JPWO2021210087A1 - - Google Patents
Info
- Publication number
- JPWO2021210087A1 JPWO2021210087A1 JP2022514912A JP2022514912A JPWO2021210087A1 JP WO2021210087 A1 JPWO2021210087 A1 JP WO2021210087A1 JP 2022514912 A JP2022514912 A JP 2022514912A JP 2022514912 A JP2022514912 A JP 2022514912A JP WO2021210087 A1 JPWO2021210087 A1 JP WO2021210087A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/222—Image processing arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20292—Means for position and/or orientation registration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2020/016525 WO2021210087A1 (ja) | 2020-04-15 | 2020-04-15 | 搬送装置および解析システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021210087A1 true JPWO2021210087A1 (https=) | 2021-10-21 |
| JPWO2021210087A5 JPWO2021210087A5 (https=) | 2023-01-10 |
| JP7322284B2 JP7322284B2 (ja) | 2023-08-07 |
Family
ID=78083575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022514912A Active JP7322284B2 (ja) | 2020-04-15 | 2020-04-15 | 搬送装置および解析システム |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12586751B2 (https=) |
| JP (1) | JP7322284B2 (https=) |
| KR (1) | KR102734341B1 (https=) |
| TW (2) | TWI745250B (https=) |
| WO (1) | WO2021210087A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7322284B2 (ja) * | 2020-04-15 | 2023-08-07 | 株式会社日立ハイテク | 搬送装置および解析システム |
| JP7842907B2 (ja) * | 2023-01-31 | 2026-04-08 | 株式会社日立ハイテク | 搬送方法、搬送装置および解析システム |
| WO2024257241A1 (ja) * | 2023-06-13 | 2024-12-19 | 株式会社日立ハイテク | 搬送容器 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61101945A (ja) * | 1984-10-24 | 1986-05-20 | Hitachi Ltd | 電子顕微鏡の試料ホルダ− |
| JPH1064473A (ja) * | 1996-06-13 | 1998-03-06 | Hitachi Ltd | 試料評価・処理観察システム |
| JP2010257617A (ja) * | 2009-04-22 | 2010-11-11 | Hitachi High-Technologies Corp | 試料ホールダ，該試料ホールダの使用法、及び荷電粒子装置 |
| JP2011080869A (ja) * | 2009-10-07 | 2011-04-21 | Bridgestone Corp | 試験片の観察用メッシュ及び試験片の観察方法 |
| JP2014056785A (ja) * | 2012-09-14 | 2014-03-27 | Hitachi High-Technologies Corp | 荷電粒子線装置及び試料観察方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58169762A (ja) * | 1982-03-30 | 1983-10-06 | Internatl Precision Inc | 電子線装置 |
| US5783830A (en) * | 1996-06-13 | 1998-07-21 | Hitachi, Ltd. | Sample evaluation/process observation system and method |
| NL1022426C2 (nl) * | 2003-01-17 | 2004-07-26 | Fei Co | Werkwijze voor het vervaardigen en transmissief bestralen van een preparaat alsmede deeltjes optisch systeem. |
| JP4636897B2 (ja) * | 2005-02-18 | 2011-02-23 | 株式会社日立ハイテクサイエンスシステムズ | 走査電子顕微鏡 |
| JP4923716B2 (ja) * | 2006-05-11 | 2012-04-25 | 株式会社日立製作所 | 試料分析装置および試料分析方法 |
| JP4205122B2 (ja) * | 2006-07-19 | 2009-01-07 | 株式会社日立ハイテクノロジーズ | 荷電粒子線加工装置 |
