JPWO2021181742A5 - - Google Patents
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- Publication number
- JPWO2021181742A5 JPWO2021181742A5 JP2021540202A JP2021540202A JPWO2021181742A5 JP WO2021181742 A5 JPWO2021181742 A5 JP WO2021181742A5 JP 2021540202 A JP2021540202 A JP 2021540202A JP 2021540202 A JP2021540202 A JP 2021540202A JP WO2021181742 A5 JPWO2021181742 A5 JP WO2021181742A5
- Authority
- JP
- Japan
- Prior art keywords
- outer housing
- housing portion
- container body
- engaging
- inner housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 13
- 230000002093 peripheral effect Effects 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000007789 sealing Methods 0.000 claims 2
- 230000000007 visual effect Effects 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2020/039851 WO2021181742A1 (ja) | 2020-10-23 | 2020-10-23 | 基板収納容器及びその製造方法並びにフィルタ部 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021181742A1 JPWO2021181742A1 (https=) | 2021-09-16 |
| JPWO2021181742A5 true JPWO2021181742A5 (https=) | 2023-07-24 |
| JP7383712B2 JP7383712B2 (ja) | 2023-11-20 |
Family
ID=77671492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021540202A Active JP7383712B2 (ja) | 2020-10-23 | 2020-10-23 | 基板収納容器及びその製造方法並びにフィルタ部 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11820575B2 (https=) |
| JP (1) | JP7383712B2 (https=) |
| KR (1) | KR102589549B1 (https=) |
| CN (1) | CN114667599A (https=) |
| TW (1) | TWI827982B (https=) |
| WO (1) | WO2021181742A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102798614B1 (ko) * | 2021-06-21 | 2025-04-18 | 미라이얼 가부시키가이샤 | 기판수납용기 |
| US20250029857A1 (en) * | 2023-07-21 | 2025-01-23 | Entegris, Inc. | Module retainer |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4204302B2 (ja) | 2002-10-25 | 2009-01-07 | 信越ポリマー株式会社 | 収納容器 |
| KR100607302B1 (ko) * | 2002-10-25 | 2006-07-31 | 신에츠 폴리머 가부시키가이샤 | 기판 수납 용기 |
| JP4482655B2 (ja) * | 2005-04-22 | 2010-06-16 | ゴールド工業株式会社 | 精密基板収納容器のガスケット |
| JP4859065B2 (ja) | 2007-10-23 | 2012-01-18 | 信越ポリマー株式会社 | 基板収納容器 |
| JP4895222B2 (ja) | 2008-03-31 | 2012-03-14 | 信越ポリマー株式会社 | 基板収納容器 |
| JP6450156B2 (ja) | 2014-11-12 | 2019-01-09 | ミライアル株式会社 | ガスパージ用フィルタ |
| KR102430081B1 (ko) | 2015-11-26 | 2022-08-05 | 미라이얼 가부시키가이샤 | 기판 수납 용기 |
| WO2018047541A1 (ja) * | 2016-09-06 | 2018-03-15 | 信越ポリマー株式会社 | 基板収納容器及び気体置換ユニット |
| WO2018203384A1 (ja) * | 2017-05-02 | 2018-11-08 | ミライアル株式会社 | 基板収納容器 |
| DE112018003608T5 (de) * | 2017-07-14 | 2020-04-16 | Shin-Etsu Polymer Co., Ltd. | Substratlagerungsbehälter |
| KR102524025B1 (ko) | 2018-02-19 | 2023-04-21 | 미라이얼 가부시키가이샤 | 가스 퍼지용 포트 |
| JP7147116B2 (ja) * | 2018-03-28 | 2022-10-05 | 信越ポリマー株式会社 | 基板収納容器 |
| CN112074944B (zh) | 2018-04-25 | 2024-07-05 | 未来儿股份有限公司 | 基板收纳容器 |
-
2020
- 2020-10-23 US US17/598,701 patent/US11820575B2/en active Active
- 2020-10-23 CN CN202080025655.8A patent/CN114667599A/zh active Pending
- 2020-10-23 WO PCT/JP2020/039851 patent/WO2021181742A1/ja not_active Ceased
- 2020-10-23 JP JP2021540202A patent/JP7383712B2/ja active Active
- 2020-10-23 KR KR1020217030934A patent/KR102589549B1/ko active Active
-
2021
- 2021-09-29 TW TW110136230A patent/TWI827982B/zh active
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