JPWO2021105811A1 - - Google Patents
Info
- Publication number
- JPWO2021105811A1 JPWO2021105811A1 JP2021560756A JP2021560756A JPWO2021105811A1 JP WO2021105811 A1 JPWO2021105811 A1 JP WO2021105811A1 JP 2021560756 A JP2021560756 A JP 2021560756A JP 2021560756 A JP2021560756 A JP 2021560756A JP WO2021105811 A1 JPWO2021105811 A1 JP WO2021105811A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/40—EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/02—Disposition of storage elements, e.g. in the form of a matrix array
- G11C5/025—Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/08—Address circuits; Decoders; Word-line control circuits
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
- H10B43/35—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D87/00—Integrated devices comprising both bulk components and either SOI or SOS components on the same substrate
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0483—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells having several storage transistors connected in series
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/50—EEPROM devices comprising charge-trapping gate insulators characterised by the boundary region between the core and peripheral circuit regions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
- H10D86/423—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Thin Film Transistor (AREA)
- Non-Volatile Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025083305A JP2025118931A (ja) | 2019-11-26 | 2025-05-19 | 記憶装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019213485 | 2019-11-26 | ||
| PCT/IB2020/060677 WO2021105811A1 (ja) | 2019-11-26 | 2020-11-13 | 記憶装置、および電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025083305A Division JP2025118931A (ja) | 2019-11-26 | 2025-05-19 | 記憶装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021105811A1 true JPWO2021105811A1 (https=) | 2021-06-03 |
| JPWO2021105811A5 JPWO2021105811A5 (https=) | 2023-11-14 |
Family
ID=76130061
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021560756A Withdrawn JPWO2021105811A1 (https=) | 2019-11-26 | 2020-11-13 | |
| JP2025083305A Withdrawn JP2025118931A (ja) | 2019-11-26 | 2025-05-19 | 記憶装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025083305A Withdrawn JP2025118931A (ja) | 2019-11-26 | 2025-05-19 | 記憶装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US12193236B2 (https=) |
| JP (2) | JPWO2021105811A1 (https=) |
| WO (1) | WO2021105811A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230074757A (ko) | 2020-10-02 | 2023-05-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011187794A (ja) * | 2010-03-10 | 2011-09-22 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
| JP2012146861A (ja) * | 2011-01-13 | 2012-08-02 | Toshiba Corp | 半導体記憶装置 |
| JP2015056642A (ja) * | 2013-09-13 | 2015-03-23 | 株式会社東芝 | 半導体記憶装置 |
| JP2016171243A (ja) * | 2015-03-13 | 2016-09-23 | 株式会社東芝 | 不揮発性半導体記憶装置 |
| JP2017059607A (ja) * | 2015-09-15 | 2017-03-23 | 株式会社東芝 | 半導体装置 |
| JP2019012822A (ja) * | 2017-06-16 | 2019-01-24 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3999900B2 (ja) * | 1998-09-10 | 2007-10-31 | 株式会社東芝 | 不揮発性半導体メモリ |
| JP2004334982A (ja) * | 2003-05-08 | 2004-11-25 | Nec Electronics Corp | 行デコーダ、半導体回路装置 |
| JP2010263211A (ja) * | 2009-05-04 | 2010-11-18 | Samsung Electronics Co Ltd | 積層メモリ素子 |
| JP2011044222A (ja) * | 2009-07-22 | 2011-03-03 | Toshiba Corp | Nand型フラッシュメモリ |
| US9595533B2 (en) | 2012-08-30 | 2017-03-14 | Micron Technology, Inc. | Memory array having connections going through control gates |
| US10665580B1 (en) * | 2019-01-08 | 2020-05-26 | Sandisk Technologies Llc | Bonded structure including a performance-optimized support chip and a stress-optimized three-dimensional memory chip and method for making the same |
-
2020
- 2020-11-13 WO PCT/IB2020/060677 patent/WO2021105811A1/ja not_active Ceased
- 2020-11-13 JP JP2021560756A patent/JPWO2021105811A1/ja not_active Withdrawn
- 2020-11-13 US US17/772,280 patent/US12193236B2/en active Active
-
2025
- 2025-05-19 JP JP2025083305A patent/JP2025118931A/ja not_active Withdrawn
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011187794A (ja) * | 2010-03-10 | 2011-09-22 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
| JP2012146861A (ja) * | 2011-01-13 | 2012-08-02 | Toshiba Corp | 半導体記憶装置 |
| JP2015056642A (ja) * | 2013-09-13 | 2015-03-23 | 株式会社東芝 | 半導体記憶装置 |
| JP2016171243A (ja) * | 2015-03-13 | 2016-09-23 | 株式会社東芝 | 不揮発性半導体記憶装置 |
| JP2017059607A (ja) * | 2015-09-15 | 2017-03-23 | 株式会社東芝 | 半導体装置 |
| JP2019012822A (ja) * | 2017-06-16 | 2019-01-24 | 株式会社半導体エネルギー研究所 | 半導体装置、および半導体装置の作製方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US12193236B2 (en) | 2025-01-07 |
| JP2025118931A (ja) | 2025-08-13 |
| WO2021105811A1 (ja) | 2021-06-03 |
| US20220375956A1 (en) | 2022-11-24 |
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