JPWO2023062850A1 - - Google Patents
Info
- Publication number
- JPWO2023062850A1 JPWO2023062850A1 JP2022535220A JP2022535220A JPWO2023062850A1 JP WO2023062850 A1 JPWO2023062850 A1 JP WO2023062850A1 JP 2022535220 A JP2022535220 A JP 2022535220A JP 2022535220 A JP2022535220 A JP 2022535220A JP WO2023062850 A1 JPWO2023062850 A1 JP WO2023062850A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
- H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
- H10D62/8325—Silicon carbide
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B1/00—Single-crystal growth directly from the solid state
- C30B1/02—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021167477 | 2021-10-12 | ||
| JP2021167477 | 2021-10-12 | ||
| PCT/JP2021/047648 WO2023062850A1 (ja) | 2021-10-12 | 2021-12-22 | 希土類含有ＳｉＣ基板及びＳｉＣ複合基板 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP7104266B1 JP7104266B1 (ja) | 2022-07-20 |
| JPWO2023062850A1 true JPWO2023062850A1 (https=) | 2023-04-20 |
| JPWO2023062850A5 JPWO2023062850A5 (https=) | 2023-09-20 |
Family
ID=82482455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022535220A Active JP7104266B1 (ja) | 2021-10-12 | 2021-12-22 | 希土類含有ＳｉＣ基板及びＳｉＣ複合基板 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20240250127A1 (https=) |
| EP (1) | EP4417739A4 (https=) |
| JP (1) | JP7104266B1 (https=) |
| CN (1) | CN117940620A (https=) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6507046B2 (en) * | 2001-05-11 | 2003-01-14 | Cree, Inc. | High-resistivity silicon carbide substrate for semiconductor devices with high break down voltage |
| WO2021149235A1 (ja) * | 2020-01-24 | 2021-07-29 | 日本碍子株式会社 | 希土類含有ＳｉＣ基板及びＳｉＣエピタキシャル層の製法 |
| WO2021149598A1 (ja) * | 2020-01-24 | 2021-07-29 | 日本碍子株式会社 | 二軸配向ＳｉＣ複合基板及び半導体デバイス用複合基板 |
-
2021
- 2021-12-22 CN CN202180102294.7A patent/CN117940620A/zh active Pending
- 2021-12-22 JP JP2022535220A patent/JP7104266B1/ja active Active
- 2021-12-22 EP EP21960703.3A patent/EP4417739A4/en active Pending
-
2024
- 2024-02-14 US US18/441,143 patent/US20240250127A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20240250127A1 (en) | 2024-07-25 |
| EP4417739A1 (en) | 2024-08-21 |
| CN117940620A (zh) | 2024-04-26 |
| EP4417739A4 (en) | 2025-08-27 |
| JP7104266B1 (ja) | 2022-07-20 |
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