JPWO2024062558A5 - - Google Patents

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Publication number
JPWO2024062558A5
JPWO2024062558A5 JP2024547995A JP2024547995A JPWO2024062558A5 JP WO2024062558 A5 JPWO2024062558 A5 JP WO2024062558A5 JP 2024547995 A JP2024547995 A JP 2024547995A JP 2024547995 A JP2024547995 A JP 2024547995A JP WO2024062558 A5 JPWO2024062558 A5 JP WO2024062558A5
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JP
Japan
Prior art keywords
probe
longitudinal direction
deformation regions
deformation
intervals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024547995A
Other languages
English (en)
Japanese (ja)
Other versions
JP7847658B2 (ja
JPWO2024062558A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/035187 external-priority patent/WO2024062558A1/ja
Publication of JPWO2024062558A1 publication Critical patent/JPWO2024062558A1/ja
Publication of JPWO2024062558A5 publication Critical patent/JPWO2024062558A5/ja
Application granted granted Critical
Publication of JP7847658B2 publication Critical patent/JP7847658B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2024547995A 2022-09-21 2022-09-21 プローブカード用プローブ Active JP7847658B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/035187 WO2024062558A1 (ja) 2022-09-21 2022-09-21 プローブカード用プローブ

Publications (3)

Publication Number Publication Date
JPWO2024062558A1 JPWO2024062558A1 (https=) 2024-03-28
JPWO2024062558A5 true JPWO2024062558A5 (https=) 2025-06-10
JP7847658B2 JP7847658B2 (ja) 2026-04-17

Family

ID=90454058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024547995A Active JP7847658B2 (ja) 2022-09-21 2022-09-21 プローブカード用プローブ

Country Status (6)

Country Link
US (1) US20260098876A1 (https=)
JP (1) JP7847658B2 (https=)
KR (1) KR20250048474A (https=)
CN (1) CN119923568A (https=)
TW (1) TW202429089A (https=)
WO (1) WO2024062558A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102874365B1 (ko) * 2022-09-21 2025-10-21 재팬 일렉트로닉 메트리얼스 코오포레이숀 프로브 카드용 프로브
KR20250048368A (ko) * 2022-09-21 2025-04-08 재팬 일렉트로닉 메트리얼스 코오포레이숀 프로브 카드용 프로브

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5192232B2 (ja) * 2004-06-21 2013-05-08 カプレス・アクティーゼルスカブ プローブの位置合せを行なう方法
JP4823617B2 (ja) * 2005-09-09 2011-11-24 日本発條株式会社 導電性接触子および導電性接触子の製造方法
TWI369498B (en) * 2008-06-18 2012-08-01 Star Techn Inc Probe and probe card for integrated circiut devices using the same
JP6728219B2 (ja) * 2015-03-31 2020-07-22 テクノプローベ エス．ピー．エー． 高周波適用のためのバーチカル接触プローブ、及びバーチカル接触プローブをもつ試験ヘッド
KR101962644B1 (ko) * 2017-08-23 2019-03-28 리노공업주식회사 검사프로브 및 이를 사용한 검사장치

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