JPWO2022144668A5 - - Google Patents
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- Publication number
- JPWO2022144668A5 JPWO2022144668A5 JP2022572813A JP2022572813A JPWO2022144668A5 JP WO2022144668 A5 JPWO2022144668 A5 JP WO2022144668A5 JP 2022572813 A JP2022572813 A JP 2022572813A JP 2022572813 A JP2022572813 A JP 2022572813A JP WO2022144668 A5 JPWO2022144668 A5 JP WO2022144668A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- insulating layer
- display device
- silicon
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 6
- 239000010703 silicon Substances 0.000 claims 6
- 229910052710 silicon Inorganic materials 0.000 claims 6
- 229910052757 nitrogen Inorganic materials 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
- 239000001301 oxygen Substances 0.000 claims 3
- 229910052760 oxygen Inorganic materials 0.000 claims 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 2
- 239000001257 hydrogen Substances 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 229910052735 hafnium Inorganic materials 0.000 claims 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020219828 | 2020-12-29 | ||
| PCT/IB2021/061812 WO2022144668A1 (ja) | 2020-12-29 | 2021-12-16 | 表示装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2022144668A1 JPWO2022144668A1 (https=) | 2022-07-07 |
| JPWO2022144668A5 true JPWO2022144668A5 (https=) | 2024-12-23 |
Family
ID=82260571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022572813A Pending JPWO2022144668A1 (https=) | 2020-12-29 | 2021-12-16 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20240057403A1 (https=) |
| JP (1) | JPWO2022144668A1 (https=) |
| WO (1) | WO2022144668A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12262623B2 (en) | 2021-06-30 | 2025-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of display device |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5678740B2 (ja) * | 2011-03-11 | 2015-03-04 | ソニー株式会社 | 有機ｅｌ表示装置および電子機器 |
| JP6142331B2 (ja) * | 2013-04-19 | 2017-06-07 | 株式会社Ｊｏｌｅｄ | 薄膜半導体装置、有機ｅｌ表示装置、及びそれらの製造方法 |
| WO2014192221A1 (ja) * | 2013-05-29 | 2014-12-04 | パナソニック株式会社 | 薄膜トランジスタ装置とその製造方法、および表示装置 |
| KR102397873B1 (ko) * | 2014-02-24 | 2022-05-16 | 엘지디스플레이 주식회사 | 표시장치 |
| KR102582740B1 (ko) * | 2014-05-30 | 2023-09-26 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치, 이의 제조 방법, 및 전자 장치 |
| JP6387562B2 (ja) * | 2014-06-19 | 2018-09-12 | 株式会社Ｊｏｌｅｄ | 有機発光デバイスおよび有機表示装置 |
| JP2018021993A (ja) * | 2016-08-02 | 2018-02-08 | 株式会社ジャパンディスプレイ | 半導体基板及びそれを用いた表示装置 |
| JP6890003B2 (ja) * | 2016-11-29 | 2021-06-18 | 株式会社ジャパンディスプレイ | 表示装置 |
| JP2018116236A (ja) * | 2017-01-20 | 2018-07-26 | 株式会社ジャパンディスプレイ | 表示装置 |
| US12225761B2 (en) * | 2018-05-11 | 2025-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and fabrication method thereof |
| CN111192884A (zh) * | 2020-02-21 | 2020-05-22 | 深圳市华星光电半导体显示技术有限公司 | Oled显示装置及tft阵列基板的制备方法 |
| KR102927098B1 (ko) * | 2020-05-25 | 2026-02-12 | 삼성디스플레이 주식회사 | 폴더블 디스플레이 장치, 롤러블 디스플레이 장치, 및 디스플레이 장치 |
| US12295220B2 (en) * | 2020-09-09 | 2025-05-06 | Samsung Display Co., Ltd. | Display device |
-
2021
- 2021-12-16 JP JP2022572813A patent/JPWO2022144668A1/ja active Pending
- 2021-12-16 US US18/266,645 patent/US20240057403A1/en active Pending
- 2021-12-16 WO PCT/IB2021/061812 patent/WO2022144668A1/ja not_active Ceased
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