JPWO2021080002A5 - - Google Patents
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- JPWO2021080002A5 JPWO2021080002A5 JP2021553573A JP2021553573A JPWO2021080002A5 JP WO2021080002 A5 JPWO2021080002 A5 JP WO2021080002A5 JP 2021553573 A JP2021553573 A JP 2021553573A JP 2021553573 A JP2021553573 A JP 2021553573A JP WO2021080002 A5 JPWO2021080002 A5 JP WO2021080002A5
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- infrared
- target area
- measurement
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025226291A JP2026026307A (ja) | 2019-10-25 | 2025-12-03 | 放射温度計、温度測定方法及び温度測定プログラム |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019194134 | 2019-10-25 | ||
| JP2019194134 | 2019-10-25 | ||
| JP2020071243 | 2020-04-10 | ||
| JP2020071243 | 2020-04-10 | ||
| PCT/JP2020/039962 WO2021080002A1 (ja) | 2019-10-25 | 2020-10-23 | 放射温度計、温度測定方法及び温度測定プログラム |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025226291A Division JP2026026307A (ja) | 2019-10-25 | 2025-12-03 | 放射温度計、温度測定方法及び温度測定プログラム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021080002A1 JPWO2021080002A1 (https=) | 2021-04-29 |
| JPWO2021080002A5 true JPWO2021080002A5 (https=) | 2023-10-26 |
| JP7785539B2 JP7785539B2 (ja) | 2025-12-15 |
Family
ID=75620149
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021553573A Active JP7785539B2 (ja) | 2019-10-25 | 2020-10-23 | 放射温度計、温度測定方法及び温度測定プログラム |
| JP2025226291A Pending JP2026026307A (ja) | 2019-10-25 | 2025-12-03 | 放射温度計、温度測定方法及び温度測定プログラム |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025226291A Pending JP2026026307A (ja) | 2019-10-25 | 2025-12-03 | 放射温度計、温度測定方法及び温度測定プログラム |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12523532B2 (https=) |
| EP (2) | EP4040122B1 (https=) |
| JP (2) | JP7785539B2 (https=) |
| WO (1) | WO2021080002A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115711730A (zh) * | 2022-11-29 | 2023-02-24 | 北京航天长征飞行器研究所 | 一种运动、能量、尺度连续可控的红外目标模拟系统 |
| JPWO2024241674A1 (https=) | 2023-05-25 | 2024-11-28 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61231422A (ja) * | 1985-04-06 | 1986-10-15 | Horiba Ltd | 放射温度計 |
| JPS62106328A (ja) | 1985-11-01 | 1987-05-16 | Tokyo Electric Power Co Inc:The | 放射温度計 |
| JPS6375629A (ja) * | 1986-09-19 | 1988-04-06 | Minolta Camera Co Ltd | 放射温度計 |
| JPS63285429A (ja) * | 1987-05-18 | 1988-11-22 | Teijin Ltd | 走行糸温度計 |
| JPH0756471B2 (ja) * | 1988-09-27 | 1995-06-14 | 登 中谷 | レーザ多焦点法による粒子の速度、径、屈折率の同時測定方法 |
| US5249142A (en) * | 1989-03-31 | 1993-09-28 | Tokyo Electron Kyushu Limited | Indirect temperature-measurement of films formed on semiconductor wafers |
| JP2832456B2 (ja) | 1989-06-02 | 1998-12-09 | 株式会社加藤製作所 | 特殊車両のアウトリガ |
| JPH08320258A (ja) | 1995-05-25 | 1996-12-03 | Matsushita Electric Ind Co Ltd | 熱画像情報と位置情報を利用した物体検出方法およびその装置 |
| JPH1038696A (ja) | 1996-07-18 | 1998-02-13 | Sony Corp | 赤外線検出装置 |
| JP2001249050A (ja) | 2000-03-07 | 2001-09-14 | Toshiba Corp | 温度測定装置、成膜装置、エッチング装置および温度測定方法、エッチング方法 |
| JP2002188962A (ja) * | 2000-12-19 | 2002-07-05 | Tokyo Electron Ltd | 放射温度測定装置と放射温度測定方法及び半導体製造装置 |
| JP2005207997A (ja) | 2004-01-26 | 2005-08-04 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
| JP2007183207A (ja) | 2006-01-10 | 2007-07-19 | Yamatake Corp | 放射温度センサおよび放射温度計測装置 |
| US8254767B2 (en) | 2008-08-29 | 2012-08-28 | Applied Materials, Inc. | Method and apparatus for extended temperature pyrometry |
| KR101500965B1 (ko) * | 2011-07-06 | 2015-03-17 | 가부시키가이샤 무라타 세이사쿠쇼 | 적층형 전자부품의 적층방향 판정방법, 적층형 전자부품의 적층방향 판정장치, 연속 적층형 전자부품의 제조방법, 및 연속 적층형 전자부품의 제조장치 |
| JP2013200137A (ja) | 2012-03-23 | 2013-10-03 | Omron Corp | 赤外線温度測定装置、赤外線温度測定方法、および、赤外線温度測定装置の制御プログラム |
| JP6198411B2 (ja) * | 2013-03-04 | 2017-09-20 | 大阪瓦斯株式会社 | 温度測定装置 |
| KR20170099157A (ko) * | 2016-02-23 | 2017-08-31 | 삼성전자주식회사 | 온도 정보를 제공하는 방법 및 이를 지원하는 전자 장치 |
| JPWO2022215417A1 (https=) * | 2021-04-09 | 2022-10-13 |
-
2020
- 2020-10-23 EP EP20878512.1A patent/EP4040122B1/en active Active
- 2020-10-23 US US17/770,736 patent/US12523532B2/en active Active
- 2020-10-23 WO PCT/JP2020/039962 patent/WO2021080002A1/ja not_active Ceased
- 2020-10-23 JP JP2021553573A patent/JP7785539B2/ja active Active
- 2020-10-23 EP EP26151326.1A patent/EP4707759A1/en active Pending
-
2025
- 2025-12-03 JP JP2025226291A patent/JP2026026307A/ja active Pending
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