JPWO2024176976A5 - - Google Patents

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Publication number
JPWO2024176976A5
JPWO2024176976A5 JP2025502338A JP2025502338A JPWO2024176976A5 JP WO2024176976 A5 JPWO2024176976 A5 JP WO2024176976A5 JP 2025502338 A JP2025502338 A JP 2025502338A JP 2025502338 A JP2025502338 A JP 2025502338A JP WO2024176976 A5 JPWO2024176976 A5 JP WO2024176976A5
Authority
JP
Japan
Prior art keywords
wall member
cavity
member according
cooling gas
circumferential direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2025502338A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024176976A1 (https=
JP7770611B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2024/005562 external-priority patent/WO2024176976A1/ja
Publication of JPWO2024176976A1 publication Critical patent/JPWO2024176976A1/ja
Publication of JPWO2024176976A5 publication Critical patent/JPWO2024176976A5/ja
Application granted granted Critical
Publication of JP7770611B2 publication Critical patent/JP7770611B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2025502338A 2023-02-21 2024-02-16 壁部材およびプラズマ処理装置 Active JP7770611B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023024921 2023-02-21
JP2023024921 2023-02-21
PCT/JP2024/005562 WO2024176976A1 (ja) 2023-02-21 2024-02-16 壁部材およびプラズマ処理装置

Publications (3)

Publication Number Publication Date
JPWO2024176976A1 JPWO2024176976A1 (https=) 2024-08-29
JPWO2024176976A5 true JPWO2024176976A5 (https=) 2025-08-25
JP7770611B2 JP7770611B2 (ja) 2025-11-14

Family

ID=92501208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025502338A Active JP7770611B2 (ja) 2023-02-21 2024-02-16 壁部材およびプラズマ処理装置

Country Status (6)

Country Link
US (1) US20250364232A1 (https=)
JP (1) JP7770611B2 (https=)
KR (1) KR20250153776A (https=)
CN (1) CN120693683A (https=)
TW (1) TW202507794A (https=)
WO (1) WO2024176976A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006093411A (ja) * 2004-09-24 2006-04-06 Hitachi Kokusai Electric Inc 基板処理装置
JP5651317B2 (ja) 2009-03-31 2015-01-07 東京エレクトロン株式会社 半導体製造装置及び温調方法
JP5396256B2 (ja) 2009-12-10 2014-01-22 東京エレクトロン株式会社 プラズマ処理装置
JP7066512B2 (ja) * 2018-05-11 2022-05-13 東京エレクトロン株式会社 プラズマ処理装置
JP7374016B2 (ja) * 2019-06-18 2023-11-06 東京エレクトロン株式会社 基板処理装置
JP7519874B2 (ja) * 2020-10-27 2024-07-22 東京エレクトロン株式会社 プラズマ処理装置

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