JPWO2024062558A5 - - Google Patents

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Publication number
JPWO2024062558A5
JPWO2024062558A5 JP2024547995A JP2024547995A JPWO2024062558A5 JP WO2024062558 A5 JPWO2024062558 A5 JP WO2024062558A5 JP 2024547995 A JP2024547995 A JP 2024547995A JP 2024547995 A JP2024547995 A JP 2024547995A JP WO2024062558 A5 JPWO2024062558 A5 JP WO2024062558A5
Authority
JP
Japan
Prior art keywords
probe
longitudinal direction
deformation regions
deformation
intervals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024547995A
Other languages
English (en)
Japanese (ja)
Other versions
JP7847658B2 (ja
JPWO2024062558A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/035187 external-priority patent/WO2024062558A1/ja
Publication of JPWO2024062558A1 publication Critical patent/JPWO2024062558A1/ja
Publication of JPWO2024062558A5 publication Critical patent/JPWO2024062558A5/ja
Application granted granted Critical
Publication of JP7847658B2 publication Critical patent/JP7847658B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2024547995A 2022-09-21 2022-09-21 プローブカード用プローブ Active JP7847658B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/035187 WO2024062558A1 (ja) 2022-09-21 2022-09-21 プローブカード用プローブ

Publications (3)

Publication Number Publication Date
JPWO2024062558A1 JPWO2024062558A1 (https=) 2024-03-28
JPWO2024062558A5 true JPWO2024062558A5 (https=) 2025-06-10
JP7847658B2 JP7847658B2 (ja) 2026-04-17

Family

ID=90454058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024547995A Active JP7847658B2 (ja) 2022-09-21 2022-09-21 プローブカード用プローブ

Country Status (6)

Country Link
US (1) US20260098876A1 (https=)
JP (1) JP7847658B2 (https=)
KR (1) KR20250048474A (https=)
CN (1) CN119923568A (https=)
TW (1) TW202429089A (https=)
WO (1) WO2024062558A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20260050010A1 (en) * 2022-09-21 2026-02-19 Japan Electronic Materials Corporation Probe for probe card

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5192232B2 (ja) * 2004-06-21 2013-05-08 カプレス・アクティーゼルスカブ プローブの位置合せを行なう方法
JP4823617B2 (ja) * 2005-09-09 2011-11-24 日本発條株式会社 導電性接触子および導電性接触子の製造方法
TWI369498B (en) * 2008-06-18 2012-08-01 Star Techn Inc Probe and probe card for integrated circiut devices using the same
WO2016156003A1 (en) * 2015-03-31 2016-10-06 Technoprobe S.P.A. Vertical contact probe and corresponding testing head with vertical contact probes, particularly for high frequency applications
KR101962644B1 (ko) * 2017-08-23 2019-03-28 리노공업주식회사 검사프로브 및 이를 사용한 검사장치

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