JPWO2025023288A5 - - Google Patents

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Publication number
JPWO2025023288A5
JPWO2025023288A5 JP2024569039A JP2024569039A JPWO2025023288A5 JP WO2025023288 A5 JPWO2025023288 A5 JP WO2025023288A5 JP 2024569039 A JP2024569039 A JP 2024569039A JP 2024569039 A JP2024569039 A JP 2024569039A JP WO2025023288 A5 JPWO2025023288 A5 JP WO2025023288A5
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JP
Japan
Prior art keywords
allyltriethoxysilane
etching composition
solvent
mass
phosphoric acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024569039A
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English (en)
Japanese (ja)
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JPWO2025023288A1 (https=
JP7632779B1 (ja
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Publication date
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Priority claimed from PCT/JP2024/026543 external-priority patent/WO2025023288A1/ja
Priority to JP2024203360A priority Critical patent/JP2025019188A/ja
Publication of JPWO2025023288A1 publication Critical patent/JPWO2025023288A1/ja
Application granted granted Critical
Publication of JP7632779B1 publication Critical patent/JP7632779B1/ja
Publication of JPWO2025023288A5 publication Critical patent/JPWO2025023288A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2024569039A 2023-07-25 2024-07-25 エッチング組成物 Active JP7632779B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024203360A JP2025019188A (ja) 2023-07-25 2024-11-21 エッチング組成物

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2023121091 2023-07-25
JP2023121091 2023-07-25
JP2023192706 2023-11-13
JP2023192706 2023-11-13
PCT/JP2024/026543 WO2025023288A1 (ja) 2023-07-25 2024-07-25 エッチング組成物

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024203360A Division JP2025019188A (ja) 2023-07-25 2024-11-21 エッチング組成物

Publications (3)

Publication Number Publication Date
JPWO2025023288A1 JPWO2025023288A1 (https=) 2025-01-30
JP7632779B1 JP7632779B1 (ja) 2025-02-19
JPWO2025023288A5 true JPWO2025023288A5 (https=) 2025-07-01

Family

ID=94375416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024569039A Active JP7632779B1 (ja) 2023-07-25 2024-07-25 エッチング組成物

Country Status (3)

Country Link
JP (1) JP7632779B1 (https=)
TW (1) TW202509184A (https=)
WO (1) WO2025023288A1 (https=)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070009448A1 (en) * 2005-02-25 2007-01-11 Kanca John A Iii Silanol based dental treatment
CN110606954B (zh) * 2018-06-15 2023-03-24 易案爱富科技有限公司 聚硅氧烷类化合物、包含所述聚硅氧烷类化合物的氮化硅层蚀刻组合物

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