JPWO2023032755A5 - - Google Patents

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Publication number
JPWO2023032755A5
JPWO2023032755A5 JP2023545476A JP2023545476A JPWO2023032755A5 JP WO2023032755 A5 JPWO2023032755 A5 JP WO2023032755A5 JP 2023545476 A JP2023545476 A JP 2023545476A JP 2023545476 A JP2023545476 A JP 2023545476A JP WO2023032755 A5 JPWO2023032755 A5 JP WO2023032755A5
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JP
Japan
Prior art keywords
plate
heating device
heating
hole
plate member
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Application number
JP2023545476A
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English (en)
Japanese (ja)
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JP7783285B2 (ja
JPWO2023032755A1 (https=
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Priority claimed from PCT/JP2022/031708 external-priority patent/WO2023032755A1/ja
Publication of JPWO2023032755A1 publication Critical patent/JPWO2023032755A1/ja
Publication of JPWO2023032755A5 publication Critical patent/JPWO2023032755A5/ja
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Publication of JP7783285B2 publication Critical patent/JP7783285B2/ja
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JP2023545476A 2021-08-31 2022-08-23 加熱装置 Active JP7783285B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021141106 2021-08-31
JP2021141106 2021-08-31
PCT/JP2022/031708 WO2023032755A1 (ja) 2021-08-31 2022-08-23 加熱装置

Publications (3)

Publication Number Publication Date
JPWO2023032755A1 JPWO2023032755A1 (https=) 2023-03-09
JPWO2023032755A5 true JPWO2023032755A5 (https=) 2024-05-17
JP7783285B2 JP7783285B2 (ja) 2025-12-09

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ID=85412514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023545476A Active JP7783285B2 (ja) 2021-08-31 2022-08-23 加熱装置

Country Status (2)

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JP (1) JP7783285B2 (https=)
WO (1) WO2023032755A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4646461B2 (ja) * 2001-08-10 2011-03-09 京セラ株式会社 電極内蔵セラミック部材及びその製造方法
JP2004071182A (ja) * 2002-08-01 2004-03-04 Ngk Spark Plug Co Ltd 複合ヒータ
WO2004089039A1 (ja) * 2003-03-31 2004-10-14 Ibiden Co., Ltd. 半導体製造・検査装置用ヒータ
JP6520160B2 (ja) * 2015-02-02 2019-05-29 住友大阪セメント株式会社 静電チャック装置
JP6555922B2 (ja) * 2015-04-28 2019-08-07 日本特殊陶業株式会社 加熱装置
JP6653535B2 (ja) * 2015-08-07 2020-02-26 日本発條株式会社 ヒータユニット
JP7141262B2 (ja) * 2018-06-29 2022-09-22 日本特殊陶業株式会社 基板保持部材及びその製造方法
JP7263078B2 (ja) * 2018-09-27 2023-04-24 東京エレクトロン株式会社 基板処理装置および基板処理方法

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