JPWO2021235283A5 - - Google Patents
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- Publication number
- JPWO2021235283A5 JPWO2021235283A5 JP2022524405A JP2022524405A JPWO2021235283A5 JP WO2021235283 A5 JPWO2021235283 A5 JP WO2021235283A5 JP 2022524405 A JP2022524405 A JP 2022524405A JP 2022524405 A JP2022524405 A JP 2022524405A JP WO2021235283 A5 JPWO2021235283 A5 JP WO2021235283A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- carbon atoms
- radiation
- atom
- salt compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020086750 | 2020-05-18 | ||
| JP2020086750 | 2020-05-18 | ||
| PCT/JP2021/017999 WO2021235283A1 (ja) | 2020-05-18 | 2021-05-12 | 感放射線性樹脂組成物、パターン形成方法及びオニウム塩化合物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021235283A1 JPWO2021235283A1 (https=) | 2021-11-25 |
| JPWO2021235283A5 true JPWO2021235283A5 (https=) | 2023-02-01 |
| JP7717060B2 JP7717060B2 (ja) | 2025-08-01 |
Family
ID=78707859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022524405A Active JP7717060B2 (ja) | 2020-05-18 | 2021-05-12 | 感放射線性樹脂組成物、パターン形成方法及びオニウム塩化合物 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7717060B2 (https=) |
| TW (1) | TW202146390A (https=) |
| WO (1) | WO2021235283A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW202402722A (zh) * | 2022-07-14 | 2024-01-16 | 美商羅門哈斯電子材料有限公司 | 光活性化合物、包含其之光阻劑組成物及圖案形成方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006083687A1 (en) | 2005-01-28 | 2006-08-10 | Cardiome Pharma Corp. | Crystal salt of xanthine oxidase inhibitors |
| JP5568532B2 (ja) | 2011-09-22 | 2014-08-06 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、並びに、これを用いたレジスト膜、パターン形成方法、電子デバイスの製造方法、及び、電子デバイス |
| EP3761117A4 (en) | 2018-03-27 | 2021-05-12 | Tokyo Ohka Kogyo Co., Ltd. | METHOD OF MANUFACTURING A PLATED SHAPED BODY |
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2021
- 2021-05-12 WO PCT/JP2021/017999 patent/WO2021235283A1/ja not_active Ceased
- 2021-05-12 JP JP2022524405A patent/JP7717060B2/ja active Active
- 2021-05-14 TW TW110117391A patent/TW202146390A/zh unknown