| JP5410286B2 (ja) | 2006-10-20 | 2014-02-05 | エフ・イ−・アイ・カンパニー | Ｓ／ｔｅｍのサンプルを作成する方法およびサンプル構造 |
| JP5476115B2 (ja) | 2009-12-21 | 2014-04-23 | 日本電子株式会社 | グリッドを用いた試料ホルダ |
| US9601305B2 (en) | 2013-11-11 | 2017-03-21 | Howard Hughes Medical Institute | Specimen sample holder for workpiece transport apparatus |
| JP6711655B2 (ja) * | 2016-03-18 | 2020-06-17 | 株式会社日立ハイテクサイエンス | 集束イオンビーム装置 |
| JP6636839B2 (ja) * | 2016-03-28 | 2020-01-29 | 株式会社日立ハイテクサイエンス | 試料ホルダー、集束イオンビーム装置 |
| DE112016006484B4 (de) * | 2016-03-31 | 2022-02-03 | Hitachi, Ltd. | Ladungsträgerstrahlvorrichtung sowie Steuerverfahren |
| CN111033676B (zh) * | 2017-09-04 | 2022-08-30 | 株式会社日立高新技术 | 带电粒子线装置 |
| JP2019145304A (ja) * | 2018-02-20 | 2019-08-29 | 株式会社日立ハイテクサイエンス | 荷電粒子ビーム装置、荷電粒子ビーム装置のステージ駆動範囲制限方法およびプログラム |
| WO2019207707A1 (ja) * | 2018-04-26 | 2019-10-31 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| DE112018007565B4 (de) * | 2018-07-02 | 2024-02-08 | Hitachi High-Tech Corporation | Rasterelektronenmikroskop |
| JP7212592B2 (ja) * | 2019-07-12 | 2023-01-25 | 株式会社荏原製作所 | 調整方法及び電子線装置 |
| US12347707B2 (en) * | 2020-02-27 | 2025-07-01 | Hitachi High-Tech Corporation | Semiconductor analysis system |
| JP7322284B2 (ja) * | 2020-04-15 | 2023-08-07 | 株式会社日立ハイテク | 搬送装置および解析システム |
| JP2025101945A (ja) | 2023-12-26 | 2025-07-08 | 株式会社クボタ | 作業車両 |
-
2020
- 2020-04-15 JP JP2022514912A patent/JP7322284B2/ja active Active
- 2020-04-15 KR KR1020227034356A patent/KR102734341B1/ko active Active
- 2020-04-15 US US17/917,973 patent/US12586751B2/en active Active
- 2020-04-15 WO PCT/JP2020/016525 patent/WO2021210087A1/ja not_active Ceased
-
2021
- 2021-03-12 TW TW110108832A patent/TWI745250B/zh active
- 2021-03-12 TW TW110137003A patent/TWI765830B/zh active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61101945A (ja) * | 1984-10-24 | 1986-05-20 | Hitachi Ltd | 電子顕微鏡の試料ホルダ− |
| JPH1064473A (ja) * | 1996-06-13 | 1998-03-06 | Hitachi Ltd | 試料評価・処理観察システム |
| JP2010257617A (ja) * | 2009-04-22 | 2010-11-11 | Hitachi High-Technologies Corp | 試料ホールダ，該試料ホールダの使用法、及び荷電粒子装置 |
| JP2011080869A (ja) * | 2009-10-07 | 2011-04-21 | Bridgestone Corp | 試験片の観察用メッシュ及び試験片の観察方法 |
| JP2014056785A (ja) * | 2012-09-14 | 2014-03-27 | Hitachi High-Technologies Corp | 荷電粒子線装置及び試料観察方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI745250B (zh) | 2021-11-01 |
| TWI765830B (zh) | 2022-05-21 |
| KR102734341B1 (ko) | 2024-11-27 |
| TW202205508A (zh) | 2022-02-01 |
| US12586751B2 (en) | 2026-03-24 |
| JP7322284B2 (ja) | 2023-08-07 |
| US20230126577A1 (en) | 2023-04-27 |
| TW202141674A (zh) | 2021-11-01 |
| WO2021210087A1 (ja) | 2021-10-21 |
| KR20220151185A (ko) | 2022-11-14 |
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