JPWO2023171438A5 - - Google Patents

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Publication number
JPWO2023171438A5
JPWO2023171438A5 JP2024506077A JP2024506077A JPWO2023171438A5 JP WO2023171438 A5 JPWO2023171438 A5 JP WO2023171438A5 JP 2024506077 A JP2024506077 A JP 2024506077A JP 2024506077 A JP2024506077 A JP 2024506077A JP WO2023171438 A5 JPWO2023171438 A5 JP WO2023171438A5
Authority
JP
Japan
Prior art keywords
gate
nitride semiconductor
semiconductor device
layer
sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024506077A
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English (en)
Japanese (ja)
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JPWO2023171438A1 (https=
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Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/006954 external-priority patent/WO2023171438A1/ja
Publication of JPWO2023171438A1 publication Critical patent/JPWO2023171438A1/ja
Publication of JPWO2023171438A5 publication Critical patent/JPWO2023171438A5/ja
Pending legal-status Critical Current

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JP2024506077A 2022-03-10 2023-02-27 Pending JPWO2023171438A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022037326 2022-03-10
PCT/JP2023/006954 WO2023171438A1 (ja) 2022-03-10 2023-02-27 窒化物半導体装置

Publications (2)

Publication Number Publication Date
JPWO2023171438A1 JPWO2023171438A1 (https=) 2023-09-14
JPWO2023171438A5 true JPWO2023171438A5 (https=) 2024-11-15

Family

ID=87935118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024506077A Pending JPWO2023171438A1 (https=) 2022-03-10 2023-02-27

Country Status (4)

Country Link
US (1) US20240429296A1 (https=)
JP (1) JPWO2023171438A1 (https=)
CN (1) CN118830090A (https=)
WO (1) WO2023171438A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026053841A1 (ja) * 2024-09-06 2026-03-12 ローム株式会社 半導体装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7097708B2 (ja) * 2018-01-30 2022-07-08 ローム株式会社 窒化物半導体装置
US11908927B2 (en) * 2019-02-28 2024-02-20 Rohm Co., Ltd. Nitride semiconductor device
JP7513601B2 (ja) * 2019-05-10 2024-07-09 ローム株式会社 窒化物半導体装置およびその製造方法

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