JPWO2025023298A5 - - Google Patents

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Publication number
JPWO2025023298A5
JPWO2025023298A5 JP2024569040A JP2024569040A JPWO2025023298A5 JP WO2025023298 A5 JPWO2025023298 A5 JP WO2025023298A5 JP 2024569040 A JP2024569040 A JP 2024569040A JP 2024569040 A JP2024569040 A JP 2024569040A JP WO2025023298 A5 JPWO2025023298 A5 JP WO2025023298A5
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JP
Japan
Prior art keywords
allyltrimethoxysilane
mass
aqueous solution
phosphoric acid
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024569040A
Other languages
English (en)
Japanese (ja)
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JP7632780B1 (ja
JPWO2025023298A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2024/026645 external-priority patent/WO2025023298A1/ja
Priority to JP2024203372A priority Critical patent/JP2025019189A/ja
Publication of JPWO2025023298A1 publication Critical patent/JPWO2025023298A1/ja
Application granted granted Critical
Publication of JP7632780B1 publication Critical patent/JP7632780B1/ja
Publication of JPWO2025023298A5 publication Critical patent/JPWO2025023298A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2024569040A 2023-07-25 2024-07-25 エッチング組成物 Active JP7632780B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024203372A JP2025019189A (ja) 2023-07-25 2024-11-21 エッチング組成物

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2023121097 2023-07-25
JP2023121097 2023-07-25
JP2023192709 2023-11-13
JP2023192709 2023-11-13
PCT/JP2024/026645 WO2025023298A1 (ja) 2023-07-25 2024-07-25 エッチング組成物

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024203372A Division JP2025019189A (ja) 2023-07-25 2024-11-21 エッチング組成物

Publications (3)

Publication Number Publication Date
JPWO2025023298A1 JPWO2025023298A1 (https=) 2025-01-30
JP7632780B1 JP7632780B1 (ja) 2025-02-19
JPWO2025023298A5 true JPWO2025023298A5 (https=) 2025-07-01

Family

ID=94375448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024569040A Active JP7632780B1 (ja) 2023-07-25 2024-07-25 エッチング組成物

Country Status (3)

Country Link
JP (1) JP7632780B1 (https=)
TW (1) TW202505000A (https=)
WO (1) WO2025023298A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070009448A1 (en) * 2005-02-25 2007-01-11 Kanca John A Iii Silanol based dental treatment
KR102749433B1 (ko) * 2019-07-12 2024-12-31 오씨아이 주식회사 실리콘 질화막 식각 용액 및 이의 제조방법
KR102325905B1 (ko) * 2021-03-22 2021-11-12 연세대학교 산학협력단 실리콘 질화막 식각 조성물 및 이를 이용한 식각방법

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