JPWO2024209587A5 - - Google Patents

Info

Publication number
JPWO2024209587A5
JPWO2024209587A5 JP2025512288A JP2025512288A JPWO2024209587A5 JP WO2024209587 A5 JPWO2024209587 A5 JP WO2024209587A5 JP 2025512288 A JP2025512288 A JP 2025512288A JP 2025512288 A JP2025512288 A JP 2025512288A JP WO2024209587 A5 JPWO2024209587 A5 JP WO2024209587A5
Authority
JP
Japan
Prior art keywords
light source
current value
current
source element
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025512288A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024209587A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/014082 external-priority patent/WO2024209587A1/ja
Publication of JPWO2024209587A1 publication Critical patent/JPWO2024209587A1/ja
Publication of JPWO2024209587A5 publication Critical patent/JPWO2024209587A5/ja
Pending legal-status Critical Current

Links

JP2025512288A 2023-04-05 2023-04-05 Pending JPWO2024209587A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/014082 WO2024209587A1 (ja) 2023-04-05 2023-04-05 駆動方法、光源ユニット、照明ユニット、露光装置、及び露光方法

Publications (2)

Publication Number Publication Date
JPWO2024209587A1 JPWO2024209587A1 (https=) 2024-10-10
JPWO2024209587A5 true JPWO2024209587A5 (https=) 2026-01-13

Family

ID=92971440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025512288A Pending JPWO2024209587A1 (https=) 2023-04-05 2023-04-05

Country Status (5)

Country Link
JP (1) JPWO2024209587A1 (https=)
KR (1) KR20250160466A (https=)
CN (1) CN120958384A (https=)
TW (1) TW202447720A (https=)
WO (1) WO2024209587A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007073984A (ja) * 2003-01-16 2007-03-22 Nikon Corp 照明光源装置、露光装置及び露光方法
JP2011237596A (ja) * 2010-05-10 2011-11-24 Hitachi High-Technologies Corp 露光装置、露光方法、及び表示用パネル基板の製造方法
JP2012220619A (ja) * 2011-04-06 2012-11-12 Hitachi High-Technologies Corp 露光装置、露光方法、及び表示用パネル基板の製造方法
JP5957262B2 (ja) 2012-03-29 2016-07-27 株式会社オーク製作所 放電ランプを備えた照明装置
JP5765677B2 (ja) * 2014-01-22 2015-08-19 株式会社ニコン パターン形成装置、及びパターン形成方法

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