JP7785539B2 - 放射温度計、温度測定方法及び温度測定プログラム - Google Patents

放射温度計、温度測定方法及び温度測定プログラム

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Publication number
JP7785539B2
JP7785539B2 JP2021553573A JP2021553573A JP7785539B2 JP 7785539 B2 JP7785539 B2 JP 7785539B2 JP 2021553573 A JP2021553573 A JP 2021553573A JP 2021553573 A JP2021553573 A JP 2021553573A JP 7785539 B2 JP7785539 B2 JP 7785539B2
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JP
Japan
Prior art keywords
infrared
measurement
temperature
target area
measurement target
Prior art date
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Application number
JP2021553573A
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English (en)
Japanese (ja)
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JPWO2021080002A5 (https=
JPWO2021080002A1 (https=
Inventor
翔 藤野
直之 松本
泰生 古川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
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Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Publication of JPWO2021080002A1 publication Critical patent/JPWO2021080002A1/ja
Publication of JPWO2021080002A5 publication Critical patent/JPWO2021080002A5/ja
Priority to JP2025226291A priority Critical patent/JP2026026307A/ja
Application granted granted Critical
Publication of JP7785539B2 publication Critical patent/JP7785539B2/ja
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/07—Arrangements for adjusting the solid angle of collected radiation, e.g. adjusting or orienting field of view, tracking position or encoding angular position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0831—Masks; Aperture plates; Spatial light modulators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0871—Beam switching arrangements; Photodetection involving different fields of view for a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
JP2021553573A 2019-10-25 2020-10-23 放射温度計、温度測定方法及び温度測定プログラム Active JP7785539B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025226291A JP2026026307A (ja) 2019-10-25 2025-12-03 放射温度計、温度測定方法及び温度測定プログラム

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2019194134 2019-10-25
JP2019194134 2019-10-25
JP2020071243 2020-04-10
JP2020071243 2020-04-10
PCT/JP2020/039962 WO2021080002A1 (ja) 2019-10-25 2020-10-23 放射温度計、温度測定方法及び温度測定プログラム

Related Child Applications (1)

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JP2025226291A Division JP2026026307A (ja) 2019-10-25 2025-12-03 放射温度計、温度測定方法及び温度測定プログラム

Publications (3)

Publication Number Publication Date
JPWO2021080002A1 JPWO2021080002A1 (https=) 2021-04-29
JPWO2021080002A5 JPWO2021080002A5 (https=) 2023-10-26
JP7785539B2 true JP7785539B2 (ja) 2025-12-15

Family

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Family Applications (2)

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JP2021553573A Active JP7785539B2 (ja) 2019-10-25 2020-10-23 放射温度計、温度測定方法及び温度測定プログラム
JP2025226291A Pending JP2026026307A (ja) 2019-10-25 2025-12-03 放射温度計、温度測定方法及び温度測定プログラム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025226291A Pending JP2026026307A (ja) 2019-10-25 2025-12-03 放射温度計、温度測定方法及び温度測定プログラム

Country Status (4)

Country Link
US (1) US12523532B2 (https=)
EP (2) EP4707759A1 (https=)
JP (2) JP7785539B2 (https=)
WO (1) WO2021080002A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115711730A (zh) * 2022-11-29 2023-02-24 北京航天长征飞行器研究所 一种运动、能量、尺度连续可控的红外目标模拟系统
WO2024241674A1 (ja) 2023-05-25 2024-11-28 株式会社堀場製作所 放射温度測定装置、放射温度測定方法及び放射温度測定装置用プログラム

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001249050A (ja) 2000-03-07 2001-09-14 Toshiba Corp 温度測定装置、成膜装置、エッチング装置および温度測定方法、エッチング方法
JP2005207997A (ja) 2004-01-26 2005-08-04 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2007183207A (ja) 2006-01-10 2007-07-19 Yamatake Corp 放射温度センサおよび放射温度計測装置
WO2010025228A2 (en) 2008-08-29 2010-03-04 Applied Materials, Inc. Method and apparatus for extended temperature pyrometry

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61231422A (ja) * 1985-04-06 1986-10-15 Horiba Ltd 放射温度計
JPS62106328A (ja) 1985-11-01 1987-05-16 Tokyo Electric Power Co Inc:The 放射温度計
JPS6375629A (ja) * 1986-09-19 1988-04-06 Minolta Camera Co Ltd 放射温度計
JPS63285429A (ja) 1987-05-18 1988-11-22 Teijin Ltd 走行糸温度計
JPH0756471B2 (ja) * 1988-09-27 1995-06-14 登 中谷 レーザ多焦点法による粒子の速度、径、屈折率の同時測定方法
US5249142A (en) * 1989-03-31 1993-09-28 Tokyo Electron Kyushu Limited Indirect temperature-measurement of films formed on semiconductor wafers
JP2832456B2 (ja) 1989-06-02 1998-12-09 株式会社加藤製作所 特殊車両のアウトリガ
JPH08320258A (ja) 1995-05-25 1996-12-03 Matsushita Electric Ind Co Ltd 熱画像情報と位置情報を利用した物体検出方法およびその装置
JPH1038696A (ja) 1996-07-18 1998-02-13 Sony Corp 赤外線検出装置
JP2002188962A (ja) 2000-12-19 2002-07-05 Tokyo Electron Ltd 放射温度測定装置と放射温度測定方法及び半導体製造装置
WO2013005841A1 (ja) * 2011-07-06 2013-01-10 株式会社村田製作所 積層型電子部品の積層方向判定方法、積層型電子部品の積層方向判定装置、積層型電子部品連の製造方法、及び積層型電子部品連の製造装置
JP2013200137A (ja) * 2012-03-23 2013-10-03 Omron Corp 赤外線温度測定装置、赤外線温度測定方法、および、赤外線温度測定装置の制御プログラム
JP6198411B2 (ja) * 2013-03-04 2017-09-20 大阪瓦斯株式会社 温度測定装置
KR20170099157A (ko) * 2016-02-23 2017-08-31 삼성전자주식회사 온도 정보를 제공하는 방법 및 이를 지원하는 전자 장치
JPWO2022215417A1 (https=) * 2021-04-09 2022-10-13

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001249050A (ja) 2000-03-07 2001-09-14 Toshiba Corp 温度測定装置、成膜装置、エッチング装置および温度測定方法、エッチング方法
JP2005207997A (ja) 2004-01-26 2005-08-04 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2007183207A (ja) 2006-01-10 2007-07-19 Yamatake Corp 放射温度センサおよび放射温度計測装置
WO2010025228A2 (en) 2008-08-29 2010-03-04 Applied Materials, Inc. Method and apparatus for extended temperature pyrometry

Also Published As

Publication number Publication date
US12523532B2 (en) 2026-01-13
EP4707759A1 (en) 2026-03-11
EP4040122A4 (en) 2023-11-22
US20220364930A1 (en) 2022-11-17
WO2021080002A1 (ja) 2021-04-29
EP4040122B1 (en) 2026-02-18
JP2026026307A (ja) 2026-02-16
JPWO2021080002A1 (https=) 2021-04-29
EP4040122A1 (en) 2022-08-10

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