WO2021181742A1 - 基板収納容器及びその製造方法並びにフィルタ部 - Google Patents

基板収納容器及びその製造方法並びにフィルタ部 Download PDF

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Publication number
WO2021181742A1
WO2021181742A1 PCT/JP2020/039851 JP2020039851W WO2021181742A1 WO 2021181742 A1 WO2021181742 A1 WO 2021181742A1 JP 2020039851 W JP2020039851 W JP 2020039851W WO 2021181742 A1 WO2021181742 A1 WO 2021181742A1
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WO
WIPO (PCT)
Prior art keywords
housing portion
outer housing
container body
opening
engaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2020/039851
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
和彦 荒牧
侑矢 成田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miraial Co Ltd
Original Assignee
Miraial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miraial Co Ltd filed Critical Miraial Co Ltd
Priority to JP2021540202A priority Critical patent/JP7383712B2/ja
Priority to PCT/JP2020/039851 priority patent/WO2021181742A1/ja
Priority to CN202080025655.8A priority patent/CN114667599A/zh
Priority to KR1020217030934A priority patent/KR102589549B1/ko
Priority to US17/598,701 priority patent/US11820575B2/en
Publication of WO2021181742A1 publication Critical patent/WO2021181742A1/ja
Priority to TW110136230A priority patent/TWI827982B/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
    • H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/02—Containers, packaging elements or packages, specially adapted for particular articles or materials for annular articles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1914—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by locking systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1916—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by sealing arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2581/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D2581/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D2581/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • B65D2581/051—Details of packaging elements for maintaining contents at spaced relation from package walls, or from other contents

Definitions

  • the present invention relates to a substrate storage container used for storing, storing, transporting, transporting, etc. a substrate made of a semiconductor wafer or the like, a method for manufacturing the same, and a filter unit provided in the substrate storage container.
  • a container having a container body and a lid As a substrate storage container for storing a substrate made of a semiconductor wafer and transporting it in a process in a factory, a container having a container body and a lid has been conventionally known.
  • One end of the container body has an opening peripheral portion on which the container body opening is formed.
  • the other end of the container body has a closed tubular wall.
  • a substrate storage space is formed in the container body.
  • the board storage space is formed by being surrounded by a wall portion, and can store the board.
  • the lid is removable from the peripheral edge of the opening and can close the opening of the container body.
  • the side substrate support portions are provided on the wall portion so as to form a pair in the substrate storage space.
  • the side substrate support portion can support the edge portion of the substrate in a state where the adjacent substrates are separated from each other at a predetermined interval and arranged in parallel when the opening of the container body is not closed by the lid.
  • a front retainer is provided in the part of the lid that faces the board storage space when the opening of the container body is closed.
  • the front retainer can support the edge of the substrate when the container body opening is closed by the lid.
  • the back side substrate support portion is provided on the wall portion so as to be paired with the front retainer.
  • the back side substrate support portion can support the edge portion of the substrate.
  • the board storage container has "a ventilation path that allows communication between the board storage space and the space outside the container body, a filter arranged in the ventilation path, and a housing forming the ventilation path, and is arranged in the container body. It may be provided with a "filter portion” that allows gas to pass between the space outside the container body and the substrate storage space through the filter (see, for example, Patent Document 1 and Patent Document 2).
  • the housing includes an outer housing portion and an inner housing portion that is at least partially disposed inside the outer housing portion and fastened to the outer housing portion.
  • the inner housing portion has a male screw portion at a portion arranged inside the outer housing portion, and the outer housing portion has a female screw portion that meshes with the male screw portion.
  • a predetermined fastening torque is set between the inner housing portion and the outer housing portion, and the inner housing portion and the outer housing portion are fastened with a torque wrench.
  • the present invention includes a substrate storage having a filter portion having a ventilation path capable of communicating the substrate storage space and the space outside the container body, a filter arranged in the ventilation path, and a housing forming the ventilation path.
  • the fastening position is normal when the housing includes an outer housing portion and an inner housing portion which is at least partially arranged inside the outer housing portion and is fastened to the outer housing portion. It is an object of the present invention to provide a substrate storage container in which it can be easily confirmed whether or not it is present. Another object of the present invention is to provide a method for manufacturing a substrate storage container for manufacturing the substrate storage container and the filter unit provided on the substrate storage container.
  • the present invention has an opening peripheral edge portion in which a container body opening is formed at one end, and has a tubular wall portion in which the other end is closed, and the substrate can be stored by the inner surface of the wall portion. It is removable from the container body in which the substrate storage space communicating with the container body opening is formed and the opening peripheral edge portion, and the container body opening can be closed in a positional relationship surrounded by the opening peripheral edge portion. It is attached to the lid body and the lid body, can be in contact with the lid body and the opening peripheral edge portion, and is interposed between the opening peripheral edge portion and the lid body to the opening peripheral edge portion and the lid body.
  • a seal member that closes the opening of the container body together with the lid by being in close contact with the lid, a ventilation path that can communicate the substrate storage space and the space outside the container body, and the ventilation path are arranged.
  • a filter having a filter and a housing forming the air passage, which is arranged in the container body and allows gas to pass between the space outside the container body and the substrate storage space through the filter.
  • the inner housing portion comprises an outer housing portion and an inner housing portion that is at least partially disposed inside the outer housing portion and fastened to the outer housing portion.
  • the outer housing portion has a female screw portion that meshes with the male screw portion, and the inner housing portion has the outer housing portion.
  • the outer housing portion has the first engaging portion in the portion arranged inside the portion where the male screw portion does not exist, and the outer housing portion has the first engagement portion in the portion where the female screw portion does not exist. It has a second engaging portion that engages with the joint portion, and when the inner housing portion and the outer housing portion are tightened, the first engaging portion and the second engaging portion can be visually distinguished from each other. Concerning the substrate storage container, which is configured in.
  • the outer housing portion includes the first engaging portion and the second engaging portion in a circumferential range around the rotation axis of the female screw portion. It is preferable that it is configured so that it can be visually identified.
  • the present invention is a method for manufacturing a substrate storage container for manufacturing the substrate storage container, wherein the housing is joined to the side of the substrate storage space in the inner housing portion with the filter sandwiched therein.
  • the present invention relates to a method for manufacturing a substrate storage container, which further comprises parts and tightens the inner housing portion and the outer housing portion by rotating the outer housing portion in a state where the inner housing portion is fixed.
  • the present invention has an opening peripheral edge portion in which a container body opening is formed at one end, and has a tubular wall portion in which the other end is closed, and the substrate can be stored by the inner surface of the wall portion. It is removable from the container body in which the substrate storage space communicating with the container body opening is formed and the opening peripheral edge portion, and the container body opening can be closed in a positional relationship surrounded by the opening peripheral edge portion. It is attached to the lid body and the lid body, can be in contact with the lid body and the opening peripheral edge portion, and is interposed between the opening peripheral edge portion and the lid body to the opening peripheral edge portion and the lid body.
  • the inner housing portion has a male screw portion at a portion arranged inside the outer housing portion, and the outer housing portion has a female screw portion that meshes with the male screw portion.
  • the inner housing portion has a first engaging portion at a portion that is arranged inside the outer housing portion and the male screw portion does not exist, and the outer housing portion has.
  • a second engaging portion that engages with the first engaging portion is provided at a portion where the female screw portion does not exist, and when the inner housing portion and the outer housing portion are tightened, the first engaging portion and the first engaging portion are used.
  • the second engaging portion relates to a filter portion that is configured to be visually identifiable.
  • the outer housing portion includes the first engaging portion and the second engaging portion in a circumferential range around the rotation axis of the female screw portion. It is preferable that it is configured so that it can be visually identified.
  • the present invention includes a filter portion having a ventilation path capable of communicating the substrate storage space and the space outside the container body, a filter arranged in the ventilation path, and a housing forming the ventilation path.
  • the housing when the housing includes an outer housing portion and an inner housing portion that is at least partially arranged inside the outer housing portion and is fastened to the outer housing portion, a normal fastening position. It is possible to provide a substrate storage container that can be easily confirmed as to whether or not it is. Further, the present invention can provide a method for manufacturing a substrate storage container for manufacturing the substrate storage container and the filter unit.
  • FIG. 5 is an exploded perspective view showing a state in which a plurality of substrates W are stored in the substrate storage container 1 according to the embodiment of the present invention. It is an upper perspective view which shows the container body 2 of the substrate storage container 1 which concerns on embodiment of this invention. It is a lower perspective view which shows the container body 2 of the substrate storage container 1 which concerns on embodiment of this invention. It is a side sectional view which shows the container body 2 cut by the line AA of FIG. It is a side sectional view which shows the exhaust filter part 90 of the substrate storage container 1 which concerns on embodiment of this invention. It is a lower perspective view which shows the exhaust filter part 90 of the substrate storage container 1 which concerns on embodiment of this invention.
  • FIG. 1 It is an exploded perspective view which shows the exhaust filter part 90 of the substrate storage container 1 which concerns on embodiment of this invention. It is a lower perspective view which shows the inner housing part 92 of the exhaust filter part 90. It is a side view which shows the inner housing part 92 of the exhaust filter part 90. It is a top view which shows the outer housing part 94 of the exhaust filter part 90. It is a side sectional view which shows the outer housing part 94 cut by the line BB of FIG. It is a partial transmission side view which shows the 1st positional relationship in the circumferential direction between the inner housing part 92 and the outer housing part 94 about the exhaust filter part 90.
  • FIG. 5 is a cross-sectional view taken along the line CC of FIG.
  • FIG. 1 is an exploded perspective view showing a state in which a plurality of substrates W are stored in the substrate storage container 1.
  • FIG. 2 is an upward perspective view showing the container body 2 of the substrate storage container 1.
  • FIG. 3 is a downward perspective view showing the container body 2 of the substrate storage container 1.
  • FIG. 4 is a side sectional view showing the container body 2 cut along the line AA of FIG.
  • the direction from the container body 2 to the lid 3 (the direction from the upper right to the lower left in FIG. 1) described later is defined as the front direction D11, and the opposite direction is defined as the rear direction D12. These are collectively defined as the front-back direction D1.
  • the direction from the lower wall 24 to the upper wall 23 (upward direction in FIG. 1), which will be described later, is defined as the upward direction D21, and the opposite direction is defined as the downward direction D22, which are collectively referred to as the vertical direction D2.
  • the direction from the second side wall 26 to the first side wall 25 (the direction from the lower right to the upper left in FIG. 1), which will be described later, is defined as the left direction D31, and the opposite direction is defined as the right direction D32.
  • the main drawings show arrows pointing in these directions.
  • the substrate storage container 1 can be used as an in-process container for storing a substrate W made of a silicon wafer as described above and transporting the substrate W in a process in a factory, or by land transportation means / air transportation. It is used as a shipping container for transporting a substrate by means of transportation such as means and shipping means, and is composed of a container body 2 and a lid 3.
  • the container main body 2 includes a substrate support plate-shaped portion 5 as a side substrate support portion and a back side substrate support portion 6.
  • the lid body 3 includes a front retainer (not shown) as a cover body side substrate support portion.
  • the container body 2 has a tubular wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed.
  • a substrate storage space 27 is formed in the container body 2.
  • the substrate storage space 27 is formed by being surrounded by the wall portion 20.
  • a substrate support plate-like portion 5 is arranged in a portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1, a plurality of boards W can be stored in the board storage space 27.
  • the substrate support plate-shaped portions 5 are provided on the wall portions 20 so as to form a pair in the substrate storage space 27.
  • the substrate support plate-shaped portion 5 can support the edges of the plurality of substrates W in a state where the adjacent substrates W are separated from each other at a predetermined interval and arranged in parallel by contacting the edges of the plurality of substrates W. Is.
  • the back-side substrate support portion 6 is integrally molded with the substrate support plate-shaped portion 5.
  • the back side board support portion 6 is provided on the wall portion 20 so as to be paired with a front retainer (not shown) described later in the board storage space 27.
  • the back side substrate support portion 6 can support the rear portion of the edge portions of the plurality of substrates W by abutting on the edge portions of the plurality of substrate Ws.
  • the lid 3 is removable from the opening peripheral edge 28 forming the container body opening 21, and can close the container body opening 21.
  • a front retainer (not shown) is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3.
  • the front retainer is arranged so as to be paired with the back side board support portion 6 inside the board storage space 27.
  • the front retainer can support the front portion of the edges of the plurality of substrates W by abutting against the edges of the plurality of substrates W.
  • the front retainer supports a plurality of substrates W in cooperation with the back-side substrate support portion 6, thereby supporting adjacent substrates W with each other. Hold in parallel with a gap.
  • the substrate storage container 1 is made of a resin such as a plastic material, and unless otherwise specified, the resin of the material includes, for example, polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, and polybutylene.
  • Thermoplastic resins such as terephthalate, polyetheretherketone, and liquid crystal polymers, and their alloys can be mentioned.
  • a conductive substance such as carbon fiber, carbon powder, carbon nanotube, or conductive polymer is selectively added to the resin of these molding materials. It is also possible to add glass fiber, carbon fiber or the like in order to increase the rigidity.
  • the wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26.
  • the back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-mentioned materials and are integrally molded.
  • the first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other.
  • the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22.
  • the front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 form an opening peripheral edge 28 forming a substantially rectangular container body opening 21.
  • the opening peripheral edge 28 is provided at one end of the container body 2, and the back wall 22 is located at the other end of the container body 2.
  • the outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped.
  • the inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by the substrate storage space. 27 is formed.
  • the container body opening 21 formed in the opening peripheral edge 28 communicates with the substrate storage space 27 formed inside the container body 2 surrounded by the wall portion 20. A maximum of 25 boards W can be stored in the board storage space 27.
  • Latch engaging recesses 231A, 231B, 241A, and 241B recessed outward of the substrate storage space 27 are formed in the upper wall 23 and the lower wall 24 in the vicinity of the opening peripheral edge 28. ing. A total of four latch engaging recesses 231A, 231B, 241A, and 241B are formed in the vicinity of the left and right ends of the upper wall 23 and the lower wall 24.
  • ribs 235 are integrally molded with the upper wall 23.
  • the rib 235 increases the rigidity of the container body 2.
  • a top flange 236 is fixed to the central portion of the upper wall 23.
  • the top flange 236 is a member that is hung and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in AMHS (automatic wafer transfer system), PGV (wafer substrate transfer carriage), or the like.
  • a bottom plate 244 is fixed to the lower wall 24.
  • the bottom plate 244 has a substantially rectangular plate shape that is arranged so as to face substantially the entire lower surface constituting the outer surface of the lower wall 24, and is fixed to the lower wall 24.
  • Two types of through holes are formed in the vicinity of the four corners of the lower wall 24.
  • the two through holes at the front of the lower wall 24 are exhaust holes 243 for discharging the gas inside the container body 2
  • the two through holes at the rear are the container body 2
  • An air supply filter unit 80 as an additional component is arranged in the through hole as the air supply hole 242, and an exhaust filter unit 90 is arranged in the through hole as the exhaust hole 243. That is, the gas flow path inside the air supply filter unit 80 and the exhaust filter unit 90 constitutes a part of the ventilation path capable of communicating the substrate storage space 27 and the space outside the container body 2. Further, the air supply filter unit 80 and the exhaust filter unit 90 are arranged on the wall portion 20, and the air supply filter unit 80 and the exhaust filter unit 90 have a space outside the container body 2. Gas can pass through the substrate storage space 27.
  • the air supply filter unit 80 communicates with the internal space of the gas ejection nozzle unit 8, and the purge gas supplied to the air supply filter unit 80 passes through the internal space of the gas ejection nozzle unit 8 to the substrate storage space 27. It is configured to be supplied.
  • FIG. 5 is a side sectional view showing an exhaust filter portion 90 of the substrate storage container 1 according to the embodiment of the present invention.
  • FIG. 6 is a downward perspective view showing an exhaust filter portion 90 of the substrate storage container 1 according to the embodiment of the present invention.
  • FIG. 7 is an exploded perspective view showing an exhaust filter portion 90 of the substrate storage container 1 according to the embodiment of the present invention.
  • FIG. 8 is a downward perspective view showing the inner housing portion 92 of the exhaust filter portion 90.
  • FIG. 9 is a side view showing the inner housing portion 92 of the exhaust filter portion 90.
  • FIG. 10 is a plan view showing the outer housing portion 94 of the exhaust filter portion 90.
  • FIG. 5 is a side sectional view showing an exhaust filter portion 90 of the substrate storage container 1 according to the embodiment of the present invention.
  • FIG. 6 is a downward perspective view showing an exhaust filter portion 90 of the substrate storage container 1 according to the embodiment of the present invention.
  • FIG. 7 is an exploded perspective view showing an exhaust filter portion 90 of the substrate storage
  • FIG. 11 is a side sectional view showing the outer housing portion 94 cut along the line BB of FIG.
  • FIG. 12 is a partially transparent side view showing the first positional relationship between the inner housing portion 92 and the outer housing portion 94 in the circumferential direction of the exhaust filter portion 90.
  • FIG. 13 is a partially transparent side view showing the second positional relationship between the inner housing portion 92 and the outer housing portion 94 in the circumferential direction of the exhaust filter portion 90.
  • the exhaust filter portion 90 includes an inner opening forming portion 91 as an inner component, an inner housing portion 92, a nozzle portion 93, an outer housing portion 94, a filter 95, and an O-ring. It has 99 and. These are composed of separate bodies composed of separate and independent parts. Further, a ventilation path 901 capable of communicating the substrate storage space 27 and the outer space of the container body 2 by the filter portion housing composed of the inner opening forming portion 91, the inner housing portion 92, the nozzle portion 93 and the outer housing portion 94. Is formed. In the exhaust filter unit 90, gas can pass from the substrate storage space 27 to the space outside the container body 2 via the filter 95.
  • the inner opening forming portion 91 has a disk shape. As shown in FIG. 5, the central portion of the inner opening forming portion 91 has a circular protruding portion 911 protruding upward D21.
  • the peripheral edge portion of the inner opening forming portion 91 has a flat plate-shaped annular peripheral edge portion 912. As shown in FIG. 7, a large number of through holes 906 are formed in the circular protrusion 911 radially from the center of the circular protrusion 911. A large number of through holes 906 penetrate in the vertical direction D2 and form a part of the ventilation path 901. A recess 915 is formed on the lower surface of the annular peripheral edge portion 912.
  • the inner housing portion 92 has an outer tubular portion 921, an end flange portion 922, an end plate-shaped portion 923, and an inner tubular portion 926.
  • the outer tubular portion 921 has a cylindrical shape, and a disk-shaped end plate-shaped portion 923 is integrally formed and connected to the upper end portion of the outer tubular portion 921.
  • the inner housing portion 92 has a male screw portion 929 at a portion arranged inside the outer housing portion 94. Specifically, a male screw portion 929 is engraved on the side surface (outer peripheral surface) of the outer tubular portion 921. At least a part (a portion including the male screw portion 929) of the inner housing portion 92 is arranged inside the outer housing portion 94 and is fastened to the outer housing portion 94.
  • a small flange portion 924 is integrally molded with the outer tubular portion 921 on the side surface portion of the outer tubular portion 921 and above the male screw portion 929.
  • the end flange portion 922 is provided integrally with the outer tubular portion 921 at the upper end portion of the outer tubular portion 921 above the portion of the outer tubular portion 921 where the small flange portion 924 exists.
  • the end flange portion 922 has a protrusion 925 extending upward to D21.
  • the end flange portion 922 is fixed to the annular peripheral edge portion 912 by welding the protrusion 925 and the portion of the annular peripheral edge portion 912 in which the recess 915 is formed in the inner opening forming portion 91.
  • the inner opening forming portion 91 is joined to the side of the substrate storage space 27 in the inner housing portion 92 with the filter 95 sandwiched between them.
  • the inner housing portion 92 is connected to the inner opening forming portion 91 in a coaxial positional relationship with the inner opening forming portion 91.
  • the joining method is not limited to welding, and may be, for example, bonding.
  • the inner housing portion 92 is a portion arranged inside the outer housing portion 94, and a portion where the male screw portion 929 does not exist (for example, a portion that does not overlap when viewed in the radial direction). ), It has a plurality of first engaging portions 928.
  • the first engaging portion 928 projects downward from the lower end portion of the outer tubular portion 921, and is provided so as to be separated from each other in the circumferential direction. In the present embodiment, two first engaging portions 928 are provided at substantially equal intervals.
  • the first engaging portion 928 easily gets over the second engaging portion 948 (described later) of the outer housing portion 94 when moving in the tightening direction, but the first engaging portion 928 of the outer housing portion 94 when moving in the loosening direction. It has a shape that makes it difficult to get over the second engaging portion 948.
  • the inner tubular portion 926 is arranged radially inside the outer tubular portion 921, extends downward from the end plate-shaped portion 923, and extends further downward than the lower end portion of the outer tubular portion 921. ing.
  • the inner tubular portion 926 is arranged in a space formed by the inner peripheral surface of the tubular portion 941 (described later) of the outer housing portion 94 in a coaxial positional relationship with the tubular portion 941 of the outer housing portion 94. There is.
  • the inner tubular portion 926 and the outer tubular portion 921 form a double cylinder, and the space outside the inner tubular portion 926 and the space inside the outer tubular portion 921 extends in the vertical direction D2. It forms an annular space 927.
  • the space 904 inside the inner tubular portion 926 communicates with the through hole 906, while the space outside the inner tubular portion 926 and inside the outer tubular portion 921 is in the through hole 906. There is no communication. Therefore, the space 904 inside the inner tubular portion 926 forms a part of the ventilation path 901.
  • the filter 95 has a disk shape.
  • the peripheral edge of the filter 95 is placed on the end flange 922 and the annular peripheral edge 912 so as to be sandwiched between the end flange 922 of the inner housing portion 92 and the annular peripheral edge 912 of the inner opening forming 91. On the other hand, it is fixed. As a result, the filter 95 is arranged in the ventilation path 901. The filter 95 prevents particles and the like from passing through the through hole 906 of the inner opening forming portion 91.
  • the nozzle portion 93 has a tubular portion 931 and an external protrusion 932.
  • the tubular portion 931 has a cylindrical shape.
  • the lower portion of the tubular portion 931 is integrally molded and connected to the bottom portion 934, and the bottom portion 934 and the external protrusion 932 are integrally molded and connected.
  • the tubular portion 931 is arranged so as to be fitted into the annular space 927 of the inner housing portion 92.
  • the outer diameter of the upper portion of the tubular portion 931 is slightly smaller than the inner diameter of the outer tubular portion 921 of the inner housing portion 92.
  • the external protrusion 932 has a cylindrical shape with a short axial length.
  • the outer diameter and inner diameter of the external protrusion 932 are smaller than the outer diameter and inner diameter of the tubular portion 931, respectively.
  • a cylindrical through hole is formed in the center of the external protrusion 932, and this through hole constitutes the external space side opening 903.
  • the inner diameter of the outer space side opening 903 is slightly larger than the outer diameter on the lower end side of the inner tubular portion 926.
  • the portion of the nozzle portion 93 which is the portion around the external space side opening 903, that is, the lower end portion of the external protruding portion 932, protrudes in the downward direction D22, which is the direction in which the ventilation passage 901 opens in the external space side opening 903. ing.
  • a resin such as polybutylene terephthalate or polyethylene
  • an elastomer such as polyethylene elastomer or polyolefin elastomer
  • a rubber material such as silicon rubber or fluororubber
  • the outer housing portion 94 has a tubular portion 941 and an end inward projecting portion 942.
  • the tubular portion 941 has a cylindrical shape.
  • the inner diameter of the tubular portion 941 is larger than the outer diameter of the outer tubular portion 921 of the inner housing portion 92.
  • the inner housing portion 92 is arranged in a space formed by the inner peripheral surface of the tubular portion 941 of the outer housing portion 94 in a coaxial positional relationship with the tubular portion 941 of the outer housing portion 94. ..
  • the outer housing portion 94 has a female screw portion 949 that meshes with the male screw portion 929 of the inner housing portion 92. Specifically, a female threaded portion 949 is engraved on the inner peripheral surface of the tubular portion 941. The male screw portion 929 of the outer tubular portion 921 of the inner housing portion 92 is screwed into the female screw portion 949. As a result, the outer housing portion 94 is fastened to and fixed to the inner housing portion 92.
  • the end inward projecting portion 942 is integrally molded with the lower end portion of the tubular portion 941. The end inward projecting portion 942 projects inward in the radial direction of the tubular portion 941 from the lower end portion of the tubular portion 941 and has an annular plate shape.
  • a cylindrical through hole is formed in the center of the end inward protrusion 942, and this through hole constitutes the exterior space side opening 902.
  • the outer housing portion 94 has a second engaging portion 948 that engages with the first engaging portion 928 of the inner housing portion 92 at a portion where the female screw portion 949 does not exist (for example, a portion that does not overlap when viewed in the radial direction). Have more than one.
  • the second engaging portion 948 is provided so as to project upward on the inner surface (upper surface) of the end inward projecting portion 942, and is separated in the circumferential direction. In the present embodiment, six second engaging portions 948 are provided at substantially equal intervals in the circumferential direction.
  • the inner housing portion 92 and the lower wall 24 are fixed to each other by an O-ring mounted on a groove formed on the side surface of the inner housing portion 92 (a groove formed between the end flange portion 922 and the small flange portion 924). It is done via 99 (see FIG. 16).
  • an O-ring 99 is used between the inner housing portion 92 and the lower wall 24 to seal between the lower wall 24 and the nozzle portion 93. ..
  • the ventilation passage 901 is formed by the inner opening forming portion 91, the inner housing portion 92, the nozzle portion 93, and the outer housing portion 94 constituting the filter portion housing. More specifically, the ventilation passage 901 follows the through hole 906 of the inner opening forming portion 91, the inner space 904 of the inner tubular portion 926 of the inner housing portion 92, and the outer space side opening 903 of the nozzle portion 93. , It continues to the outer space side opening 902 of the outer housing portion 94.
  • the inner housing portion 92 and the outer housing portion 94 behave as follows and are fastened. The behavior of fastening the inner housing portion 92 and the outer housing portion 94 is due to the relative movement of both portions.
  • the inner housing portion 92 is fixed, and the outer housing portion is fixed with respect to the inner housing portion 92. It will be described as assuming that the 94 moves.
  • the nozzle portion 93 is extrapolated to the inner tubular portion 926 of the inner housing portion 92. Specifically, the tubular portion 931 of the nozzle portion 93 is inserted into the annular space 927, which is the space outside the inner tubular portion 926 of the inner housing portion 92 and is the space inside the outer tubular portion 921.
  • the outer housing portion 94 is fastened to the inner housing portion 92 in that state. Specifically, the female screw portion 949 of the outer housing portion 94 is screwed into the male screw portion 929 of the inner housing portion 92. When screwed, the outer housing portion 94 moves upward to D21 and approaches the inner housing portion 92 while rotating with the vertical direction D2 as the rotation axis. Therefore, the first engaging portion of the inner housing portion 92. With respect to 928, the second engaging portion 948 of the outer housing portion 94 approaches the vertical direction D2 and abuts in the circumferential direction (rotational direction).
  • one of the first engagement portions is between the second engaging portion 948B (upstream side) and the second engaging portion 948C (downstream side) adjacent to each other in the circumferential direction.
  • the state in which the joint portion 928A is arranged is the normal (appropriate) fastening (completion) position.
  • the first engaging portion 928A may not be arranged between the second engaging portion 948B and the second engaging portion 948C (the normal fastening position may not be obtained).
  • first engaging portion 928A was once arranged between the second engaging portion 948B and the second engaging portion 948C (it was once in the normal fastening position), for some reason (for example, the outer housing).
  • the portion 94 is unintentionally rotated in the loosening direction
  • the first engaging portion 928A is between the second engaging portion 948B and the second engaging portion 948A on the upstream side thereof. It may be placed (it may deviate from the normal fastening position).
  • the outer housing portion 94 is indicated by a two-dot chain line (imaginary line). However, it is difficult to confirm whether or not the fastening position is normal.
  • the first engaging portion 928 and the second engaging portion 948 are configured to be visually distinguishable.
  • the outer housing portion 94 includes the first engaging portion 928 and the second engaging portion 948 in a range including the second engaging portion 948 and in a circumferential range around the rotation axis of the female screw portion 949. It is configured so that it can be visually identified as.
  • the tubular portion 941 of the outer housing portion 94 is transparent or translucent.
  • the second engaging portion 948 of the outer housing portion 94 is visually identifiable by being colored or having low transparency with respect to the transparent or translucent tubular portion 941.
  • first engaging portion 928 of the inner housing portion 92 has a different color (red, green, blue, etc.) and transparency from the second engaging portion 948 of the outer housing portion 94, it is easy to visually visually recognize the first engaging portion 928. It is identifiable.
  • Air supply filter unit 80 can pass gas from the space outside the container body 2 to the substrate storage space 27 via a filter (not shown).
  • the air supply filter unit 80 is different from the exhaust filter unit 90 in that the exhaust configuration is changed to the intake configuration, and the basic configuration is the same. Therefore, a specific description will be omitted.
  • the substrate support plate-shaped portions 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are paired in the left-right direction D3 so as to form a pair in the container main body in the substrate storage space 27. It is provided in 2.
  • the substrate support plate-shaped portion 5 has a plate portion 51.
  • the plate portion 51 has a plate-like substantially arc shape.
  • a total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, 25 in the vertical direction D2.
  • the adjacent plate portions 51 are arranged in a parallel positional relationship so as to be separated from each other at intervals of 10 mm to 12 mm in the vertical direction D2.
  • the 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship facing each other in the left-right direction D3.
  • a convex portion is provided on the upper surface of the plate portion 51. The substrate W supported by the plate portion 51 contacts only the protruding end of the convex portion and does not contact the plate portion 51 on the surface.
  • the substrate support plate-shaped portion 5 having such a configuration has a plurality of substrates W in a state in which adjacent substrates W among the plurality of substrates W are separated from each other at a predetermined interval and are in a parallel positional relationship with each other. Can support the edges of the.
  • the back side substrate support portion 6 has a back side edge support portion 60.
  • the back edge support portion 60 is formed by being integrally molded with the container body 2 at the rear end portion of the plate portion 51 of the substrate support plate-shaped portion 5.
  • the number of the back edge support portions 60 corresponding to each of the substrates W that can be stored in the substrate storage space 27, specifically 25, is provided.
  • the rear edge support portions 60 arranged on the first side wall 25 and the second side wall 26 have a positional relationship such as pairing with a front retainer described later in the front-rear direction D1.
  • the substrate W is housed in the substrate storage space 27, and the lid 3 is closed, so that the back edge support portion 60 supports the edge of the edge portion of the substrate W.
  • the inner surface of the lid 3 (the surface on the back side of the lid 3 shown in FIG. 1) at the position of D12 in the immediate rear direction of the opening peripheral edge 28 when the lid 3 closes the container body opening 21.
  • An annular seal member 4 is attached to the surface of the formed step portion facing the surface (seal surface 281) so as to go around the outer peripheral edge portion of the lid body 3.
  • the seal member 4 is arranged so as to go around the lid body 3.
  • the sealing member 4 is made of various thermoplastic elastomers such as polyester-based and polyolefin-based, which are elastically deformable, made of fluororubber, and made of silicon rubber.
  • the seal member 4 When the lid 3 is attached to the opening peripheral edge 28, the seal member 4 is elastically deformed by being sandwiched between the seal surface 281 (see FIG. 1) of the container body 2 and the inner surface of the lid 3. That is, by interposing the seal member 4 between the lid 3 and the container body 2, the lid 3 and the opening peripheral edge 28 are separated from each other without contacting each other, and the lid 3 is separated from the container body 3.
  • the opening 21 can be closed.
  • the substrate W By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken in and out of the substrate storage space 27 in the container body 2.
  • the lid 3 is provided with a latch mechanism.
  • the latch mechanism is provided near both the left and right ends of the lid 3, and as shown in FIG. 1, two upper latches 32A and 32A that can project upward from the upper side of the lid 3 and the lid 3 It includes two lower latch portions 32B and 32B that can project downward from the lower side.
  • the lower latch portions 32B and 32B are shown by breaking a part of the lid 3 in FIG.
  • the two upper latch portions 32A and 32A are arranged near the left and right ends of the upper side of the lid 3, and the two lower latch portions 32B and 32B are arranged near the left and right ends of the lower side of the lid 3. ..
  • An operation unit 33 is provided on the outer surface of the lid 3.
  • the upper latch portions 32A and 32A and the lower latch portions 32B and 32B can be projected from the upper side and the lower side of the lid body 3, and also from the upper side and the lower side. It can be in a state where it does not protrude.
  • the upper latch portions 32A and 32A project upward from the upper side of the lid 3 to engage the latch engaging recesses 231A and 231B of the container body 2, and the lower latch portions 32B and 32B are the lower sides of the lid 3.
  • the lid 3 is fixed to the container body opening 21 of the container body 2 by protruding downward from the container body 2 and engaging with the latch engaging recesses 241A and 241B of the container body 2.
  • a recess (not shown) recessed to the outside (front direction D11) of the substrate storage space 27 is formed.
  • a front retainer (not shown) is fixedly provided in the recess (not shown).
  • the front retainer (not shown) has a front retainer board receiving portion (not shown).
  • Two front retainer substrate receiving portions (not shown) are arranged in pairs in the left-right direction at predetermined intervals.
  • the front retainer substrate receiving portions arranged in pairs in this way are provided in a state of 25 pairs arranged in parallel in the vertical direction.
  • the substrate W is housed in the substrate storage space 27, and the lid 3 is closed, so that the front retainer substrate receiving portion supports the edge of the edge portion of the substrate W.
  • FIG. 14 is a partial front sectional view showing a conventional manufacturing method.
  • FIG. 15 is an upward perspective view showing an embodiment of the manufacturing method of the present invention.
  • FIG. 16 is a cross-sectional view taken along the line CC of FIG. Prior to the description of the embodiment of the manufacturing method of the present invention, the conventional manufacturing method will be described.
  • the container body 2 is shown with the downward direction D22 facing upward and the upward direction D21 facing downward.
  • the inner opening forming portion 91 joined to the inner housing portion 92 is fixed by the fixing jig J101 from the side in the upward direction D21.
  • the outer housing portion 94 was tightened with the torque wrench J103 via the tightening jig J102 to tighten the outer housing portion 94 with respect to the inner housing portion 92.
  • a load is applied to the joint (welding) portion between the inner housing portion 92 and the inner opening forming portion 91, the joint portion is destroyed, and the fastening may not be completed.
  • the inner housing portion 92 and the outer housing portion 94 are tightened by rotating the outer housing portion 94 with the inner housing portion 92 fixed. Therefore, the outer housing portion 94 can be tightened to the inner housing portion 92 without applying a load to the joint portion between the inner housing portion 92 and the inner opening forming portion 91.
  • the inner housing portion 92 is fixed by the fixing jig J1 from the side of the downward D22. In that state, the outer housing portion 94 is tightened with the torque wrench J3 via the tightening jig J2 to tighten the outer housing portion 94 with respect to the inner housing portion 92.
  • the reinforcing jig J4 is a jig for preventing an unnecessarily large load from being applied to the outer housing portion 94 during tightening.
  • the substrate storage container 1 according to the present embodiment includes an outer housing portion 94 and an inner housing portion 92 that is at least partially arranged inside the outer housing portion 94 and is fastened to the outer housing portion 94.
  • the inner housing portion 92 has a male screw portion 929 at a portion arranged inside the outer housing portion 94.
  • the outer housing portion 94 has a female screw portion 949 that meshes with the male screw portion 929.
  • the inner housing portion 92 has a first engaging portion 928 at a portion arranged inside the outer housing portion 94 and where the male screw portion 929 does not exist.
  • the outer housing portion 94 has a second engaging portion 948 that engages with the first engaging portion 928 at a portion where the female screw portion 949 does not exist. In tightening the inner housing portion 92 and the outer housing portion 94, the first engaging portion 928 and the second engaging portion 948 are configured to be visually distinguishable.
  • the inner housing portion 92 and the outer housing are not disturbed by the presence of the male screw portion 929 of the inner housing portion 92 and the female screw portion 949 of the outer housing portion 94.
  • the first engaging portion 928 and the second engaging portion 948 can be visually distinguished. Therefore, the first engaging portion 928 and the second engaging portion 948 are not arranged in a normal positional relationship (not arranged in a normal fastening completion position), and the normal fastening is not possible. It can be easily confirmed (understood).
  • the outer housing portion 94 includes the first engaging portion 928 and the second engaging portion 928 in a range including the second engaging portion 948 and in a circumferential range around the rotation axis of the female screw portion 949. It is configured so that it can be visually distinguished from the engaging portion 948. Therefore, even when the first engaging portion 928 and the second engaging portion 948 are not engaged, the positional relationship between the first engaging portion 928 and the second engaging portion 948 can be easily visually grasped. be able to.
  • the inner housing portion 92 and the outer housing portion 94 are tightened by rotating the outer housing portion 94 with the inner housing portion 92 fixed. Therefore, the outer housing portion 94 can be tightened to the inner housing portion 92 without applying a load to the joint portion between the inner housing portion 92 and the inner opening forming portion 91.
  • each part of the substrate storage container and the exhaust filter portion is not limited to the configuration of each portion of the substrate storage container 1 and the exhaust filter portion 90 in the present embodiment.
  • the exhaust filter portion 90 has a configuration that "the first engaging portion and the second engaging portion can be visually distinguished", which is one of the features of the present invention. Not limited to this.
  • the air supply filter unit 80 and / or the exhaust filter unit 90 may have one of the above-mentioned features of the present invention.
  • the shapes of the container body and the lid, and the number and dimensions of the substrates that can be stored in the container body are the shapes of the container body 2 and the lid 3 in the present embodiment, and the number and dimensions of the substrates W that can be stored in the container body 2.
  • the substrate W in the present embodiment is a silicon wafer having a diameter of 300 mm, but the value is not limited to this value.
  • the back side substrate support portion has a back end edge support portion 60 formed by being integrally molded with the container body 2 at the rear end portion of the plate portion 51 of the substrate support plate-shaped portion 5.
  • the back-side substrate support portion is not integrally molded with the container body, but may be configured as a separate body.
  • the two through holes in the front portion of the lower wall 24 are exhaust holes 243 for discharging the gas inside the container body 2, and the two through holes in the rear portion are the container body.
  • the air supply hole 242 for supplying gas to the inside of No. 2 is not limited to this configuration.
  • at least one of the two through holes at the front of the lower wall may also be an air supply hole for supplying gas to the inside of the container body.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
PCT/JP2020/039851 2020-10-23 2020-10-23 基板収納容器及びその製造方法並びにフィルタ部 Ceased WO2021181742A1 (ja)

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JP2021540202A JP7383712B2 (ja) 2020-10-23 2020-10-23 基板収納容器及びその製造方法並びにフィルタ部
PCT/JP2020/039851 WO2021181742A1 (ja) 2020-10-23 2020-10-23 基板収納容器及びその製造方法並びにフィルタ部
CN202080025655.8A CN114667599A (zh) 2020-10-23 2020-10-23 基板收纳容器及其制造方法以及过滤器部
KR1020217030934A KR102589549B1 (ko) 2020-10-23 2020-10-23 기판수납용기 및 그 제조방법 및 필터부
US17/598,701 US11820575B2 (en) 2020-10-23 2020-10-23 Substrate storing container, method for manufacturing the same, and filter unit
TW110136230A TWI827982B (zh) 2020-10-23 2021-09-29 基板收納容器及其製造方法以及過濾器部

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US20250029857A1 (en) * 2023-07-21 2025-01-23 Entegris, Inc. Module retainer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009246154A (ja) * 2008-03-31 2009-10-22 Shin Etsu Polymer Co Ltd 基板収納容器
JP2016096184A (ja) * 2014-11-12 2016-05-26 ミライアル株式会社 ガスパージ用フィルタ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4204302B2 (ja) 2002-10-25 2009-01-07 信越ポリマー株式会社 収納容器
KR100607302B1 (ko) * 2002-10-25 2006-07-31 신에츠 폴리머 가부시키가이샤 기판 수납 용기
JP4482655B2 (ja) * 2005-04-22 2010-06-16 ゴールド工業株式会社 精密基板収納容器のガスケット
JP4859065B2 (ja) 2007-10-23 2012-01-18 信越ポリマー株式会社 基板収納容器
KR102430081B1 (ko) 2015-11-26 2022-08-05 미라이얼 가부시키가이샤 기판 수납 용기
WO2018047541A1 (ja) * 2016-09-06 2018-03-15 信越ポリマー株式会社 基板収納容器及び気体置換ユニット
WO2018203384A1 (ja) * 2017-05-02 2018-11-08 ミライアル株式会社 基板収納容器
DE112018003608T5 (de) * 2017-07-14 2020-04-16 Shin-Etsu Polymer Co., Ltd. Substratlagerungsbehälter
KR102524025B1 (ko) 2018-02-19 2023-04-21 미라이얼 가부시키가이샤 가스 퍼지용 포트
JP7147116B2 (ja) * 2018-03-28 2022-10-05 信越ポリマー株式会社 基板収納容器
CN112074944B (zh) 2018-04-25 2024-07-05 未来儿股份有限公司 基板收纳容器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009246154A (ja) * 2008-03-31 2009-10-22 Shin Etsu Polymer Co Ltd 基板収納容器
JP2016096184A (ja) * 2014-11-12 2016-05-26 ミライアル株式会社 ガスパージ用フィルタ

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CN114667599A (zh) 2022-06-24
US11820575B2 (en) 2023-11-21
JP7383712B2 (ja) 2023-11-20
KR102589549B1 (ko) 2023-10-13
US20220161985A1 (en) 2022-05-26
KR20220054539A (ko) 2022-05-03

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