JPWO2022009313A1 - - Google Patents
Info
- Publication number
- JPWO2022009313A1 JPWO2022009313A1 JP2022534538A JP2022534538A JPWO2022009313A1 JP WO2022009313 A1 JPWO2022009313 A1 JP WO2022009313A1 JP 2022534538 A JP2022534538 A JP 2022534538A JP 2022534538 A JP2022534538 A JP 2022534538A JP WO2022009313 A1 JPWO2022009313 A1 JP WO2022009313A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
- B01D53/185—Liquid distributors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/70—Organic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biomedical Technology (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2020/026577 WO2022009313A1 (ja) | 2020-07-07 | 2020-07-07 | ガス処理炉及びこれを用いた排ガス処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2022009313A1 true JPWO2022009313A1 (ja) | 2022-01-13 |
JP7279985B2 JP7279985B2 (ja) | 2023-05-23 |
Family
ID=79552353
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022534538A Active JP7279985B2 (ja) | 2020-07-07 | 2020-07-07 | ガス処理炉及びこれを用いた排ガス処理装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20230233982A1 (ja) |
JP (1) | JP7279985B2 (ja) |
KR (1) | KR20230025435A (ja) |
CN (1) | CN115803102A (ja) |
TW (1) | TWI793614B (ja) |
WO (1) | WO2022009313A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116963820B (zh) * | 2022-01-28 | 2024-06-18 | 北京康肯环保设备有限公司 | 筒状加热部和具备该筒状加热部的废气处理装置 |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0221121A (ja) * | 1988-03-24 | 1990-01-24 | Polska An Inst Katalizy I Fizykochem Powiel | 有機化合物の触媒による燃焼方法および有機化合物の触媒による燃焼装置 |
JPH04215853A (ja) * | 1990-04-03 | 1992-08-06 | Ngk Insulators Ltd | 耐熱性金属質モノリス及びその製造方法 |
JPH0712321A (ja) * | 1993-06-14 | 1995-01-17 | Yutaka Kimoto | 焼却排ガス有害物質熱分解炉 |
JPH08318164A (ja) * | 1995-03-17 | 1996-12-03 | Hideo Kameyama | 触媒構造体、及びそれを用いたガス燃焼分解装置 |
JPH10263355A (ja) * | 1997-03-27 | 1998-10-06 | Toshio Awaji | 半導体製造工程の排ガス処理方法及び半導体製造工程の排ガス処理装置 |
US5871349A (en) * | 1997-10-16 | 1999-02-16 | Smith Engineering Company | Rotary valve thermal oxidizer |
WO2000013769A1 (fr) * | 1998-09-03 | 2000-03-16 | Kyowa Co.,Ltd. | Four de decomposition thermique pour gaz d'emission |
JP2002326018A (ja) * | 2001-05-08 | 2002-11-12 | Ryoji Watabe | 焼却炉の排ガス処理装置 |
JP2004156862A (ja) * | 2002-11-07 | 2004-06-03 | Kaoru Maruta | 火炎の制御方法、小型パルス燃焼器、並びにヒータ |
JP2006156792A (ja) * | 2004-11-30 | 2006-06-15 | Kanken Techno Co Ltd | 半導体製造装置の排ガス除害装置 |
WO2008096466A1 (ja) * | 2007-02-07 | 2008-08-14 | Kanken Techno Co., Ltd. | ガス処理装置及び該装置を用いたガス処理システムとガス処理方法 |
JP2009299947A (ja) * | 2008-06-11 | 2009-12-24 | Chugai Ro Co Ltd | 蓄熱式ガス処理炉 |
JP2015178938A (ja) * | 2014-03-19 | 2015-10-08 | 株式会社ビッグバイオ | 排ガス処理器及び熱分解装置 |
