JPWO2022009313A1 - - Google Patents

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Publication number
JPWO2022009313A1
JPWO2022009313A1 JP2022534538A JP2022534538A JPWO2022009313A1 JP WO2022009313 A1 JPWO2022009313 A1 JP WO2022009313A1 JP 2022534538 A JP2022534538 A JP 2022534538A JP 2022534538 A JP2022534538 A JP 2022534538A JP WO2022009313 A1 JPWO2022009313 A1 JP WO2022009313A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022534538A
Other versions
JP7279985B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022009313A1 publication Critical patent/JPWO2022009313A1/ja
Application granted granted Critical
Publication of JP7279985B2 publication Critical patent/JP7279985B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/18—Absorbing units; Liquid distributors therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/18—Absorbing units; Liquid distributors therefor
    • B01D53/185—Liquid distributors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Treating Waste Gases (AREA)
JP2022534538A 2020-07-07 2020-07-07 ガス処理炉及びこれを用いた排ガス処理装置 Active JP7279985B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/026577 WO2022009313A1 (ja) 2020-07-07 2020-07-07 ガス処理炉及びこれを用いた排ガス処理装置

Publications (2)

Publication Number Publication Date
JPWO2022009313A1 true JPWO2022009313A1 (ja) 2022-01-13
JP7279985B2 JP7279985B2 (ja) 2023-05-23

Family

ID=79552353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022534538A Active JP7279985B2 (ja) 2020-07-07 2020-07-07 ガス処理炉及びこれを用いた排ガス処理装置

Country Status (6)

Country Link
US (1) US20230233982A1 (ja)
JP (1) JP7279985B2 (ja)
KR (1) KR20230025435A (ja)
CN (1) CN115803102A (ja)
TW (1) TWI793614B (ja)
WO (1) WO2022009313A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240082777A1 (en) * 2022-01-28 2024-03-14 Kanken Techno Co., Ltd. Cylindrical heating unit and exhaust gas processing device including the cylindrical heating unit

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0221121A (ja) * 1988-03-24 1990-01-24 Polska An Inst Katalizy I Fizykochem Powiel 有機化合物の触媒による燃焼方法および有機化合物の触媒による燃焼装置
JPH04215853A (ja) * 1990-04-03 1992-08-06 Ngk Insulators Ltd 耐熱性金属質モノリス及びその製造方法
JPH0712321A (ja) * 1993-06-14 1995-01-17 Yutaka Kimoto 焼却排ガス有害物質熱分解炉
JPH08318164A (ja) * 1995-03-17 1996-12-03 Hideo Kameyama 触媒構造体、及びそれを用いたガス燃焼分解装置
JPH10263355A (ja) * 1997-03-27 1998-10-06 Toshio Awaji 半導体製造工程の排ガス処理方法及び半導体製造工程の排ガス処理装置
US5871349A (en) * 1997-10-16 1999-02-16 Smith Engineering Company Rotary valve thermal oxidizer
WO2000013769A1 (fr) * 1998-09-03 2000-03-16 Kyowa Co.,Ltd. Four de decomposition thermique pour gaz d'emission
JP2002326018A (ja) * 2001-05-08 2002-11-12 Ryoji Watabe 焼却炉の排ガス処理装置
JP2004156862A (ja) * 2002-11-07 2004-06-03 Kaoru Maruta 火炎の制御方法、小型パルス燃焼器、並びにヒータ
JP2006156792A (ja) * 2004-11-30 2006-06-15 Kanken Techno Co Ltd 半導体製造装置の排ガス除害装置
WO2008096466A1 (ja) * 2007-02-07 2008-08-14 Kanken Techno Co., Ltd. ガス処理装置及び該装置を用いたガス処理システムとガス処理方法
JP2009299947A (ja) * 2008-06-11 2009-12-24 Chugai Ro Co Ltd 蓄熱式ガス処理炉
JP2015178938A (ja) * 2014-03-19 2015-10-08 株式会社ビッグバイオ 排ガス処理器及び熱分解装置
WO2015182094A1 (ja) * 2014-05-26 2015-12-03 カンケンテクノ株式会社 熱交換器及び該熱交換器を用いた排ガス処理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3016690B2 (ja) 1994-05-30 2000-03-06 カンケンテクノ株式会社 半導体製造排ガス除害方法とその装置
TWM333948U (en) * 2007-12-24 2008-06-11 Green Energy And Resource Tech Co Ltd An electric heated oxidizer, cylindrical dust/powder filtration and dust/powder collecting device
CN202087224U (zh) * 2011-04-28 2011-12-28 上海盛大环保科技有限公司 除尘、除湿、降温、除恶臭、降解VOCs多效净化机
CN206355806U (zh) * 2016-12-16 2017-07-28 广西红润化工科技有限公司 湿法‑加热法联合处理的复合式多级废气处理装置

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0221121A (ja) * 1988-03-24 1990-01-24 Polska An Inst Katalizy I Fizykochem Powiel 有機化合物の触媒による燃焼方法および有機化合物の触媒による燃焼装置
JPH04215853A (ja) * 1990-04-03 1992-08-06 Ngk Insulators Ltd 耐熱性金属質モノリス及びその製造方法
JPH0712321A (ja) * 1993-06-14 1995-01-17 Yutaka Kimoto 焼却排ガス有害物質熱分解炉
JPH08318164A (ja) * 1995-03-17 1996-12-03 Hideo Kameyama 触媒構造体、及びそれを用いたガス燃焼分解装置
JPH10263355A (ja) * 1997-03-27 1998-10-06 Toshio Awaji 半導体製造工程の排ガス処理方法及び半導体製造工程の排ガス処理装置
US5871349A (en) * 1997-10-16 1999-02-16 Smith Engineering Company Rotary valve thermal oxidizer
WO2000013769A1 (fr) * 1998-09-03 2000-03-16 Kyowa Co.,Ltd. Four de decomposition thermique pour gaz d'emission
JP2002326018A (ja) * 2001-05-08 2002-11-12 Ryoji Watabe 焼却炉の排ガス処理装置
JP2004156862A (ja) * 2002-11-07 2004-06-03 Kaoru Maruta 火炎の制御方法、小型パルス燃焼器、並びにヒータ
JP2006156792A (ja) * 2004-11-30 2006-06-15 Kanken Techno Co Ltd 半導体製造装置の排ガス除害装置
WO2008096466A1 (ja) * 2007-02-07 2008-08-14 Kanken Techno Co., Ltd. ガス処理装置及び該装置を用いたガス処理システムとガス処理方法
JP2009299947A (ja) * 2008-06-11 2009-12-24 Chugai Ro Co Ltd 蓄熱式ガス処理炉
JP2015178938A (ja) * 2014-03-19 2015-10-08 株式会社ビッグバイオ 排ガス処理器及び熱分解装置
WO2015182094A1 (ja) * 2014-05-26 2015-12-03 カンケンテクノ株式会社 熱交換器及び該熱交換器を用いた排ガス処理装置

Also Published As

Publication number Publication date
CN115803102A (zh) 2023-03-14
US20230233982A1 (en) 2023-07-27
TW202216272A (zh) 2022-05-01
JP7279985B2 (ja) 2023-05-23
WO2022009313A1 (ja) 2022-01-13
TWI793614B (zh) 2023-02-21
KR20230025435A (ko) 2023-02-21

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