JPWO2023090349A5 - - Google Patents

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Publication number
JPWO2023090349A5
JPWO2023090349A5 JP2023562369A JP2023562369A JPWO2023090349A5 JP WO2023090349 A5 JPWO2023090349 A5 JP WO2023090349A5 JP 2023562369 A JP2023562369 A JP 2023562369A JP 2023562369 A JP2023562369 A JP 2023562369A JP WO2023090349 A5 JPWO2023090349 A5 JP WO2023090349A5
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JP
Japan
Prior art keywords
detection
base
sensor element
gyro sensor
element according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023562369A
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English (en)
Japanese (ja)
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JPWO2023090349A1 (https=
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Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/042514 external-priority patent/WO2023090349A1/ja
Publication of JPWO2023090349A1 publication Critical patent/JPWO2023090349A1/ja
Publication of JPWO2023090349A5 publication Critical patent/JPWO2023090349A5/ja
Pending legal-status Critical Current

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JP2023562369A 2021-11-16 2022-11-16 Pending JPWO2023090349A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021186532 2021-11-16
PCT/JP2022/042514 WO2023090349A1 (ja) 2021-11-16 2022-11-16 ジャイロセンサ素子

Publications (2)

Publication Number Publication Date
JPWO2023090349A1 JPWO2023090349A1 (https=) 2023-05-25
JPWO2023090349A5 true JPWO2023090349A5 (https=) 2024-08-01

Family

ID=86397082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023562369A Pending JPWO2023090349A1 (https=) 2021-11-16 2022-11-16

Country Status (2)

Country Link
JP (1) JPWO2023090349A1 (https=)
WO (1) WO2023090349A1 (https=)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3999377B2 (ja) * 1997-11-04 2007-10-31 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
JP4001029B2 (ja) * 2002-03-25 2007-10-31 セイコーエプソン株式会社 音叉型圧電振動片及びその製造方法、圧電デバイス
JP2005156395A (ja) * 2003-11-27 2005-06-16 Kyocera Kinseki Corp 慣性センサ素子
JP4734985B2 (ja) * 2005-03-23 2011-07-27 セイコーエプソン株式会社 圧電振動ジャイロ素子および圧電振動片
JP5131491B2 (ja) * 2010-02-24 2013-01-30 セイコーエプソン株式会社 ジャイロモジュール
JP5772286B2 (ja) * 2011-06-24 2015-09-02 セイコーエプソン株式会社 屈曲振動片及び電子機器
JP6620516B2 (ja) * 2015-10-28 2019-12-18 セイコーエプソン株式会社 音叉型振動片の製造方法、振動デバイス、電子機器、および移動体
US11835338B2 (en) * 2017-01-24 2023-12-05 Kyocera Corporation Sensor element, angular velocity sensor, and multi-axis angular velocity sensor
JP6450059B1 (ja) * 2017-07-24 2019-01-09 京セラ株式会社 センサ素子および角速度センサ
US11525679B2 (en) * 2017-08-29 2022-12-13 Kyocera Corporation Angular velocity sensor and sensor element
JP6987623B2 (ja) * 2017-11-27 2022-01-05 京セラ株式会社 圧電素子、圧電デバイスおよび圧電素子の製造方法

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