JPWO2021105811A1 - - Google Patents

Info

Publication number
JPWO2021105811A1
JPWO2021105811A1 JP2021560756A JP2021560756A JPWO2021105811A1 JP WO2021105811 A1 JPWO2021105811 A1 JP WO2021105811A1 JP 2021560756 A JP2021560756 A JP 2021560756A JP 2021560756 A JP2021560756 A JP 2021560756A JP WO2021105811 A1 JPWO2021105811 A1 JP WO2021105811A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2021560756A
Other languages
Japanese (ja)
Other versions
JPWO2021105811A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021105811A1 publication Critical patent/JPWO2021105811A1/ja
Publication of JPWO2021105811A5 publication Critical patent/JPWO2021105811A5/ja
Priority to JP2025083305A priority Critical patent/JP2025118931A/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B43/00EEPROM devices comprising charge-trapping gate insulators
    • H10B43/40EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/02Disposition of storage elements, e.g. in the form of a matrix array
    • G11C5/025Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/08Address circuits; Decoders; Word-line control circuits
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B43/00EEPROM devices comprising charge-trapping gate insulators
    • H10B43/20EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels
    • H10B43/23EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
    • H10B43/27EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B43/00EEPROM devices comprising charge-trapping gate insulators
    • H10B43/30EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
    • H10B43/35EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D87/00Integrated devices comprising both bulk components and either SOI or SOS components on the same substrate
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0483Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells having several storage transistors connected in series
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B43/00EEPROM devices comprising charge-trapping gate insulators
    • H10B43/50EEPROM devices comprising charge-trapping gate insulators characterised by the boundary region between the core and peripheral circuit regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/421Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
    • H10D86/423Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Memories (AREA)
  • Thin Film Transistor (AREA)
  • Non-Volatile Memory (AREA)
JP2021560756A 2019-11-26 2020-11-13 Withdrawn JPWO2021105811A1 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025083305A JP2025118931A (ja) 2019-11-26 2025-05-19 記憶装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019213485 2019-11-26
PCT/IB2020/060677 WO2021105811A1 (ja) 2019-11-26 2020-11-13 記憶装置、および電子機器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025083305A Division JP2025118931A (ja) 2019-11-26 2025-05-19 記憶装置

Publications (2)

Publication Number Publication Date
JPWO2021105811A1 true JPWO2021105811A1 (https=) 2021-06-03
JPWO2021105811A5 JPWO2021105811A5 (https=) 2023-11-14

Family

ID=76130061

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021560756A Withdrawn JPWO2021105811A1 (https=) 2019-11-26 2020-11-13
JP2025083305A Withdrawn JP2025118931A (ja) 2019-11-26 2025-05-19 記憶装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025083305A Withdrawn JP2025118931A (ja) 2019-11-26 2025-05-19 記憶装置

Country Status (3)

Country Link
US (1) US12193236B2 (https=)
JP (2) JPWO2021105811A1 (https=)
WO (1) WO2021105811A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230074757A (ko) 2020-10-02 2023-05-31 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011187794A (ja) * 2010-03-10 2011-09-22 Toshiba Corp 半導体記憶装置及びその製造方法
JP2012146861A (ja) * 2011-01-13 2012-08-02 Toshiba Corp 半導体記憶装置
JP2015056642A (ja) * 2013-09-13 2015-03-23 株式会社東芝 半導体記憶装置
JP2016171243A (ja) * 2015-03-13 2016-09-23 株式会社東芝 不揮発性半導体記憶装置
JP2017059607A (ja) * 2015-09-15 2017-03-23 株式会社東芝 半導体装置
JP2019012822A (ja) * 2017-06-16 2019-01-24 株式会社半導体エネルギー研究所 半導体装置、および半導体装置の作製方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3999900B2 (ja) * 1998-09-10 2007-10-31 株式会社東芝 不揮発性半導体メモリ
JP2004334982A (ja) * 2003-05-08 2004-11-25 Nec Electronics Corp 行デコーダ、半導体回路装置
JP2010263211A (ja) * 2009-05-04 2010-11-18 Samsung Electronics Co Ltd 積層メモリ素子
JP2011044222A (ja) * 2009-07-22 2011-03-03 Toshiba Corp Nand型フラッシュメモリ
US9595533B2 (en) 2012-08-30 2017-03-14 Micron Technology, Inc. Memory array having connections going through control gates
US10665580B1 (en) * 2019-01-08 2020-05-26 Sandisk Technologies Llc Bonded structure including a performance-optimized support chip and a stress-optimized three-dimensional memory chip and method for making the same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011187794A (ja) * 2010-03-10 2011-09-22 Toshiba Corp 半導体記憶装置及びその製造方法
JP2012146861A (ja) * 2011-01-13 2012-08-02 Toshiba Corp 半導体記憶装置
JP2015056642A (ja) * 2013-09-13 2015-03-23 株式会社東芝 半導体記憶装置
JP2016171243A (ja) * 2015-03-13 2016-09-23 株式会社東芝 不揮発性半導体記憶装置
JP2017059607A (ja) * 2015-09-15 2017-03-23 株式会社東芝 半導体装置
JP2019012822A (ja) * 2017-06-16 2019-01-24 株式会社半導体エネルギー研究所 半導体装置、および半導体装置の作製方法

Also Published As

Publication number Publication date
US12193236B2 (en) 2025-01-07
JP2025118931A (ja) 2025-08-13
WO2021105811A1 (ja) 2021-06-03
US20220375956A1 (en) 2022-11-24

Similar Documents

Publication Publication Date Title
BR112019017762A2 (https=)
BR112021017339A2 (https=)
BR112021018450A2 (https=)
BR112021017637A2 (https=)
BR112021016821A2 (https=)
BR112021016996A2 (https=)
BR112021008711A2 (https=)
BR112019016141A2 (https=)
AU2020104490A5 (https=)
BR112021013944A2 (https=)
BR112021018452A2 (https=)
BR112021017703A2 (https=)
BR112021018102A2 (https=)
BR112019016142A2 (https=)
BR112019016138A2 (https=)
BR112021017234A2 (https=)
BR112021017355A2 (https=)
BR112021018168A2 (https=)
BR112021018093A2 (https=)
BR112021017173A2 (https=)
BR112021017083A2 (https=)
BR112021015080A2 (https=)
BR112021012348A2 (https=)
BR112021018250A2 (https=)
BR112021018584A2 (https=)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231106

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231106

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20241105

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20241212

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250401

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20250520