KR970003269U - Mega conveying device - Google Patents
Mega conveying deviceInfo
- Publication number
- KR970003269U KR970003269U KR2019950015735U KR19950015735U KR970003269U KR 970003269 U KR970003269 U KR 970003269U KR 2019950015735 U KR2019950015735 U KR 2019950015735U KR 19950015735 U KR19950015735 U KR 19950015735U KR 970003269 U KR970003269 U KR 970003269U
- Authority
- KR
- South Korea
- Prior art keywords
- mega
- conveying device
- conveying
- mega conveying
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950015735U KR0130962Y1 (en) | 1995-06-30 | 1995-06-30 | Megazine transfer system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950015735U KR0130962Y1 (en) | 1995-06-30 | 1995-06-30 | Megazine transfer system |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970003269U true KR970003269U (en) | 1997-01-24 |
KR0130962Y1 KR0130962Y1 (en) | 1999-02-01 |
Family
ID=19417102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950015735U KR0130962Y1 (en) | 1995-06-30 | 1995-06-30 | Megazine transfer system |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0130962Y1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100442671B1 (en) * | 2002-01-21 | 2004-08-02 | 미래산업 주식회사 | Apparatus for clearing jammed semiconductor in vertical type handler |
-
1995
- 1995-06-30 KR KR2019950015735U patent/KR0130962Y1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100442671B1 (en) * | 2002-01-21 | 2004-08-02 | 미래산업 주식회사 | Apparatus for clearing jammed semiconductor in vertical type handler |
Also Published As
Publication number | Publication date |
---|---|
KR0130962Y1 (en) | 1999-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20040820 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |