JPWO2021236406A5

JPWO2021236406A5 -

Info

Publication number: JPWO2021236406A5
Application number: JP2022571145A
Authority: JP
Publication date: 2024-01-09

Claims

A method of attaching an annular seal to a fluid delivery module of a fluid supply line extending from a fluid source to a process chamber, the method comprising:
a) coupling a seal insertion tool loaded with an annular seal to a first substrate block of the fluid delivery module; aligning it over the port;
b) actuating the seal insertion tool, the seal insertion tool lowering the annular seal so that a lower portion of the annular seal surrounds a first fluid opening of the first fluid port; a step of pushing into the annular groove of No. 1;
Equipped with
The method characterized in that steps a) and b) are performed while the fluid delivery module is in situ within the fluid supply line.

Prior to step a), while the fluid delivery module is in situ within the fluid supply line, the method further comprises:
separating a first active flow component from the first substrate block of the fluid delivery module to expose the first fluid port on a first side of the first substrate block; one substrate block extending from the first fluid opening of the first fluid port to the second fluid opening of a second fluid port on the first substrate block. and,
removing the expired seal;
2. The method of claim 1, further comprising:

The active flow component includes a component block having a bottom surface and a first component on the bottom surface, the active flow component is coupled to the first substrate block of the fluid delivery module, and the area of the bottom surface is 3. The method of claim 2, wherein the seal insertion tool rests against the first surface of the first substrate block and has a footprint that fits within an area of the bottom surface of the component block. .

d) detaching the seal insertion tool from the first substrate block to expose the first fluid port while leaving the annular seal in the first annular groove;
e) pushing the top of said annular seal into a component annular groove of a component fluid port located on the bottom surface of a component block of said first active flow component, said annular seal opening said first fluid opening of said first fluid port; coupling the first active flow component to the first substrate block to hermetically seal a component fluid opening of the component fluid port at a location;
3. The method of claim 2, further comprising:

The fluid delivery module includes a plurality of anchors, the seal insertion tool is coupled to the first substrate block during step a), and the anchors are coupled to the first active flow during step e). 5. The method of claim 4, wherein the anchor is the same anchor used to couple the component to the first substrate block.

When the seal insertion tool is coupled to the first substrate block of the fluid delivery module according to step a), the footprint of the seal insertion tool fits within the footprint of the first substrate block. The method according to claim 1 .

the first substrate block comprising a second fluid port having a second fluid opening and a first fluid passageway extending between the first fluid opening and the second fluid opening;
the fluid delivery module comprising a second active flow component coupled to the first substrate block and fluidly coupled to the second fluid port;
further comprising;
While performing steps a) and b), the second active flow component remains fluidly coupled to the second fluid port;
7. A method according to any preceding claim , wherein the second fluid port is on the first surface .

further comprising the seal insertion tool comprising a pair of tool fasteners extending through fastener passages within the body of the seal insertion tool;
Step a) comprises: the first substrate block being configured to engage a corresponding pair of anchors disposed on either the first substrate block or a support structure of the fluid delivery module to which the first substrate block is attached; a step for actuating a pair of tool fasteners ;
the pair of tool fasteners are threaded tool fasteners, the pair of anchors are threaded anchors, and step a) includes rotating the pair of threaded tool fasteners to rotate the fluid delivery with the first substrate block attached. engaging the pair of threaded anchors disposed within the support structure of the module, the pair of threaded tool fasteners extending through a fastener passageway of the first substrate block. The method according to any one of claims 1 to 6 .

7. The first substrate block and the additional components of the fluid delivery module remain attached to the support structure of the fluid delivery module during steps a) and b). The method described in any one of the above.

Step b) is:
b-1) rotating an actuator of the seal insertion tool, thereby moving an end effector of the seal insertion tool loaded with an annular seal from a raised state to a lowered state; The method according to any one of claims 1 to 6 .

In the raised state, the annular seal is engaged and held by the end effector, and in the lowered state, the end effector forces the annular seal into the first annular groove, releases the annular seal, and 11. The method of claim 10 , wherein in a lowered state, an end surface of a plunger of the end effector contacts the first surface of the first substrate block .

The end effector includes a gripper slidably attached to a plunger having a plunger shaft and a plunger head disposed at a distal end of the plunger shaft, the gripper being slidably attached about the plunger shaft. 11. The method of claim 10 , comprising a plurality of grip fingers arranged in a row.

Prior to step a), loading the annular seal onto the end effector by inserting the annular seal between the plurality of grip fingers, the grip fingers applying a radially inward force on the annular seal; further comprising engaging and retaining the annular seal with the end effector such that the gripper is in a lowered position relative to the end effector;
when the seal insertion tool is coupled to the first substrate block, the grip fingers contact or are on the first surface of the first substrate block;
Step b) includes rotating the actuator of the seal insertion tool, thereby lowering the plunger of the end effector, sliding the plunger relative to the gripper and moving the lower part of the annular seal into the first annular groove. 13. A method as claimed in claim 12 , comprising the step of pushing into.

3. During step b), the gripping fingers are deflected radially outwardly by camming between an inner surface of the gripping fingers and at least one of the annular seal or the plunger. The method described in 13 .

The annular seal includes an outer upright ring wall, an inner upright ring wall, and a flange extending between the inner upright ring wall and the outer upright ring wall, and the seal insertion tool performs step b). 7. A method as claimed in any one of claims 1 to 6 , characterized in that no vertical compressive force is exerted on the inner upright ring wall during the execution of the process.

16. A method according to claim 15 , characterized in that during step b) the seal insertion tool does not contact the inner upright ring wall.

A method of replacing an annular seal in a fluid delivery module, the method comprising:
a) disconnecting a first active flow component from a first substrate block of the fluid delivery module by releasing one or more component fasteners each engaging one or more anchors of the fluid delivery module; exposing a first fluid port on a first surface of the first substrate block by
b) removing the expired seal;
c) coupling a seal insertion tool to the first substrate block by actuating one or more tool fasteners to engage the one or more anchors of the fluid delivery module;
d) an annular seal aligned with the first fluid port is pushed into a first annular groove of the first fluid port surrounding a first fluid opening of the first fluid port; activating a seal insertion tool;
A method of providing

e) detaching the seal insertion tool from the first substrate block to expose the first fluid port while leaving the annular seal in the first annular groove;
f) coupling the first active flow component to the first substrate block by actuating the one or more component fasteners into engagement with the one or more anchors, thereby the upper portion is pushed into a component annular groove of a component fluid port disposed on the bottom surface of a component block of the first active flow component, and the annular seal is pressed against the component fluid opening of the component fluid port of the first active flow component. hermetically sealing the first fluid opening of the fluid port of;
18. The method of claim 17 , further comprising:

The main body and
a pair of fasteners for coupling the body to a fluid delivery module;
an end effector slidably attached to the body, the end effector configured to receive and retain an annular seal;
an actuator operably coupled to the end effector and configured to change the end effector from a raised state to a lowered state upon actuation of the actuator by a user;
A seal insertion tool comprising:

The actuator is
a user engagement component;
a threaded drive shaft non-rotatably coupled to the user-engaging component such that rotation of the user-engaging component causes rotation of a corresponding threaded drive shaft;
a threaded collar attached and fixed to the body, the threaded collar being configured such that rotation of the threaded drive shaft causes the threaded drive shaft to move axially relative to the body and the threaded collar; a threaded collar, wherein a drive shaft is threadedly engaged with the threaded collar;
20. The seal insertion tool of claim 19 , further comprising: