JPWO2024014358A5 - - Google Patents

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Publication number
JPWO2024014358A5
JPWO2024014358A5 JP2024533659A JP2024533659A JPWO2024014358A5 JP WO2024014358 A5 JPWO2024014358 A5 JP WO2024014358A5 JP 2024533659 A JP2024533659 A JP 2024533659A JP 2024533659 A JP2024533659 A JP 2024533659A JP WO2024014358 A5 JPWO2024014358 A5 JP WO2024014358A5
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JP
Japan
Prior art keywords
main surface
silicon carbide
central portion
carbide substrate
equal
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Pending
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JP2024533659A
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English (en)
Japanese (ja)
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JPWO2024014358A1 (https=
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Priority claimed from PCT/JP2023/024796 external-priority patent/WO2024014358A1/ja
Publication of JPWO2024014358A1 publication Critical patent/JPWO2024014358A1/ja
Publication of JPWO2024014358A5 publication Critical patent/JPWO2024014358A5/ja
Pending legal-status Critical Current

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JP2024533659A 2022-07-14 2023-07-04 Pending JPWO2024014358A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022113414 2022-07-14
PCT/JP2023/024796 WO2024014358A1 (ja) 2022-07-14 2023-07-04 炭化珪素基板、炭化珪素エピタキシャル基板および炭化珪素半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPWO2024014358A1 JPWO2024014358A1 (https=) 2024-01-18
JPWO2024014358A5 true JPWO2024014358A5 (https=) 2025-03-25

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ID=89536622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024533659A Pending JPWO2024014358A1 (https=) 2022-07-14 2023-07-04

Country Status (2)

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JP (1) JPWO2024014358A1 (https=)
WO (1) WO2024014358A1 (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018140903A (ja) * 2017-02-28 2018-09-13 昭和電工株式会社 炭化珪素単結晶インゴットの製造方法

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