JPWO2022092060A5 - - Google Patents

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Publication number
JPWO2022092060A5
JPWO2022092060A5 JP2022559143A JP2022559143A JPWO2022092060A5 JP WO2022092060 A5 JPWO2022092060 A5 JP WO2022092060A5 JP 2022559143 A JP2022559143 A JP 2022559143A JP 2022559143 A JP2022559143 A JP 2022559143A JP WO2022092060 A5 JPWO2022092060 A5 JP WO2022092060A5
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JP
Japan
Prior art keywords
reflecting
convex surface
optical device
ray optical
reflecting convex
Prior art date
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Application number
JP2022559143A
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English (en)
Japanese (ja)
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JPWO2022092060A1 (https=
JP7751307B2 (ja
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Priority claimed from PCT/JP2021/039424 external-priority patent/WO2022092060A1/ja
Publication of JPWO2022092060A1 publication Critical patent/JPWO2022092060A1/ja
Publication of JPWO2022092060A5 publication Critical patent/JPWO2022092060A5/ja
Application granted granted Critical
Publication of JP7751307B2 publication Critical patent/JP7751307B2/ja
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JP2022559143A 2020-11-02 2021-10-26 Ｘ線光学装置 Active JP7751307B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020183795 2020-11-02
JP2020183795 2020-11-02
PCT/JP2021/039424 WO2022092060A1 (ja) 2020-11-02 2021-10-26 Ｘ線光学装置

Publications (3)

Publication Number Publication Date
JPWO2022092060A1 JPWO2022092060A1 (https=) 2022-05-05
JPWO2022092060A5 true JPWO2022092060A5 (https=) 2024-10-30
JP7751307B2 JP7751307B2 (ja) 2025-10-08

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ID=81381490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022559143A Active JP7751307B2 (ja) 2020-11-02 2021-10-26 Ｘ線光学装置

Country Status (2)

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JP (1) JP7751307B2 (https=)
WO (1) WO2022092060A1 (https=)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE169769T1 (de) * 1994-05-11 1998-08-15 Univ Colorado Roentgenstrahlungsoptik mit streifendem lichteinfall und sphaerischen spiegeln
WO1997016833A1 (en) * 1995-10-31 1997-05-09 Regents Of The University Of Colorado Spherical mirror grazing incidence x-ray optics
JPH08271697A (ja) * 1995-03-28 1996-10-18 Canon Inc Ｘ線顕微鏡用光学装置
US5512759A (en) * 1995-06-06 1996-04-30 Sweatt; William C. Condenser for illuminating a ringfield camera with synchrotron emission light
FR2788136B1 (fr) * 1998-12-31 2002-06-07 Europ De Systemes Optiques Soc Procede de realisation de surfaces de focalisation de faisceaux, notamment a incidence rasante et dispositif pour sa mise en oeuvre
JP2004158786A (ja) * 2002-11-08 2004-06-03 Canon Inc 投影光学系及び露光装置
DE102009047179B8 (de) * 2009-11-26 2016-08-18 Carl Zeiss Smt Gmbh Projektionsobjektiv
JP6048867B2 (ja) * 2012-04-17 2016-12-21 国立大学法人大阪大学 Ｘ線光学システム
WO2017051890A1 (ja) * 2015-09-25 2017-03-30 国立大学法人大阪大学 Ｘ線顕微鏡
JP7314068B2 (ja) * 2020-01-24 2023-07-25 キオクシア株式会社 撮像装置、画像生成装置及び撮像方法

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