WO2015182094A1 (ja) * | 2014-05-26 | 2015-12-03 | カンケンテクノ株式会社 | 熱交換器及び該熱交換器を用いた排ガス処理装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3016690B2 (ja) | 1994-05-30 | 2000-03-06 | カンケンテクノ株式会社 | 半導体製造排ガス除害方法とその装置 |
TWM333948U (en) * | 2007-12-24 | 2008-06-11 | Green Energy And Resource Tech Co Ltd | An electric heated oxidizer, cylindrical dust/powder filtration and dust/powder collecting device |
CN202087224U (zh) * | 2011-04-28 | 2011-12-28 | 上海盛大环保科技有限公司 | 除尘、除湿、降温、除恶臭、降解VOCs多效净化机 |
CN206355806U (zh) * | 2016-12-16 | 2017-07-28 | 广西红润化工科技有限公司 | 湿法‑加热法联合处理的复合式多级废气处理装置 |
-
2020
- 2020-07-07 JP JP2022534538A patent/JP7279985B2/ja active Active
- 2020-07-07 WO PCT/JP2020/026577 patent/WO2022009313A1/ja active Application Filing
- 2020-07-07 KR KR1020237001035A patent/KR20230025435A/ko unknown
- 2020-07-07 CN CN202080102296.1A patent/CN115803102A/zh active Pending
- 2020-07-07 US US18/002,543 patent/US20230233982A1/en active Pending
-
2021
- 2021-05-26 TW TW110119012A patent/TWI793614B/zh active
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0221121A (ja) * | 1988-03-24 | 1990-01-24 | Polska An Inst Katalizy I Fizykochem Powiel | 有機化合物の触媒による燃焼方法および有機化合物の触媒による燃焼装置 |
JPH04215853A (ja) * | 1990-04-03 | 1992-08-06 | Ngk Insulators Ltd | 耐熱性金属質モノリス及びその製造方法 |
JPH0712321A (ja) * | 1993-06-14 | 1995-01-17 | Yutaka Kimoto | 焼却排ガス有害物質熱分解炉 |
JPH08318164A (ja) * | 1995-03-17 | 1996-12-03 | Hideo Kameyama | 触媒構造体、及びそれを用いたガス燃焼分解装置 |
JPH10263355A (ja) * | 1997-03-27 | 1998-10-06 | Toshio Awaji | 半導体製造工程の排ガス処理方法及び半導体製造工程の排ガス処理装置 |
US5871349A (en) * | 1997-10-16 | 1999-02-16 | Smith Engineering Company | Rotary valve thermal oxidizer |
WO2000013769A1 (fr) * | 1998-09-03 | 2000-03-16 | Kyowa Co.,Ltd. | Four de decomposition thermique pour gaz d'emission |
JP2002326018A (ja) * | 2001-05-08 | 2002-11-12 | Ryoji Watabe | 焼却炉の排ガス処理装置 |
JP2004156862A (ja) * | 2002-11-07 | 2004-06-03 | Kaoru Maruta | 火炎の制御方法、小型パルス燃焼器、並びにヒータ |
JP2006156792A (ja) * | 2004-11-30 | 2006-06-15 | Kanken Techno Co Ltd | 半導体製造装置の排ガス除害装置 |
WO2008096466A1 (ja) * | 2007-02-07 | 2008-08-14 | Kanken Techno Co., Ltd. | ガス処理装置及び該装置を用いたガス処理システムとガス処理方法 |
JP2009299947A (ja) * | 2008-06-11 | 2009-12-24 | Chugai Ro Co Ltd | 蓄熱式ガス処理炉 |
JP2015178938A (ja) * | 2014-03-19 | 2015-10-08 | 株式会社ビッグバイオ | 排ガス処理器及び熱分解装置 |
WO2015182094A1 (ja) * | 2014-05-26 | 2015-12-03 | カンケンテクノ株式会社 | 熱交換器及び該熱交換器を用いた排ガス処理装置 |
Also Published As
Publication number | Publication date |
---|---|
CN115803102A (zh) | 2023-03-14 |
TWI793614B (zh) | 2023-02-21 |
WO2022009313A1 (ja) | 2022-01-13 |
JP7279985B2 (ja) | 2023-05-23 |
KR20230025435A (ko) | 2023-02-21 |
US20230233982A1 (en) | 2023-07-27 |
TW202216272A (zh) | 2022-05-01 |
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