JPWO2023152595A5 - - Google Patents

Info

Publication number
JPWO2023152595A5
JPWO2023152595A5 JP2023579876A JP2023579876A JPWO2023152595A5 JP WO2023152595 A5 JPWO2023152595 A5 JP WO2023152595A5 JP 2023579876 A JP2023579876 A JP 2023579876A JP 2023579876 A JP2023579876 A JP 2023579876A JP WO2023152595 A5 JPWO2023152595 A5 JP WO2023152595A5
Authority
JP
Japan
Prior art keywords
insulator
conductor
opening
disposed
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023579876A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023152595A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/IB2023/050761 external-priority patent/WO2023152595A1/ja
Publication of JPWO2023152595A1 publication Critical patent/JPWO2023152595A1/ja
Publication of JPWO2023152595A5 publication Critical patent/JPWO2023152595A5/ja
Pending legal-status Critical Current

Links

JP2023579876A 2022-02-10 2023-01-30 Pending JPWO2023152595A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022019463 2022-02-10
PCT/IB2023/050761 WO2023152595A1 (ja) 2022-02-10 2023-01-30 記憶装置

Publications (2)

Publication Number Publication Date
JPWO2023152595A1 JPWO2023152595A1 (https=) 2023-08-17
JPWO2023152595A5 true JPWO2023152595A5 (https=) 2025-11-05

Family

ID=87563756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023579876A Pending JPWO2023152595A1 (https=) 2022-02-10 2023-01-30

Country Status (4)

Country Link
US (1) US20250159935A1 (https=)
JP (1) JPWO2023152595A1 (https=)
TW (1) TW202335185A (https=)
WO (1) WO2023152595A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250098187A1 (en) * 2023-09-18 2025-03-20 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor memory cell structure including a hydrogen absorption layer
TWI895023B (zh) * 2024-06-24 2025-08-21 聯華電子股份有限公司 半導體結構及其製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6607681B2 (ja) * 2014-03-07 2019-11-20 株式会社半導体エネルギー研究所 半導体装置
JP6545976B2 (ja) * 2014-03-07 2019-07-17 株式会社半導体エネルギー研究所 半導体装置
US11997846B2 (en) * 2018-07-06 2024-05-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
US12283632B2 (en) * 2019-05-10 2025-04-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
JP7459079B2 (ja) * 2019-05-23 2024-04-01 株式会社半導体エネルギー研究所 半導体装置

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