진 상단을 크램핑하므로써 리드프레임을 보호할 수 있게 된다.In addition, even if a power failure or the like during rotation, the stopper means 11 can immediately protect the lead frame by clamping the mega top.

이때 회전실린더(30)를 작동시키는 시점은 메가진(1)이 장착되는 엘리베이터 구조에 따라 즉시 회전시킬 수도 있고, 상하이동수단(20)을 이용하여 일정높이로 올렸다가 회전후 원위치 시킬수도 있을 것이다.At this time, the timing of operating the rotating cylinder 30 may be immediately rotated according to the elevator structure in which the mega 1 is mounted, or may be raised to a predetermined height by using the shandong means 20 and then rotated to its original position. .

본 고안에서 진공홀(14)에 제공하는 진공라인은 도면에서 생략하였다.In the present invention, the vacuum line provided to the vacuum hole 14 is omitted in the drawing.

또한 본 고안은 몰딩할 리드프레임을 적재한 메가진 구동을 주로 설명하였으나 이러한 기능이 요구되는 다른 공정상의 리드프레임 적재 메가진에도 적용 가능하다.In addition, the present invention mainly described a mega drive with a lead frame to be molded. However, the present invention is applicable to other processes such as a lead frame stacking magazine in which such a function is required.

이상과 같이 본 고안은 메가진을 이송함에 있어서 회전실린더를 이용하여 180도 회전을 가능케하고, 자체 진공 흡착력을 상실하여도 스토퍼수단으로 메가진의 크램핑은 지속시켜 장치의 신뢰도를 높였으며, 메가진 회전시 요동을 막을 수 있도록 메가진 블록에 경사면을 두어 요동없이 회전을 신속히 처리할 수 있다.As described above, the present invention enables the rotation of the cylinder by using a rotating cylinder, and the clamping of the magazine by the stopper means the reliability of the device, even though the vacuum suction force is lost. In order to prevent swinging during rotation, a slope is placed on the mega block so that rotation can be processed quickly without swinging.

Claims (4)

메가진을 진공패드로 상면에서 흡착하는 메가진 블록; 메가진 블록을 상승 하강시키는 상하이동수단; 및 상하이동수단의 가동단에 고정되어 메가진 블록을 180도 회전시키는 회전실린더를 포함하여 구성되며; 상기 메가진 블록 전후면에는 흡착력 다운시 자체 기동하여 메가진을 크램핑하는 스토퍼수단이, 좌우측에는 메가진의 좌우이동을 제한하는 경사면이 부가된 것을 특징으로 하는 메가진 이송장치.A mega block for adsorbing megazine from the upper surface with a vacuum pad; Shanghai East means for raising and lowering the mega block; And a rotating cylinder fixed to the movable end of the shandong means to rotate the mega block 180 degrees; The front and rear surfaces of the mega block, a stopper means for self-starting and clamping the magazine when the suction force is down, and the inclined surface is added to the left and right sides to limit the left and right movement of the magazine. 제1항에 있어서, 스토퍼수단은 에어주입공과 관통되는 수평상의 안내공에서 에어에 의해 좌우 이동하는 푸시패킹, 푸시패킹 외단에 수직으로 고정되어 메가진을 크램핑 또는 해제토록 기능하는 크램프레버, 상기 푸시패킹의 이탈을 방지토록 메가진 블록 전후면에 상기 카바, 및 상기 카바 내주와 푸시패킹 외주 사이에서 에어주입이 중단될 때 크램프레버가 메가진을 크램프하도록 탄반력을 제공하는 스프링으로 이루어진 것을 특징으로 하는 메가진 이송장치.The cramp lever according to claim 1, wherein the stopper means is vertically fixed to the push packing and the push packing outer end which are moved left and right by air in the horizontal guide hole penetrated through the air injection hole, so as to clamp or release the magazine. The front and rear of the mega block to prevent the release of the push packing, and the crab lever and the spring to provide a resilient force to clamp the magazine when the air injection is interrupted between the inner cover and the outer periphery of the push packing Mega conveying device. 제2항에 있어서, 카바는 푸시패킹이 끼워지는 제1직경부와, 스프링이 끼워지는 제2직경부가 일체로 되며, 제2직경부 푸시패킹의 이탈을 막을 수 있는 길이로 구성함을 특징으로 하는 메가진 이송장치.3. The cover of claim 2, wherein the cover is integrally formed with a first diameter portion into which the push packing is fitted, and a second diameter portion into which the spring is fitted, and configured to have a length that can prevent the second diameter portion from being push-packed. Mega conveying device. 제2항에 있어서, 푸시패킹은 제1직경부에 끼워지는 각진 안내부와, 안내부보다 큰 직경이며 스프링이 당접하고 안내공과 같은 직경의 패킹부를 포함하여 이루어진 것을 특징으로 하는 메가진 이송장치.3. The mega conveying apparatus of claim 2, wherein the push packing comprises an angular guide portion fitted to the first diameter portion, and a packing portion having a diameter larger than the guide portion, the spring abuts, and the same diameter as the guide hole.
KR2019950015735U 1995-06-30 1995-06-30 Megazine transfer system KR0130962Y1 (en)

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