JP7751307B2 - Ｘ線光学装置 - Google Patents

Ｘ線光学装置

Info

Publication number
JP7751307B2
JP7751307B2 JP2022559143A JP2022559143A JP7751307B2 JP 7751307 B2 JP7751307 B2 JP 7751307B2 JP 2022559143 A JP2022559143 A JP 2022559143A JP 2022559143 A JP2022559143 A JP 2022559143A JP 7751307 B2 JP7751307 B2 JP 7751307B2
Authority
JP
Japan
Prior art keywords
reflecting
convex surface
optical device
convex
ray optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022559143A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022092060A5 (https=
JPWO2022092060A1 (https=
Inventor
智至 松山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Osaka NUC
Original Assignee
Osaka University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka University NUC filed Critical Osaka University NUC
Publication of JPWO2022092060A1 publication Critical patent/JPWO2022092060A1/ja
Publication of JPWO2022092060A5 publication Critical patent/JPWO2022092060A5/ja
Application granted granted Critical
Publication of JP7751307B2 publication Critical patent/JP7751307B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Lenses (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2022559143A 2020-11-02 2021-10-26 Ｘ線光学装置 Active JP7751307B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020183795 2020-11-02
JP2020183795 2020-11-02
PCT/JP2021/039424 WO2022092060A1 (ja) 2020-11-02 2021-10-26 Ｘ線光学装置

Publications (3)

Publication Number Publication Date
JPWO2022092060A1 JPWO2022092060A1 (https=) 2022-05-05
JPWO2022092060A5 JPWO2022092060A5 (https=) 2024-10-30
JP7751307B2 true JP7751307B2 (ja) 2025-10-08

Family

ID=81381490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022559143A Active JP7751307B2 (ja) 2020-11-02 2021-10-26 Ｘ線光学装置

Country Status (2)

Country Link
JP (1) JP7751307B2 (https=)
WO (1) WO2022092060A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004158786A (ja) 2002-11-08 2004-06-03 Canon Inc 投影光学系及び露光装置
US20110141446A1 (en) 2009-11-26 2011-06-16 Carl Zeiss Smt Gmbh Projection objective
WO2017051890A1 (ja) 2015-09-25 2017-03-30 国立大学法人大阪大学 Ｘ線顕微鏡

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE169769T1 (de) * 1994-05-11 1998-08-15 Univ Colorado Roentgenstrahlungsoptik mit streifendem lichteinfall und sphaerischen spiegeln
WO1997016833A1 (en) * 1995-10-31 1997-05-09 Regents Of The University Of Colorado Spherical mirror grazing incidence x-ray optics
JPH08271697A (ja) * 1995-03-28 1996-10-18 Canon Inc Ｘ線顕微鏡用光学装置
US5512759A (en) * 1995-06-06 1996-04-30 Sweatt; William C. Condenser for illuminating a ringfield camera with synchrotron emission light
FR2788136B1 (fr) * 1998-12-31 2002-06-07 Europ De Systemes Optiques Soc Procede de realisation de surfaces de focalisation de faisceaux, notamment a incidence rasante et dispositif pour sa mise en oeuvre
JP6048867B2 (ja) * 2012-04-17 2016-12-21 国立大学法人大阪大学 Ｘ線光学システム
JP7314068B2 (ja) * 2020-01-24 2023-07-25 キオクシア株式会社 撮像装置、画像生成装置及び撮像方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004158786A (ja) 2002-11-08 2004-06-03 Canon Inc 投影光学系及び露光装置
US20110141446A1 (en) 2009-11-26 2011-06-16 Carl Zeiss Smt Gmbh Projection objective
WO2017051890A1 (ja) 2015-09-25 2017-03-30 国立大学法人大阪大学 Ｘ線顕微鏡

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Yamada,Jumpei et al.，Simulation of concave-convex imaging mirror system for development of a compact and achromatic full-field x-ray microscope，Applied Opyics，Vol.56,No.4，2017年02月01日，p.967-974

Also Published As

Publication number Publication date
WO2022092060A1 (ja) 2022-05-05
JPWO2022092060A1 (https=) 2022-05-05

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