JPWO2025041202A1 - - Google Patents

Info

Publication number
JPWO2025041202A1
JPWO2025041202A1 JP2024531409A JP2024531409A JPWO2025041202A1 JP WO2025041202 A1 JPWO2025041202 A1 JP WO2025041202A1 JP 2024531409 A JP2024531409 A JP 2024531409A JP 2024531409 A JP2024531409 A JP 2024531409A JP WO2025041202 A1 JPWO2025041202 A1 JP WO2025041202A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024531409A
Other versions
JP7642159B1 (ja
JPWO2025041202A5 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed filed Critical
Publication of JPWO2025041202A1 publication Critical patent/JPWO2025041202A1/ja
Application granted granted Critical
Publication of JP7642159B1 publication Critical patent/JP7642159B1/ja
Publication of JPWO2025041202A5 publication Critical patent/JPWO2025041202A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/005—Heaters using a particular layout for the resistive material or resistive elements using multiple resistive elements or resistive zones isolated from each other
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/016—Heaters using particular connecting means

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
  • Manufacturing & Machinery (AREA)
  • Furnace Details (AREA)
JP2024531409A 2023-08-18 2023-08-18 マルチゾーンセラミックヒータ Active JP7642159B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/029889 WO2025041202A1 (ja) 2023-08-18 2023-08-18 マルチゾーンセラミックヒータ

Publications (3)

Publication Number Publication Date
JPWO2025041202A1 true JPWO2025041202A1 (ja) 2025-02-27
JP7642159B1 JP7642159B1 (ja) 2025-03-07
JPWO2025041202A5 JPWO2025041202A5 (ja) 2025-07-30

Family

ID=94609155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024531409A Active JP7642159B1 (ja) 2023-08-18 2023-08-18 マルチゾーンセラミックヒータ

Country Status (6)

Country Link
US (1) US20250063636A1 (ja)
JP (1) JP7642159B1 (ja)
KR (1) KR20260039895A (ja)
CN (1) CN121730018A (ja)
TW (1) TW202510629A (ja)
WO (1) WO2025041202A1 (ja)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6352663B2 (ja) * 2014-03-28 2018-07-04 日本特殊陶業株式会社 積層発熱体
KR102062751B1 (ko) * 2016-03-29 2020-01-06 엔지케이 인슐레이터 엘티디 정전 척 히터
JP6758143B2 (ja) * 2016-09-29 2020-09-23 日本特殊陶業株式会社 加熱装置
JPWO2019008889A1 (ja) * 2017-07-07 2020-05-21 住友電気工業株式会社 半導体基板加熱用の基板載置台
WO2020027047A1 (ja) * 2018-07-31 2020-02-06 京セラ株式会社 ヒータ
JP7252825B2 (ja) * 2019-05-20 2023-04-05 日本特殊陶業株式会社 保持装置

Also Published As

Publication number Publication date
KR20260039895A (ko) 2026-03-23
JP7642159B1 (ja) 2025-03-07
WO2025041202A1 (ja) 2025-02-27
US20250063636A1 (en) 2025-02-20
TW202510629A (zh) 2025-03-01
CN121730018A (zh) 2026-03-24

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