JPWO2021200227A1 - - Google Patents

Info

Publication number
JPWO2021200227A1
JPWO2021200227A1 JP2022511891A JP2022511891A JPWO2021200227A1 JP WO2021200227 A1 JPWO2021200227 A1 JP WO2021200227A1 JP 2022511891 A JP2022511891 A JP 2022511891A JP 2022511891 A JP2022511891 A JP 2022511891A JP WO2021200227 A1 JPWO2021200227 A1 JP WO2021200227A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022511891A
Other versions
JP7376959B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021200227A1 publication Critical patent/JPWO2021200227A1/ja
Application granted granted Critical
Publication of JP7376959B2 publication Critical patent/JP7376959B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0694—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means or flow sources of very small size, e.g. microfluidics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F22/00—Methods or apparatus for measuring volume of fluids or fluent solid material, not otherwise provided for
    • G01F22/02—Methods or apparatus for measuring volume of fluids or fluent solid material, not otherwise provided for involving measurement of pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/416—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control of velocity, acceleration or deceleration
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41108—Controlled parameter such as gas mass flow rate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2022511891A 2020-03-30 2021-03-18 ガス供給量測定方法およびガス供給量制御方法 Active JP7376959B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020060171 2020-03-30
JP2020060171 2020-03-30
PCT/JP2021/011117 WO2021200227A1 (ja) 2020-03-30 2021-03-18 ガス供給量測定方法およびガス供給量制御方法

Publications (2)

Publication Number Publication Date
JPWO2021200227A1 true JPWO2021200227A1 (ja) 2021-10-07
JP7376959B2 JP7376959B2 (ja) 2023-11-09

Family

ID=77928827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022511891A Active JP7376959B2 (ja) 2020-03-30 2021-03-18 ガス供給量測定方法およびガス供給量制御方法

Country Status (5)

Country Link
US (1) US20230121563A1 (ja)
JP (1) JP7376959B2 (ja)
KR (1) KR20220104825A (ja)
TW (1) TWI786577B (ja)
WO (1) WO2021200227A1 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019021948A1 (ja) * 2017-07-25 2019-01-31 株式会社フジキン 流体制御装置
JP2019016096A (ja) * 2017-07-05 2019-01-31 株式会社堀場エステック 流体制御装置、流体制御方法、及び、流体制御装置用プログラム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS601749B2 (ja) 1977-06-17 1985-01-17 ティーディーケイ株式会社 マグネトロン発振装置
JP5082989B2 (ja) * 2008-03-31 2012-11-28 日立金属株式会社 流量制御装置、その検定方法及び流量制御方法
JP5768186B2 (ja) 2012-05-31 2015-08-26 株式会社フジキン ビルドダウン方式流量モニタ付流量制御装置及びこれを用いたモニタ付流量制御方法。
JP6230809B2 (ja) * 2013-04-22 2017-11-15 株式会社日立国際電気 半導体装置の製造方法、基板処理装置およびプログラム
US10866135B2 (en) * 2018-03-26 2020-12-15 Applied Materials, Inc. Methods, systems, and apparatus for mass flow verification based on rate of pressure decay

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019016096A (ja) * 2017-07-05 2019-01-31 株式会社堀場エステック 流体制御装置、流体制御方法、及び、流体制御装置用プログラム
WO2019021948A1 (ja) * 2017-07-25 2019-01-31 株式会社フジキン 流体制御装置

Also Published As

Publication number Publication date
WO2021200227A1 (ja) 2021-10-07
JP7376959B2 (ja) 2023-11-09
TW202146855A (zh) 2021-12-16
US20230121563A1 (en) 2023-04-20
TWI786577B (zh) 2022-12-11
KR20220104825A (ko) 2022-07-26

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