JPWO2022092060A1 - - Google Patents
Info
- Publication number
- JPWO2022092060A1 JPWO2022092060A1 JP2022559143A JP2022559143A JPWO2022092060A1 JP WO2022092060 A1 JPWO2022092060 A1 JP WO2022092060A1 JP 2022559143 A JP2022559143 A JP 2022559143A JP 2022559143 A JP2022559143 A JP 2022559143A JP WO2022092060 A1 JPWO2022092060 A1 JP WO2022092060A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K7/00—Gamma- or X-ray microscopes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Lenses (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020183795 | 2020-11-02 | ||
| JP2020183795 | 2020-11-02 | ||
| PCT/JP2021/039424 WO2022092060A1 (ja) | 2020-11-02 | 2021-10-26 | Ｘ線光学装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022092060A1 true JPWO2022092060A1 (https=) | 2022-05-05 |
| JPWO2022092060A5 JPWO2022092060A5 (https=) | 2024-10-30 |
| JP7751307B2 JP7751307B2 (ja) | 2025-10-08 |
Family
ID=81381490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022559143A Active JP7751307B2 (ja) | 2020-11-02 | 2021-10-26 | Ｘ線光学装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7751307B2 (https=) |
| WO (1) | WO2022092060A1 (https=) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5512759A (en) * | 1995-06-06 | 1996-04-30 | Sweatt; William C. | Condenser for illuminating a ringfield camera with synchrotron emission light |
| JP2004158786A (ja) * | 2002-11-08 | 2004-06-03 | Canon Inc | 投影光学系及び露光装置 |
| US20110141446A1 (en) * | 2009-11-26 | 2011-06-16 | Carl Zeiss Smt Gmbh | Projection objective |
| WO2017051890A1 (ja) * | 2015-09-25 | 2017-03-30 | 国立大学法人大阪大学 | Ｘ線顕微鏡 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE169769T1 (de) * | 1994-05-11 | 1998-08-15 | Univ Colorado | Roentgenstrahlungsoptik mit streifendem lichteinfall und sphaerischen spiegeln |
| WO1997016833A1 (en) * | 1995-10-31 | 1997-05-09 | Regents Of The University Of Colorado | Spherical mirror grazing incidence x-ray optics |
| JPH08271697A (ja) * | 1995-03-28 | 1996-10-18 | Canon Inc | Ｘ線顕微鏡用光学装置 |
| FR2788136B1 (fr) * | 1998-12-31 | 2002-06-07 | Europ De Systemes Optiques Soc | Procede de realisation de surfaces de focalisation de faisceaux, notamment a incidence rasante et dispositif pour sa mise en oeuvre |
| JP6048867B2 (ja) * | 2012-04-17 | 2016-12-21 | 国立大学法人大阪大学 | Ｘ線光学システム |
| JP7314068B2 (ja) * | 2020-01-24 | 2023-07-25 | キオクシア株式会社 | 撮像装置、画像生成装置及び撮像方法 |
-
2021
- 2021-10-26 WO PCT/JP2021/039424 patent/WO2022092060A1/ja not_active Ceased
- 2021-10-26 JP JP2022559143A patent/JP7751307B2/ja active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5512759A (en) * | 1995-06-06 | 1996-04-30 | Sweatt; William C. | Condenser for illuminating a ringfield camera with synchrotron emission light |
| JP2004158786A (ja) * | 2002-11-08 | 2004-06-03 | Canon Inc | 投影光学系及び露光装置 |
| US20110141446A1 (en) * | 2009-11-26 | 2011-06-16 | Carl Zeiss Smt Gmbh | Projection objective |
| WO2017051890A1 (ja) * | 2015-09-25 | 2017-03-30 | 国立大学法人大阪大学 | Ｘ線顕微鏡 |
Non-Patent Citations (1)
| Title |
|---|
| YAMADA,JUMPEI ET AL.: "Simulation of concave-convex imaging mirror system for development of a compact and achromatic full-", APPLIED OPYICS, vol. 56, no. 4, JPN7025004028, 1 February 2017 (2017-02-01), pages 967 - 974, ISSN: 0005682975 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022092060A1 (ja) | 2022-05-05 |
| JP7751307B2 (ja) | 2025-10-08 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20241022 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20241022 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20250617 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20250909 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20250918 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7751307 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |