JPWO2021106921A5 - - Google Patents
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- Publication number
- JPWO2021106921A5 JPWO2021106921A5 JP2021561447A JP2021561447A JPWO2021106921A5 JP WO2021106921 A5 JPWO2021106921 A5 JP WO2021106921A5 JP 2021561447 A JP2021561447 A JP 2021561447A JP 2021561447 A JP2021561447 A JP 2021561447A JP WO2021106921 A5 JPWO2021106921 A5 JP WO2021106921A5
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- axis
- holding portion
- holding
- vibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 37
- 230000005284 excitation Effects 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 239000000853 adhesive Substances 0.000 claims 2
- 230000001070 adhesive effect Effects 0.000 claims 2
- 238000005260 corrosion Methods 0.000 claims 1
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
- 230000010355 oscillation Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 1
Images
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019212985 | 2019-11-26 | ||
| JP2019212985 | 2019-11-26 | ||
| PCT/JP2020/043779 WO2021106921A1 (ja) | 2019-11-26 | 2020-11-25 | 水晶素子、水晶デバイス及び電子機器並びに水晶素子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021106921A1 JPWO2021106921A1 (enExample) | 2021-06-03 |
| JPWO2021106921A5 true JPWO2021106921A5 (enExample) | 2022-07-19 |
| JP7466568B2 JP7466568B2 (ja) | 2024-04-12 |
Family
ID=76128691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021561447A Active JP7466568B2 (ja) | 2019-11-26 | 2020-11-25 | 水晶素子の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20230006124A1 (enExample) |
| JP (1) | JP7466568B2 (enExample) |
| CN (1) | CN114788176B (enExample) |
| WO (1) | WO2021106921A1 (enExample) |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004165743A (ja) * | 2002-11-08 | 2004-06-10 | Toyo Commun Equip Co Ltd | 圧電基板、圧電振動素子、圧電振動子、圧電発振器、圧電基板ウェハ、圧電基板ウェハの構造、及び製造方法 |
| US8004157B2 (en) | 2005-04-18 | 2011-08-23 | Daishinku Corporation | Piezoelectric resonator plate and piezoelectric resonator device |
| JP5593979B2 (ja) * | 2009-11-11 | 2014-09-24 | セイコーエプソン株式会社 | 振動片、振動子、発振器、センサー及び電子機器 |
| JP5591053B2 (ja) * | 2010-10-01 | 2014-09-17 | セイコーエプソン株式会社 | 振動素子、振動子、発振器及びウェハ |
| JP5674241B2 (ja) | 2010-11-30 | 2015-02-25 | セイコーエプソン株式会社 | 圧電振動片、圧電振動子、電子デバイス |
| US8963402B2 (en) * | 2010-11-30 | 2015-02-24 | Seiko Epson Corporation | Piezoelectric vibrator element, piezoelectric module, and electronic device |
| JP2013046085A (ja) * | 2011-08-22 | 2013-03-04 | Seiko Epson Corp | 圧電振動素子、圧電振動子、電子デバイス、及び電子機器 |
| JP2013110658A (ja) * | 2011-11-24 | 2013-06-06 | Nippon Dempa Kogyo Co Ltd | 圧電振動片、及び圧電デバイス |
| JP6386298B2 (ja) * | 2014-08-28 | 2018-09-05 | 京セラ株式会社 | 水晶素子の製造方法 |
| JP6756564B2 (ja) * | 2016-09-30 | 2020-09-16 | 京セラ株式会社 | 水晶素子、水晶デバイスおよび水晶素子の製造方法 |
| JP6787735B2 (ja) * | 2016-09-30 | 2020-11-18 | 京セラ株式会社 | 水晶素子および水晶デバイス |
| JP6853085B2 (ja) | 2017-03-27 | 2021-03-31 | 京セラ株式会社 | 水晶素子および水晶デバイス |
-
2020
- 2020-11-25 CN CN202080080367.2A patent/CN114788176B/zh active Active
- 2020-11-25 US US17/779,613 patent/US20230006124A1/en active Pending
- 2020-11-25 JP JP2021561447A patent/JP7466568B2/ja active Active
- 2020-11-25 WO PCT/JP2020/043779 patent/WO2021106921A1/ja not_active Ceased
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